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Interdisciplinary research on quantum imaging opened with 3D semiconductor detector

Administrative Group

Project AreaInterdisciplinary research on quantum imaging opened with 3D semiconductor detector
Project/Area Number 25109001
Research Category

Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionHigh Energy Accelerator Research Organization

Principal Investigator

ARAI Yasuo  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 教授 (90167990)

Co-Investigator(Kenkyū-buntansha) 三好 敏喜  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 研究機関講師 (20470015)
幅 淳二  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 教授 (60180923)
Co-Investigator(Renkei-kenkyūsha) TSUBOYAMA Toru  高エネルギー加速器研究機構, 素粒子原子核研究所, 講師 (80188622)
KAWAHITO Shoji  静岡大学, 電子工学研究所, 教授 (40204763)
TSURU Takeshi  京都大学, 理学研究科, 教授 (10243007)
AWADU Kunio  大阪大学, 工学研究科, 教授 (30324817)
KISHIMOTO Shunji  高エネルギー加速器研究機構, 物質構造科学研究所, 教授 (00195231)
WADA Takehiko  宇宙航空研究開発機構, 宇宙科学研究所, 助教 (50312202)
HATSUI Takaki  理化学研究所, 放射光科学総合研究センター, チームリーダー (40332176)
Project Period (FY) 2013-06-28 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥52,260,000 (Direct Cost: ¥40,200,000、Indirect Cost: ¥12,060,000)
Fiscal Year 2017: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
Fiscal Year 2016: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
Fiscal Year 2015: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Fiscal Year 2014: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
Fiscal Year 2013: ¥8,060,000 (Direct Cost: ¥6,200,000、Indirect Cost: ¥1,860,000)
Keywordsイメージング / 先端機能デバイス / 放射線 / 素粒子実験 / 粒子線 / X線 / 3次元半導体 / 量子線
Outline of Final Research Achievements

In this research, monolithic semiconductor detectors having quantum imaging sensors and readout circuits have been developed, and these detectors are applied to various scientific fields such as elementary particles, cosmology, synchrotron-light source, mass analysis, so on. There are 8 planning research and 14 public researches.
Some examples of achievements are; demonstration of less than 1 micron tracking resolution first in the world, detector noise level reduction to less than 8 electron etc. Further more, complete camera system including large sensors is built and used in synchrotron-light experiments.
This summary group handled these researches and developments, and hosted various kinds of meetings.

Report

(6 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (57 results)

All 2018 2017 2016 2015 2014 2013 Other

All Int'l Joint Research (7 results) Journal Article (19 results) (of which Int'l Joint Research: 6 results,  Peer Reviewed: 17 results,  Open Access: 13 results,  Acknowledgement Compliant: 5 results) Presentation (19 results) (of which Int'l Joint Research: 6 results,  Invited: 13 results) Book (2 results) Remarks (3 results) Patent(Industrial Property Rights) (5 results) (of which Overseas: 2 results) Funded Workshop (2 results)

  • [Int'l Joint Research] Institute of High Energy Physics(中国)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] AGH University, Krakow/Institute of Nuclear Physics, Krakow(ポーランド)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] IFIN-HH(ルーマニア)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Institute of High Energy Physics(中国)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] AGH University, Krakow/Institute of Nuclear Physics, Krakow(ポーランド)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] Institute of High Energy Physics(中国)

    • Related Report
      2015 Annual Research Report
  • [Int'l Joint Research] AGH University, Krakow/Institute of Nuclear Physics, Krakow(Poland)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Development of monolithic pixel detector with SOI technology for the ILC vertex detector2018

    • Author(s)
      Yamada M.、Ono S.、Tsuboyama T.、Arai Y.、Haba J.、Ikegami Y.、Kurachi I.、Togawa M.、Mori T.、Aoyagi W.、Endo S.、Hara K.、Honda S.、Sekigawa D.
    • Journal Title

      Journal of Instrumentation

      Volume: 13 Issue: 01 Pages: C01037-C01037

    • DOI

      10.1088/1748-0221/13/01/c01037

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Performance study of double SOI image sensors2018

    • Author(s)
      Miyoshi T.、Arai Y.、Fujita Y.、Hamasaki R.、Hara K.、Ikegami Y.、Kurachi I.、Nishimura R.、Ono S.、Tauchi K.、Tsuboyama T.、Yamada M.
    • Journal Title

      Journal of Instrumentation

      Volume: 13 Issue: 02 Pages: C02005-C02005

    • DOI

      10.1088/1748-0221/13/02/c02005

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A Low-Noise X-ray Astronomical Silicon-On-Insulator Pixel Detector Using a Pinned Depleted Diode Structure2017

    • Author(s)
      Kamehama Hiroki、Kawahito Shoji、Shrestha Sumeet、Nakanishi Syunta、Yasutomi Keita、Takeda Ayaki、Tsuru Takeshi、Arai Yasuo
    • Journal Title

      Sensors

      Volume: 18 Issue: 1 Pages: 27-27

    • DOI

      10.3390/s18010027

    • NAID

      120006501335

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Front-end electronics of double SOI imaging sensors2017

    • Author(s)
      Toshinobu Miyoshi et al.
    • Journal Title

      Journal of Instrumentation

      Volume: 12 Issue: 02 Pages: 1-8

    • DOI

      10.1088/1748-0221/12/02/c02004

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Synchrotron beam test of a photon counting pixel prototype based on Double-SOI technology2017

    • Author(s)
      Y. Zhou, Y. Lu, R. Hashimoto, R. Nishimura, S. Kishimoto, Y. Arai and Q. Ouyang
    • Journal Title

      J. of Instrumentation

      Volume: 12 Issue: 01 Pages: C01037-C01037

    • DOI

      10.1088/1748-0221/12/01/c01037

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Evaluation of a pulse counting type SOI pixel using synchrotron radiation2017

    • Author(s)
      R. Hashimoto, Y. Arai, N. Igarashi, R. Kumai, Y. Lu, T. Miyoshi, R. Nishimura, Q. Ouyang, Y. Zhou and S. Kishimoto
    • Journal Title

      J. of Instrumentation

      Volume: 12 Issue: 03 Pages: C03061-C03061

    • DOI

      10.1088/1748-0221/12/03/c03061

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Development of electron-tracking Compton imaging system with 30-um SOI pixel sensor2017

    • Author(s)
      Y. Yoshihara, K. Shimazoe, Y. Mizumachi, H. Takahashi, K. Kamada, A. Takeda, T. G. Tsuru, Y. Arai
    • Journal Title

      Journal of Instrumentation

      Volume: 12 Issue: 01 Pages: C01045-C01045

    • DOI

      10.1088/1748-0221/12/01/c01045

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Performance of the INTPIX6 SOI pixel detector2017

    • Author(s)
      Arai Y.、Bugiel Sz.、Dasgupta R.、Idzik M.、Kapusta P.、Kucewicz W.、Miyoshi T.、Turala M.
    • Journal Title

      Journal of Instrumentation

      Volume: 12 Issue: 01 Pages: C01028-C01028

    • DOI

      10.1088/1748-0221/12/01/c01028

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] SOI Monolithic Pixel Detector Technology2017

    • Author(s)
      Yasuo Arai
    • Journal Title

      Proceedings of Science

      Volume: -

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Tradeoff Between Low-Power Operation and Radiation Hardness of Fully Depleted SOI pMOSFET by Changing LDD Conditions2016

    • Author(s)
      Ikuo Kurachi, Kazuo Kobayashi, Marie Mochizuki, Masao Okihara, Hiroki Kasai,Takaki Hatsui, Kazuhiko Hara, Toshinobu Miyoshi, and Yasuo Arai
    • Journal Title

      IEEE Transactions on Electron Devices

      Volume: 63 Pages: 2293-2298

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of an X-ray Imaging system with SOI Pixel Detectors2016

    • Author(s)
      Ryutaro NISHIMURA, Yasuo ARAI, Toshinobu MIYOSHI, Keiichi HIRANO, Shunji KISHIMOTO, Ryo HASHIMOTO
    • Journal Title

      Nuclear Instruments and Methods in Physics Research A

      Volume: 831 Pages: 49-54

    • DOI

      10.1016/j.nima.2016.04.036

    • Related Report
      2016 Annual Research Report 2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Advanced monolithic pixel sensors using SOI technology2016

    • Author(s)
      T. Miyoshi et al.
    • Journal Title

      Nuclear Instruments and Methods A

      Volume: 824 Pages: 439-442

    • DOI

      10.1016/j.nima.2015.11.109

    • Related Report
      2016 Annual Research Report 2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] First results of a Double-SOI pixel chip for X-ray imaging2016

    • Author(s)
      Yunpeng Lu, Qun Ouyang, Yasuo Arai, Yi Liu, Zhigang Wu, Yang Zhou
    • Journal Title

      Nuclear Instruments and Methods in Physics Research A

      Volume: 印刷中 Pages: 44-48

    • DOI

      10.1016/j.nima.2016.04.022

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Characterization of high resolution CMOS monolithic active pixel detector in SOI technology2015

    • Author(s)
      M.I. Ahmed, Y. Arai, S. Glab, M. Idzik, P. Kapusta, T. Miyoshi, A. Takeda and M. Turala
    • Journal Title

      JINST 10 P05010

      Volume: 10 Issue: 05 Pages: 1-15

    • DOI

      10.1088/1748-0221/10/05/p05010

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] 3D integration technology for sensor application using less than 5um-pitch gold cone-bump connection2015

    • Author(s)
      M.Motoyoshi, T.Miyoshi, M.Ikebe and Y.Arai
    • Journal Title

      J. of Instrumentation

      Volume: 10 Issue: 03 Pages: 1-8

    • DOI

      10.1088/1748-0221/10/03/c03004

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] SOI Monolithic Pixel Detector2014

    • Author(s)
      Toshinobu Miyoshi, M.I. Ahmed, Yasuo Arai, Yowichi Fujita, Yukiko, Ikemoto, Ayaki Takeda, and Kazuya Tauchi
    • Journal Title

      J. of Instrumentation

      Volume: 9 Issue: 05 Pages: 1-8

    • DOI

      10.1088/1748-0221/9/05/c05044

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Application of 3D stacking technology to SOI radiation image sensor2013

    • Author(s)
      Y. Arai and M. Motoyoshi
    • Journal Title

      Proceedings of IEEE Electrical Design of Advanced Packaging & Systems (EDAPS)

      Volume: ISBN: 978-1-4799-2312-0 Pages: 5-8

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Monolithic pixel detectors with FD-SOI pixel process technology2013

    • Author(s)
      T. Miyoshi, Y. Arai, et al.
    • Journal Title

      Nucl. Instr. and Meth. A

      Volume: 732 Pages: 530-534

    • DOI

      10.1016/j.nima.2013.06.029

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] SOI技術を用いた放射線イメージセンサーの医学応用2013

    • Author(s)
      三好敏喜
    • Journal Title

      Jpn. J. Med. Phys.

      Volume: 32 Pages: 119-124

    • NAID

      130003397836

    • Related Report
      2013 Annual Research Report
  • [Presentation] SOI X線ピクセル検出器開発プロジェクトの現状2018

    • Author(s)
      新井康夫
    • Organizer
      放射光学会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 量子線イメージセンサ用SOIモノリシックピクセル技術2018

    • Author(s)
      新井康夫
    • Organizer
      映像情報メディア学会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 積分型SOI放射線ピクセルセンサーの開発2018

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会
    • Related Report
      2017 Annual Research Report
  • [Presentation] SOI ピクセルディテクタ用新型DAQシステムの開発現況について2017

    • Author(s)
      西村 龍太郎, 新井 康夫, 三好 敏喜, 平野 馨一, 岸本 俊二, 橋本 亮
    • Organizer
      日本物理学会
    • Place of Presentation
      大阪大学豊中キャンパス(大阪府・豊中市)
    • Year and Date
      2017-03-17
    • Related Report
      2016 Annual Research Report
  • [Presentation] SOI monolithic pixel technology for radiation image sensor2017

    • Author(s)
      Y. Arai
    • Organizer
      2017 IEEE International Electron Devices Meeting (IEDM)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SOI Monolithic Pixel Detector Technology2016

    • Author(s)
      Yasuo Arai
    • Organizer
      International workshop on vertex detectors
    • Place of Presentation
      La Biodola, Isola d’Elba, ITALY
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 2層SOIウエハを用いた放射線イメージセンサー2016

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会
    • Place of Presentation
      東北学院大学( 宮城県仙台市)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Development of SOI Pixel Detectors and their Applications2016

    • Author(s)
      Yasuo Arai
    • Organizer
      International symposium on radiation instruments and users (ISRD2016)
    • Place of Presentation
      高エネルギー加速器研究機構( 茨城県つくば市)
    • Year and Date
      2016-01-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] First results of a Double-SOI pixel chip for X-ray imaging2015

    • Author(s)
      Yunpeng Lu
    • Organizer
      10th International Symposium on the Development and Application of Semiconductor Tracking detectors (HSTD10)
    • Place of Presentation
      西安(中国)
    • Year and Date
      2015-09-25
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a particle and radiation detector using the Silicon-On-Insulator technology2015

    • Author(s)
      Yasuo Arai
    • Organizer
      6th International Workshop on Electrostatic Storage Device
    • Place of Presentation
      理研( 埼玉県和光市)
    • Year and Date
      2015-06-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Introduction of SOI Pixel Activities2015

    • Author(s)
      Yasuo Arai
    • Organizer
      International Workshop on SOI Pixel Detector (SOIPIX2015)
    • Place of Presentation
      片平さくらホール( 宮城県仙台市)
    • Year and Date
      2015-06-03
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Radiation image sensor with Silicon-On-Insulator technology2015

    • Author(s)
      Y. Arai
    • Organizer
      National Symposium on Particles, Detectors and Instrumentation
    • Place of Presentation
      Madurai, India
    • Year and Date
      2015-03-28 – 2015-03-31
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] SOI技術を用いた放射線2次元検出器2014

    • Author(s)
      新井康夫
    • Organizer
      光波センシグ技術研究会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-12-09
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Radiation image sensor with SOI technology2014

    • Author(s)
      Y. Arai
    • Organizer
      2nd Asian Image Sensors and Imaging Systems Symposium
    • Place of Presentation
      東京工業大学
    • Year and Date
      2014-12-01 – 2014-12-02
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] SOI技術を用いた放射線イメージング半導体検出器の開発2014

    • Author(s)
      新井康夫
    • Organizer
      次世代画像入力ビジョンシステム部会定例会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-11-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Lapis SOI Technology and Activities2014

    • Author(s)
      Y Arai
    • Organizer
      Workshop on Active CMOS Pixel Sensors for Particle Tracking (CPIX14)
    • Place of Presentation
      Bonn, Germany
    • Year and Date
      2014-09-15 – 2014-09-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Innovative pixel sensors with an SOI technology2014

    • Author(s)
      Y. Arai
    • Organizer
      日本物理学会年会, Japan-Korea Joint Symposium
    • Place of Presentation
      東海大学
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Application of 3D stacking technology to SOI radiation image sensor2013

    • Author(s)
      Y. Arai
    • Organizer
      IEEE Electrical Design of Advanced Packaging & Systems (EDAPS)
    • Place of Presentation
      Todaiji, Nara, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Evaluation Test of SOI Monolithic Pixel Detectors with High-Speed Readout Electronics2013

    • Author(s)
      T. Miyoshi
    • Organizer
      IEEE Nuclear Science Symposium
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2013 Annual Research Report
  • [Book] Radiation Imaging Detectors Using Soi Technology2017

    • Author(s)
      Y. Arai and I. Kurachi
    • Total Pages
      71
    • Publisher
      Morgan & Claypool Publisher
    • Related Report
      2016 Annual Research Report
  • [Book] Analog Electronics for Radiation Detection (Devices,Circuits, and Systems)2016

    • Author(s)
      Y. Arai, Renato Turchetta (Editor)
    • Total Pages
      306
    • Publisher
      CRC Press
    • Related Report
      2016 Annual Research Report
  • [Remarks] 3次元半導体検出器で切り拓く新たな量子イメージングの展開

    • URL

      http://soipix.jp/index.html

    • Related Report
      2017 Annual Research Report 2016 Annual Research Report 2015 Annual Research Report 2014 Annual Research Report
  • [Remarks] SOI Pixel R&D

    • URL

      http://rd.kek.jp/project/soi/

    • Related Report
      2017 Annual Research Report 2016 Annual Research Report 2015 Annual Research Report
  • [Remarks] 3次元半導体検出器で切り拓く新たな量子イメージングの展開

    • URL

      http://soipix.jp/index.html

    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置2017

    • Inventor(s)
      新井康夫
    • Industrial Property Rights Holder
      新井康夫
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-101258
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] RADIATION-DAMAGE-COMPENSATION-CIRCUIT AND SOI-MOSFET2016

    • Inventor(s)
      倉知郁生、新井康夫、山田美帆
    • Industrial Property Rights Holder
      倉知郁生、新井康夫、山田美帆
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-10-06
    • Related Report
      2016 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] Semiconductor Device and Method for Manufacturing Semiconductor Device2016

    • Inventor(s)
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Holder
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-06-30
    • Related Report
      2016 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体装置およびその製造方法2013

    • Inventor(s)
      新井康夫
    • Industrial Property Rights Holder
      新井康夫
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013
    • Acquisition Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置およびその製造方法2013

    • Inventor(s)
      葛西大樹、新井康夫
    • Industrial Property Rights Holder
      葛西大樹、新井康夫
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-04-05
    • Acquisition Date
      2017-03-17
    • Related Report
      2016 Annual Research Report
  • [Funded Workshop] HSTD11 & SOIPIX20172017

    • Related Report
      2017 Annual Research Report
  • [Funded Workshop] International Workshop on SOI Pixel Detector2015

    • Place of Presentation
      片平さくらホール( 宮城県仙台市)
    • Year and Date
      2015-06-03
    • Related Report
      2015 Annual Research Report

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Published: 2013-07-10   Modified: 2019-07-29  

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