Spatial-arrangement of nano-objects based on monolayer lithography

• Project Area: Strong Photons-Molecules Coupling Fields for Chemical Reactions
• Project/Area Number: 19049010
• Research Category: Grant-in-Aid for Scientific Research on Priority Areas
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Kyoto University
• Principal Investigator: SUGIMURA Hiroyuki 京都大学, 大学院・工学研究科, 教授 (10293656)
• Co-Investigator(Kenkyū-buntansha): MURASE Kuniaki 京都大学, 大学院・工学研究科, 教授 (30283633) ; ICHII Takashi 京都大学, 大学院・工学研究科, 助教 (30447908) ; SATO Nobuo 京都大学, 大学院・工学研究科, 助教 (70397602)
• Project Period (FY): 2007 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥72,000,000 (Direct Cost: ¥72,000,000); Fiscal Year 2010: ¥14,900,000 (Direct Cost: ¥14,900,000); Fiscal Year 2009: ¥20,200,000 (Direct Cost: ¥20,200,000); Fiscal Year 2008: ¥21,100,000 (Direct Cost: ¥21,100,000); Fiscal Year 2007: ¥15,800,000 (Direct Cost: ¥15,800,000)
• Keywords: 微細加工 / リソグラフィ / ナノ粒子 / 自己集積化単分子膜 / 微細組立 / 真空紫外 / 走査型プローブ顕微鏡 / ナノ加工 / ナノ材料

Research Abstract

In this research, micro-nano fabrication and assembly techniques, in which top-down and bottom-up processes are effectively combined, have been developed in order to construct strong photon-molecule coupling microdevices.

Research Products

• [Journal Article] Self-Aligned Nucleation of Gold onto Templates with a Nano-scale Precision Fabricated by Scanning Probe Lithography (2011)
  • Author(s): H. Sugimura, M. Kanda, T. Ichii and K. Murase
  • Journal Title: J. Photochem. Photobiol., A : Chem Volume: 221 Pages: 209-213
  • Peer Reviewed
• [Journal Article] Self-Aligned Nucleation of Gold onto Templates with a Nano-scale Precision Fabricated by Scanning Probe Lithography (2011)
  • Author(s): H.Sugimura, et al
  • Journal Title: Journal of Photochemistry & Photobiology, A Volume: 221 Pages: 209-213
  • Peer Reviewed
• [Journal Article] Molecular packing density of self-assembled monolayer formed from N-(2-aminoethyl)-3-aminopropyltriethoxysilane by a vapor phase process (2011)
  • Author(s): H.Sugimura, et al
  • Journal Title: Chemical Communication Volume: 47 Pages: 8841-8843
  • NAID: 120004225658
  • Peer Reviewed
• [Journal Article] Degradation behavior of release layers for nanoimprint lithography formed on atomically flat Si(111) terraces (2010)
  • Author(s): K.Kuwabara, el al
  • Journal Title: Journal of Vacuum Science & Technology B Volume: 28 Pages: 968-972
  • Peer Reviewed
• [Journal Article] Resin Elongation Phenomenon of Polystwene Nanopillars in Nanoimprint Lithography (2010)
  • Author(s): K.Kuwabara, el al
  • Journal Title: Jpn.J.Appl.Phys Volume: 49 Pages: 106505-106505
  • Peer Reviewed
• [Journal Article] Gold nanoparticle arrays fabricated on a silicon substrate covered with a covalently bonded alkyl monolayer by electroless plating combined with scanning probe anodization lithography (2009)
  • Author(s): Hiroyuki Sugimura, Sin-ichiro Nanjo, Hikaru Sano and Kuniaki Murase
  • Journal Title: J. Phys. Chem. C Volume: 113(27) Pages: 11643-11646
  • Peer Reviewed
• [Journal Article] Alkyl and alkoxyl monolayers directly attached to silicon: chemical durability in aqueous solutions (2009)
  • Author(s): Hikaru Sano, Maeda Hajime, Takashi Ichii, Kuniaki Murase, Kei Noda, Kazumi Matsushige and Hiroyuki Sugimura
  • Journal Title: Langmuir Volume: 25(10) Pages: 5516-5525
  • Peer Reviewed
• [Journal Article] Regulation of Pattern Dimension as a Function of Vacuum Pressure: Alkyl Monolayer Lithography (2009)
  • Author(s): Om P. Khatri, Hikaru Sano, Kuniaki Murase, and Hiroyuki Sugimura
  • Journal Title: Langmuir Volume: 24(20) Pages: 5516-5525
  • Peer Reviewed
• [Journal Article] Gold nanoparticle arrays fabricated on a silicon substrate covered with a covalently bonded alkyl monolayer by electroless plating combined with scanning probe anodization lithography (2009)
  • Author(s): Hiroyuki Sugimura, Sin-ichiro Nanjo, Hikaru Sano, Kuniaki Murase
  • Journal Title: J. Phys. Chem. C Vol.113No.27 Pages: 11643-11646
• [Journal Article] Scanning Probe Anodization Patterning of Si Substrates Covered with a Self-Assembled Monolayer Dependent on Surface Hydrophilicity (2009)
  • Author(s): Jiwon HAN, et al.
  • Journal Title: J.Vac.Sci.Technol.B 27 Pages: 928-933
  • Peer Reviewed
• [Journal Article] Gold nanoparticle arrays fabricated on a silicon substrate covered with a covalently bonded alkyl monolayer by electroless plating combined with scanning probe anodization lithography (2009)
  • Author(s): H.Sugimura, et al.
  • Journal Title: J.Phys.Chem.C 113 Pages: 11643-11646
  • Peer Reviewed
• [Journal Article] Probing the diffusion of vacuum ultraviolet (λ=172 nm) induced oxid ants by nanoparticles immobilization (2009)
  • Author(s): O.Khatri
  • Journal Title: Applied Surface Science 256 Pages: 1507-1513
  • Peer Reviewed
• [Journal Article] Regulation of Pattern Dimension as a Function of Vacuum Pressure : Alkyl Monolayer Lithography (2008)
  • Author(s): Om P. Khatri, Hikaru Sano, Kuniaki Murase, and Hiroyuki Sugimura
  • Journal Title: Langmuir Volume: 24(20) Pages: 12077-12084
  • Peer Reviewed
• [Journal Article] Self-Assembly Guided One-Dimensional Arrangement of Gold Nanoparticles: A Facile Approach (2008)
  • Author(s): Om P. Khatri, Jiwon Han, Takashi Ichii, Kuniaki Murase, and Hiroyuki Sugimura
  • Journal Title: J. Phys. Chem. Volume: C112(42) Pages: 16182-16185
  • Peer Reviewed
• [Journal Article] Structural Organization of Gold Nanoparticles onto the ITO Surface and Its Optical Properties as a Function of Ensemble Size (2008)
  • Author(s): Kuniaki Murase, Hiroyuki Sugimura
  • Journal Title: Langmuir Vol.24No.8 Pages: 3787-3793
• [Journal Article] Regulation of Pattern Dimension as a Function of Vacuum Pressure: Alkyl Monolayer Lithography Om P. Khatri (2008)
  • Author(s): Hikaru Sano, Kuniaki Murase, Hiroyuki Sugimura
  • Journal Title: Langmuir 24(20) Pages: 12077-12084
• [Journal Article] Self-Assembly Guided One-Dimensional Arrangement of Gold Nanoparticles: A Facile Approach Om (2008)
  • Author(s): P. Khatri, Jiwon Han, Takashi Ichii, Kuniaki Murase, Hiroyuki Sugimura
  • Journal Title: J. Phys. Chem. C 112(42) Pages: 16182-16185
• [Journal Article] Structural Organization of Gold Nanoparticles onto the ITO Surface and Its Optical Properties as a Function of Ensemble Size (2008)
  • Author(s): Om P. Khatri, et.al.
  • Journal Title: Langmuir 24 Pages: 3787-3793
  • Peer Reviewed
• [Journal Article] Regulation of Pattern Dimension as a Function of Vacuum Pressure : Alkyl Monolayer Lithography (2008)
  • Author(s): Om P. Khatri, et.al.
  • Journal Title: Langmuir 24 Pages: 12077-12084
  • Peer Reviewed
• [Journal Article] Self-Assembly Guided One-Dimensional Arrangement of Gold Nanoparticles : A Facile Approach (2008)
  • Author(s): Om P. Khatri, et.al.
  • Journal Title: J. Phys. Chem. C 1121 Pages: 16182-16185
  • Peer Reviewed
• [Journal Article] Surface Chemical Conversion of Organosilane Self-Assembled Monolayers with Active Oxygen Species Generated by Vacuum Ultraviolet Irradiation of Atmospheric Oxygen Molecules (2008)
  • Author(s): Young-Jong Kim, 他
  • Journal Title: Japanese Journal of Applied Physics 47 Pages: 307-312
  • Peer Reviewed
• [Journal Article] Structural Organization of Gold Nanoparticles onto the ITO Surface and Its Optical Properties as a Function of Ensemble Size (2008)
  • Author(s): Om P. Khatri, Kuniaki Murase, and Hiroyuki Sugimura
  • Journal Title: Langmuir 24 Pages: 3787-3793
  • Peer Reviewed
• [Journal Article] Patterning of Self-assembled Thin Films Using Vacuum Ultraviolet Irradiation Through Anodic Porous Alumina Mask (2007)
  • Author(s): Masahiro Harada, Sunao Murata, Takashi Yanagishita, Hiroyuki Sugimura, Kazuyuki Nishio, Hideki Masuda
  • Journal Title: Chem. Lett. Vol.36No.10 Pages: 1266-1267
  • NAID: 10019961919
• [Journal Article] Patterning of Self-assembled Thin Films Using Vacuum Ultraviolet Irradiation Through Anodic Porous Alumina Mask (2007)
  • Author(s): Masahiro Harada, 他
  • Journal Title: Chemistry Letters 36 Pages: 1266-1267
  • Peer Reviewed
• [Presentation] Immobilization of Gold Nanoparticles on Silicon Substrates by Visible Light Irradiation (2011)
  • Author(s): T.Ichii
  • Organizer: 6th International Conference on Molecular Electronics and Bioelectronics (M&BE6)
  • Place of Presentation: Sendai, Japan(震災のため)(実際の発表は無い)
• [Presentation] Chemical Manipulation of Metal Nanoparticles via Self-Assembled Monolayer Lithography (2010)
  • Author(s): H.Sugimura
  • Organizer: The 3rd Taiwan-Japan Joint Symposium on Organized Nanomaterials and Nanostructures Related to Photoscience
  • Place of Presentation: 台湾花蓮
  • Year and Date: 2010-03-22
• [Presentation] Gold nanoparticle arrays formed on amino-functional microtemplates fabricated by vacuum ultra-violet lithography (2010)
  • Author(s): J. Yang, Y.-J. Kim, T. Ichii, K. Murase and H. Sugimura
  • Organizer: Pacifichem 2010
  • Place of Presentation: Honolulu, Hawai
• [Presentation] Immobilization of Gold Nanoparticles on Silicon Substrates by Visible Light Irradiation (2010)
  • Author(s): T. Ichii, K. Yamashiro, K. Murase and H. Sugimura
  • Organizer: 13th International Conference on Organized Molecular Films (LB13)
  • Place of Presentation: Quebec City, Canada
• [Presentation] Chemical Manipulation of Metal Nanoparticles via Self-Assembled Monolayer Lithography (2010)
  • Author(s): H. Sugimura, O. P. Khatri, J. Han, H. Sano, M. Kanda, J. Yang, T. Ichii and K. Murase
  • Organizer: The 3rd Taiwan-Japan Joint Symposium on Organized Nanomaterials and Nanostructures Related to Photoscience
  • Place of Presentation: Hualien, Taiwan
• [Presentation] Electrostatic Adhesion of Gold Nanoparticles Spatially Defined by Micro/Nano-Patterned Self-Assembled Monolayers (2010)
  • Author(s): H.Sugimura
  • Organizer: 4th World Congress on Adhesion and Related Phenomena (WCARP-IV)
  • Place of Presentation: Arcachon, France
• [Presentation] Self-aligned deposition and nucleation of gold nanoparticles onto templates with a nanoscale precision fabricated by scanning probe lithography (2010)
  • Author(s): H.Sugimura
  • Organizer: Pacifichem 2010
  • Place of Presentation: Honolulu, Hawai
• [Presentation] Immobilization of gold nanoparticles on silicon substrates by visible light irradiation (2010)
  • Author(s): K.Yamashiro
  • Organizer: Pacifichem 2010
  • Place of Presentation: Honolulu, Hawai
• [Presentation] Gold Nanodot Array on Silicon Fabricated by Scanning Probe Lithography (2009)
  • Author(s): M. Kanda, T. Ichii, K. Murase, H. Sugimura
  • Organizer: AVS 56th International Symposium
  • Place of Presentation: San Jose, California, USA, AS-TuP4
• [Presentation] Gold Nanodot Array on Silicon Fabricated by Scanning Probe Lithography (2009)
  • Author(s): M. Kanda, T. Ichii, K. Murase, H. Sugimura
  • Organizer: AVS 56th International Symposium
  • Place of Presentation: San Jose, California, USA
• [Presentation] Kelvin probe force microscopy on locally modified self-assembled monolayers on Si substrates (2008)
  • Author(s): J. Han, et.al.
  • Organizer: 1th International Conference on Non-contact Atomic Force Microscopy : NCAFM-2008
  • Place of Presentation: Madrid, Spain
  • Year and Date: 2008-09-16
• [Presentation] Fabrication and Photopatterning of Nitrophenyl Terminated Organisilane Self-Assembled Monolayer (2008)
  • Author(s): H. Sugimura, K. Adachi, T. Ichii, and K. Murase
  • Organizer: XXIInd IUPAC Symposium on Photochemistry
  • Place of Presentation: Gothenburg, Sweden
• [Presentation] Fabrication and Photopatterning of Nitrophenyl Terminated Organisilane Self-Assembled Monolayer (2008)
  • Author(s): H. Sugimura, K. Adachi, T. Ichii, K. Murase
  • Organizer: XXIInd IUPAC Symposium on Photochemistry, Gothenburg, Sweden
  • Place of Presentation: Gothenburg, Sweden
• [Presentation] Gold Naonparticles Anchoring on Predefined Sites in Linear Fashion by Combined Approach of Self-Assembly and Scanning Probe Anodization (2008)
  • Author(s): Om P. Khatri, J. Han, T. Ichii, K. Murase, H. Sugimura
  • Organizer: Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2008): 214th Meeting of the Electrochemical Society and 2008 Fall Meeting of the Electrochemical Society of Japan
  • Place of Presentation: Honolulu, Hawaii(MEETING ABSTRACTS, CD)
• [Presentation] Spatially Controlled Functionalization and Chemical Manipulation to Fabricate 2D Arrays of Gold Nanoparticles onto ITO (2007)
  • Author(s): Om Parakash Khatri, Kuniaki Murase, and Hiroyuki Sugimura
  • Organizer: 20th International Microprocesses and Nanotechnology Conference(MNC2007)
  • Place of Presentation: 京都国際会議場
  • Year and Date: 2007-11-08
• [Presentation] Modification and electrical characterization of self-assembled monolayer/silicon samples with and without an interfacial oxide layer by the use of scanning probe microscopes (2007)
  • Author(s): J. Han, H. Sano, T. Ichii, K. Murase, H. Sugimura
  • Organizer: International Conference on Nanoscience and Technology (ICN+T2007)
  • Place of Presentation: Stockholm, Sweden
• [Book] プラズモンナノ材料の最新技術(監修・山田淳) 第6章 パターン形成・加工技術 1.単分子膜リソグラフィによる微細加工 : 金ナノ粒子の選択配置 (2009)
  • Author(s): 杉村博之
  • Publisher: シーエムシー出版
• [Book] Applied Scanning Probe Methods X, Biomimetics and Industrial Applications(Eds. Bharat Bhushan, Harald Fuchs, Masahiko Tomitori)Chapter 33 Scanning Probe Anodization for Nanopatterning (2008)
  • Author(s): Hiroyuki Sugimura
  • Publisher: Springer
• [Remarks]
  • URL: http://www.mtl.kyoto-u.ac.jp/groups/sugimura-g/
• [Remarks]
  • URL: http://www.mtl.kyoto-u.ac.jp/groups/sugimura-g/
• [Remarks]
  • URL: http://www.mtl.kyoto-u.ac.jp/groups/sugimura-g/
• [Remarks]
  • URL: http://www.mtl.kyoto-u.ac.jp/groups/sugimura-g/