Development of functional thin films modified by nano-dopant
Project Area | Nano Materials Science for Atomic Scale Modification |
Project/Area Number |
19053002
|
Research Category |
Grant-in-Aid for Scientific Research on Priority Areas
|
Allocation Type | Single-year Grants |
Review Section |
Science and Engineering
|
Research Institution | Nagoya University (2011) The University of Tokyo (2007-2010) |
Principal Investigator |
|
Co-Investigator(Kenkyū-buntansha) |
EDAGAWA Keiichi 東京大学, 工学系研究科, 准教授 (20223654)
SUGIYAMA Masakazu 東京大学, 工学系研究科, 准教授 (90323534)
TAKIGAWA Yorinobu 大阪府立大学, 工学研究科, 准教授 (70382231)
OHNISHI Tsuyoshi 独立行政法人物質・材料研究機構, 研究員 (80345230)
|
Project Period (FY) |
2007 – 2011
|
Project Status |
Completed (Fiscal Year 2011)
|
Budget Amount *help |
¥98,700,000 (Direct Cost: ¥98,700,000)
Fiscal Year 2011: ¥10,300,000 (Direct Cost: ¥10,300,000)
Fiscal Year 2010: ¥19,700,000 (Direct Cost: ¥19,700,000)
Fiscal Year 2009: ¥13,900,000 (Direct Cost: ¥13,900,000)
Fiscal Year 2008: ¥28,300,000 (Direct Cost: ¥28,300,000)
Fiscal Year 2007: ¥26,500,000 (Direct Cost: ¥26,500,000)
|
Keywords | 薄膜 / 微細構造 / 点欠陥 / PLD / チタン酸ストロンチウム / マンガン酸ストロンチウム / STEM / 原子構造 / 粒界 / 機能元素 / 転位 / 陽イオン不定比 / 構造ユニット / HRTEM / ナノ機能元素 / 機能性薄膜 / 透過型電子顕微鏡 / 走査透過型電子顕微鏡 / 界面 / 薄膜材料 / MOCVD / SrTiO3 / 電子状態 / 化合物半導体 / EDS / EELS |
Research Abstract |
We investigated and developed the controlling technique of the thin solid film microstructure by HRTEM, TEM and STEM as followings. In SrTiO_3 homo-epitaxial thin film growth, we developed a technique of controlling Sr/Ti ratio in the films by changing laser fluence. In Sr-excess films, excess SrO planar faults were formed while Sr vacancies are generated in Ti-excess ones in Ti-excess films. In addition, we also developed a technique of decreasing dislocation density in InGaAs films. In SrMnOa films, we systematically investigated a relationship between the defect structure in the films and the valence change of Mn ions, further, the defects structure of oxygen ion sub-lattices.
|
Report
(7 results)
Research Products
(83 results)