• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Fundamental studies on the low-cost production of high-density BN films by laser-plasma synchronous vapor deposition methods for the next-generation transparent wide bandgap semiconductor materials

Planned Research

Project AreaCreation of Science of Plasma Nano-Interface Interactions
Project/Area Number 21110011
Research Category

Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionNational Institute for Materials Science

Principal Investigator

KOMATSU Shojiro  独立行政法人物質・材料研究機構, 光・電子材料ユニット, グループリーダー (60183810)

Co-Investigator(Kenkyū-buntansha) KOBAYASHI Kazuaki  物質・材料研究機構, 理論計算ユニット, 主幹研究員 (00354150)
CHIKYO Toyohiro  物質・材料研究機構, ナノエレクトロニクス材料ユニット, ユニット長 (10354333)
Project Period (FY) 2009-07-23 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥47,320,000 (Direct Cost: ¥36,400,000、Indirect Cost: ¥10,920,000)
Fiscal Year 2013: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2012: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Fiscal Year 2011: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2010: ¥23,660,000 (Direct Cost: ¥18,200,000、Indirect Cost: ¥5,460,000)
Fiscal Year 2009: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
Keywords窒化ホウ素 / 薄膜 / プラズマ / レーザー / 結晶化学 / 自己組織化 / 多形 / レーザ / 透明半導体 / BN / 反応拡散系 / 階層性
Research Abstract

In this study, we utilized the effects caused by the interaction between plasma and nano-interface of materials. We pursued this subject from the stand point of view of materials science. The structural analyses of obtained materials by using x-ray diffraction played an important role, and which led to discoveries of new polytypes of sp3- bonded BN. In order to understand their nature in terms of inorganic chemistry, we newly introduced Komatsu diagram, in which crystallographic indices such as hexagonality, close-packing index, metastable energy, and iconicity are found to be related systematically. As to the growth mechanism of the metastable polytypic forms, we found a consistent relationship between the B-N bond lengths and preferably grown structures. This led us to find the Bond-Strength Initiative Rule in the CVD growth of metastable structures.

Report

(6 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (68 results)

All 2014 2013 2012 2011 2010 2009

All Journal Article (21 results) (of which Peer Reviewed: 21 results) Presentation (46 results) (of which Invited: 9 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp3-bonded BN films2014

    • Author(s)
      Shojiro Komatsu, Masaharu Shiratani
    • Journal Title

      J. Mater. Res

      Volume: 29 Pages: 485-491

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Self-organized formation of hierarchically-ordered structures in laser-activated plasma CVD of sp3-bonded BN films2014

    • Author(s)
      Shojiro Komatsu, Masaharu Shiratani
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 53

    • NAID

      210000143214

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp3-bonded BN films2014

    • Author(s)
      Shojiro Komatsu, Masaharu Shiratani
    • Journal Title

      J. Mater. Res.

      Volume: 29 Pages: 485491-485491

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Self-organized formation of hierarchically-ordered structures in laser-activated plasma CVD of sp3-bonded BN films2014

    • Author(s)
      Shojiro Komatsu, Masaharu Shiratani
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 53

    • NAID

      210000143214

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First-Principles Study of AlBN and related polytypes2013

    • Author(s)
      K.Kobayashi and S.Komatsu
    • Journal Title

      Trans. Mat. Res. Soc. Jpn

      Volume: 38 Pages: 485-492

    • NAID

      130004676473

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] First-Principles Study of AlBN and related polytypes2013

    • Author(s)
      K. Kobayashi and S. Komatsu
    • Journal Title

      Trans. Mat. Res. Soc. Jpn.

      Volume: 38 Pages: 485492-485492

    • NAID

      130004676473

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First-Principles Study of 8H-, 10H-, 12H-, and 18H-SiC Polytypes2012

    • Author(s)
      Kazuaki KOBAYASHI and Shojiro KOMATSU
    • Journal Title

      Journal of the Physical Society of Japan

      Volume: 81 Issue: 2 Pages: 024714-024714

    • DOI

      10.1143/jpsj.81.024714

    • NAID

      40019151631

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ELECTRON FIELD EMISSION FROM sp3-BONDED BN MICROCONES AS A NONLINEAR COOPERATIVE PHENOMENON2012

    • Author(s)
      Shojiro Komatsu and Masaharu Shiratani
    • Journal Title

      Far East Journal of Dynamical Systems

      Volume: 18 Pages: 33-52

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First-Principles Study of Various BN, SiC, and AlN polytypes2012

    • Author(s)
      K.Kobayashi and S.Komatsu
    • Journal Title

      Trans. Mat. Res. Soc. Jpn

      Volume: 37 Pages: 583-588

    • NAID

      130005004166

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 多様なBN, SiC, AlNポリタイプの第一原理計算2012

    • Author(s)
      小林一昭
    • Journal Title

      RANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN

      Volume: 37 Pages: 583-588

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 8H-, 10H-, 12H-, 18H-SiCポリタイプの第一原理計算2012

    • Author(s)
      小林一昭
    • Journal Title

      JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN

      Volume: 181 Pages: 024714-13

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] New Phases of sp3-bonded Boron Nitride Prepared by Photo-Assisted Plasma Processing Methods : The Fundamentals and Applications to Electronic Devices2011

    • Author(s)
      Shojiro Komatsu, Kazuaki Kobayashi, Takahiro Nagata, and Toyohiro Chikyo
    • Journal Title

      AIP Conf. Proc.

      Volume: 1393 Pages: 31-33

    • DOI

      10.1063/1.3653601

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Photoinduced Phase Transformations in Boron Nitride : New Polytypic Forms of sp3-Bonded (6H- and 30H-)BN2010

    • Author(s)
      S.Komatsu, K.Kobayashi, Y.Sato, D.Hirano, T.Nakamura, T.Nagata,T.Chikyo, T.Watanabe, T.Takizawa, K.Nakamura, T.Hashimoto
    • Journal Title

      J. Phys. Chem

      Volume: C114 Pages: 13176-13186

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] First-Principles Study of 30H-BN Polytypes2010

    • Author(s)
      Kazuaki Kobayashi and Shojiro Komatsu
    • Journal Title

      Materials Transactions

      Volume: 51 Pages: 1497-1503

    • NAID

      10026599660

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] First-principles study of 6H-AlN under various pressure conditions2010

    • Author(s)
      Kazuaki Kobayashi and Shojiro Komatsu
    • Journal Title

      Journal of Physics : Conference Series

      Volume: 215

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Photoinduced Phase Transformations in Boron Nitride : New Polytypic Forms of sp3-Bonded (6H- and 30H-) BN2010

    • Author(s)
      Shojiro Komatsu, Kazuaki Kobayashi, Yuhei Sato, Daisuke Hirano, Takuya Nakamura, Takahiro Nagata, Toyohiro Chikyo, Takayuki Watanabe, Takeo Takizawa, Katsumitsu Nakamura, Takuya Hashimoto
    • Journal Title

      J.Phys.Chem.C

      Volume: 114 Pages: 13176-13186

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First-Principles Study of 30H-BN Polytypes2010

    • Author(s)
      Kazuaki Kobayashi, Shojiro Komatsu
    • Journal Title

      Materials Transactions

      Volume: 51(9) Pages: 1497-1503

    • NAID

      10026599660

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First-principles study of 6H-AlN under various pressure conditions2010

    • Author(s)
      Kazuaki Kobayashi, Shojiro Komatsu
    • Journal Title

      Journal of Physics : Conference Series

      Volume: 215

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2009

    • Author(s)
      S.Komatsu, Y.Sato, D.Hirano, T.Nakamura, K.Koga, A.Yamamoto, T.Nagata, T.Chikyo, T.Watanabe, T.Takizawa, K.Nakamura, T.Hashimoto, M.Shiratani
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: 42

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] First-Principles Study of 10H-BN and 10H-AlN2009

    • Author(s)
      K.Kobayashi and S.Komatsu
    • Journal Title

      Journal of the Physical Society of Japan

      Volume: 78

    • NAID

      10025959598

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2009

    • Author(s)
      Komatsu, S., Sato, Y., Hirano, D., Nakamura, T., Koga, K., Yamamoto, A., Nagata, T, Chikyo, T., Watanabe, T., Takizawa, T., Nakamura, K., Hashimoto, T., Shiratani, M.
    • Journal Title

      J.Phys.D : Appl.Phys. 42

      Pages: 225107-225112

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] sp3-結合性BN多形薄膜のレーザ支援プラズマCVDによる成長2013

    • Author(s)
      小松正二郎
    • Organizer
      プラズマ研究会
    • Place of Presentation
      茨城大学
    • Year and Date
      2013-03-16
    • Related Report
      2012 Annual Research Report
  • [Presentation] 粗大化した結晶単位胞をもつsp3-結合性BN多形の レーザプラズマ複合化CVDによる形成2013

    • Author(s)
      小松正二郎
    • Organizer
      第30回 プラズマプロセシング研究会 (SPP-30)
    • Place of Presentation
      浜松
    • Year and Date
      2013-01-23
    • Related Report
      2012 Annual Research Report
  • [Presentation] 次世代透明半導体・高密度窒化ホウ素の プラズマ・レーザによる低コスト合成法2013

    • Author(s)
      小松正二郎
    • Organizer
      新学術領域「プラズマとナノ界面の相互作用に関する学術基盤の創成」
    • Place of Presentation
      福岡
    • Year and Date
      2013-01-13
    • Related Report
      2012 Annual Research Report
  • [Presentation] レーザプラズマCVDによる異常に大きな格子定数cをもつsp3結合性BN多形の光誘起生成2012

    • Author(s)
      小松正二郎
    • Organizer
      IUMRS-ICCM2012
    • Place of Presentation
      横浜
    • Year and Date
      2012-09-28
    • Related Report
      2012 Annual Research Report
  • [Presentation] 多様なBN, SiC, AlNポリタイプの第一原理計算2012

    • Author(s)
      小林一昭
    • Organizer
      IUMRS-ICCM2012
    • Place of Presentation
      横浜市
    • Year and Date
      2012-09-28
    • Related Report
      2012 Annual Research Report
  • [Presentation] 第一原理計算による直接遷移型バンドギャップを持ったAlNポリタイプの探索2012

    • Author(s)
      小林一昭
    • Organizer
      日本物理学会秋季大会
    • Place of Presentation
      横浜市
    • Year and Date
      2012-09-21
    • Related Report
      2012 Annual Research Report
  • [Presentation] 次世代透明半導体・高密度窒化ホウ素の プラズマ・レーザによる低コスト合成法2012

    • Author(s)
      小松正二郎
    • Organizer
      新学術領域「プラズマとナノ界面の相互作用に関する学術基盤の創成」
    • Place of Presentation
      京都
    • Year and Date
      2012-09-04
    • Related Report
      2012 Annual Research Report
  • [Presentation] 次世代透明半導体・高密度窒化ホウ素の プラズマ・レーザによる低コスト合成法2012

    • Author(s)
      小松正二郎
    • Organizer
      新学術領域「プラズマとナノ界面の相互作用に関する学術基盤の創成」
    • Place of Presentation
      沖縄県宜野湾市
    • Year and Date
      2012-05-20
    • Related Report
      2012 Annual Research Report
  • [Presentation] 多様なBN SiC AlNポリタイプの第一原理計算2012

    • Author(s)
      小林一昭, 小松正二郎
    • Organizer
      日本物理学会第67回年次大会
    • Place of Presentation
      関西学院大学(西宮市)
    • Year and Date
      2012-03-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] AlBNとその関連ポリタイプの第一原理計算2012

    • Author(s)
      小林一昭, 小松正二郎
    • Organizer
      第21回日本MRS学術シンポジウム
    • Place of Presentation
      横浜
    • Year and Date
      2012-02-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Gigantic polytypes of sp3-bonded boron nitride prepared by plasma-laser hybridized CVD2012

    • Author(s)
      小松正二郎, 小林一昭
    • Organizer
      iPlasma Nano-III
    • Place of Presentation
      Pulay Desau, Malaysia
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Gigantic polytypes of sp3-bonded boron nitride prepared by plasma-laser hybridized CVD2012

    • Author(s)
      小松正二郎, 小林一昭
    • Organizer
      iPlasma Nano-III
    • Place of Presentation
      Pulay Desau, Malaysia(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] First-Principles Study of Various SiC polytypes2011

    • Author(s)
      K.Kobayashi, S.Komatsu
    • Organizer
      The 14th Asian Workshop on First-Principles Electronic Structure
    • Place of Presentation
      東京大学(東京都)
    • Year and Date
      2011-11-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] 多様なBN SiC AlNポリタイプの第一原理計算2011

    • Author(s)
      小林一昭, 小松正二郎
    • Organizer
      NIMS-AIST(NRI)計測・計算シミュレーション合同ワークショップ
    • Place of Presentation
      産業技術総合研究所(つくば市)
    • Year and Date
      2011-10-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of photovoltaic devices based on sp3-bonded BN by laser-plasma hybrid CVD method and some related matters2011

    • Author(s)
      小松正二郎
    • Organizer
      Topical workshop on Green plasma-nano technology
    • Place of Presentation
      Suwon, Korea
    • Year and Date
      2011-10-18
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Fabrication of photovoltaic devices based on sp3-bonded BN by laser-plasma hybrid CVD method and some related matters2011

    • Author(s)
      小松正二郎
    • Organizer
      Topical workshop on Green plasma-nano technology
    • Place of Presentation
      Suwon, korea(招待講演)
    • Year and Date
      2011-10-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] Laser-plasma hybrid processing of new BN crystalline films ; basic ideas behind their growth and applications2011

    • Author(s)
      小松正二郎
    • Organizer
      レーザー学会代418回研究会「レーザー応用」
    • Place of Presentation
      阿蘇ファームランド (Phys. 42, 225107(2009))
    • Year and Date
      2011-09-12
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Laser-plasma hybrid processing of new BN crystalline films ; basic ideas behind their growth and applications2011

    • Author(s)
      小松正二郎
    • Organizer
      レーザー学会第418回研究会「レーザー応用」
    • Place of Presentation
      阿蘇ファームランド(阿蘇郡)(招待講演)
    • Year and Date
      2011-09-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎,小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      2nd International Workshop on Plasma Nano-Interfaces
    • Place of Presentation
      Slovenia, Krvavcem
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] New phases of sp3-bonded boron nitride prepared by photo-assisted plasma processing methods : the fundamentals and applications to electronic devices2011

    • Author(s)
      小松正二郎,小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICACNM-2011
    • Place of Presentation
      Chandigarh, Panjab University
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎,小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICNC 2011
    • Place of Presentation
      India, Kottayam, Mahatma Gandhi University
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      2nd International Workshop on Plasma Nano-Interfaces
    • Place of Presentation
      Slovenia, Krvavcem, Hotel Raj(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] New phases of sp3-bonded boron nitride prepared by photo-assisted plasma processing methods : the fundamentals and applications to electronic devices2011

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICACNM-2011
    • Place of Presentation
      Chandigarh, Panjab University(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICNC 2011
    • Place of Presentation
      India, Kottayam, Mahatma Gandhi University(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] レーザプラズマシナジーデポジションによる新しいBN半導体薄膜:そのsp3結合性多型と機能性形態について/New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      The 2nd International Workshop on Plasma Nano-Interfaces
    • Place of Presentation
      Slovenia, Krvavcem, Hotel Raj(招待講演)
    • Related Report
      2010 Annual Research Report
  • [Presentation] 光支援プラズマCVDによるsp3結合性BNの新結晶相:基礎と電デバイスへの応用/New phases of sp3-bonded boron nitride prepared by photo-assisted plasma processing methods : the fundamentals and applications to electronic devices2011

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICACNM-2011
    • Place of Presentation
      India, Chandigarh, Panjab University(招待講演)
    • Related Report
      2010 Annual Research Report
  • [Presentation] レーザプラズマ同期法による新規半導体sp3-結合性BN薄膜とその機能性/New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICNC 2011
    • Place of Presentation
      India, Kottayam, Mahatma Gandhi University(招待講演)
    • Related Report
      2010 Annual Research Report
  • [Presentation] 30H-AlNポリタイプの第一原理計/First-principles study of 30H-AlN polytypes2010

    • Author(s)
      小林一昭、小松正二郎
    • Organizer
      第19回シリコンカーバイド(SiC)及び関連ワイドギャップ半導体研究会
    • Place of Presentation
      つくば国際会議場(エポカルつくば),茨城県つくば市
    • Year and Date
      2010-10-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] Photo-assisted CVD of dense BN : the growth mechanism and applications2010

    • Author(s)
      小松正二郎
    • Organizer
      九州表面・真空研究会2010(兼)第15回九州薄膜表面研究会
    • Place of Presentation
      九州大学 伊都キャンパス
    • Year and Date
      2010-06-12
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Photo-assisted CVD of dense BN : the growth mechanism and applications2010

    • Author(s)
      小松正二郎
    • Organizer
      九州表面・真空研究会2010(兼)第15回九州薄膜表面研究会
    • Place of Presentation
      九州大学伊都キャンパス(福岡市)(招待講演)
    • Year and Date
      2010-06-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] 高密度窒化ホウ素の紫外光励起を伴う(プラズマ支援)化学的気相蒸着による成長とその電子材料への応用 Photo-assisted CVD of dense BN : the growth mechanism and applications2010

    • Author(s)
      小松正二郎
    • Organizer
      九州表面・真空研究会2010(兼)第15回九州薄膜表面研究会
    • Place of Presentation
      九州大学 伊都キャンパス(招待講演)
    • Year and Date
      2010-06-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] 30H-BNポリタイプ構造の第一原理計算/First-principles study of 30H-BN polytypes2010

    • Author(s)
      小林一昭, 小松正二郎
    • Organizer
      日本金属学会2010年春期大会
    • Place of Presentation
      筑波大学, 茨城県つくば市
    • Year and Date
      2010-03-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] BN/Si ヘテロ接合太陽電池 / BN/Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2010

    • Author(s)
      小松正二郎
    • Organizer
      第3回電気電子工学セミナー
    • Place of Presentation
      九州大学システム情報科学研究院
    • Year and Date
      2010-03-23
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] BN/Siヘテロ接合太陽電池/BN/Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2010

    • Author(s)
      小松正二郎
    • Organizer
      第3回電気電子工学セミナー
    • Place of Presentation
      九州大学, 福岡市
    • Year and Date
      2010-03-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高密度BN 薄膜のプラズマ・レーザプロセスによる成長原理と半導体化/growth mechanism and doping of dense-phase BN prelaved by plasma-laser synchronous processing2010

    • Author(s)
      小松正二郎
    • Organizer
      仙台プラズマフォーラム・プラズマナノバイオニクスの基礎研究
    • Place of Presentation
      東北大学
    • Year and Date
      2010-03-13
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 高密度BN薄膜プラズマ・レーザプロセスによる成長原理と半導体化/growth mechanism and doping of dense-phase BN prepared by plasma-laser synchronous processing2010

    • Author(s)
      小松正二郎
    • Organizer
      仙台"プラズマフォーラム"プラズマナノバイオニクスの基礎研究
    • Place of Presentation
      東北大学大学院工学研究科, 仙台市
    • Year and Date
      2010-03-13
    • Related Report
      2009 Annual Research Report
  • [Presentation] レーザ・プラズマ同期CVDにより作製したP型sp3-結合性BN/n型Siヘテロダイオード太陽電池/P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2010

    • Author(s)
      小松正二郎
    • Organizer
      第27回プラズマプロセシング研究会
    • Place of Presentation
      横浜市開港記念会館, 横浜市
    • Year and Date
      2010-02-03
    • Related Report
      2009 Annual Research Report
  • [Presentation] p3結合精BNの新規結晶相:そのレーザプラズマ複合化プロセスによる作製と応用/Sp3-bonded new phases of BN ; their growth by laser-plasma synchronous processing and applications2010

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      TENCON2010
    • Place of Presentation
      福岡国際会議場
    • Related Report
      2010 Annual Research Report
  • [Presentation] レーザプラズマ同期CVDによる新規構造BNの作製/New Phases of Boron Nitride Grown by Laser-Plasma Synchronous Chemical Vapor Deposition2010

    • Author(s)
      小松正二郎, 小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICRP7
    • Place of Presentation
      Paris, Maison de la Chimie
    • Related Report
      2010 Annual Research Report
  • [Presentation] 次世代透明半導体・高密度窒化ホウ素のプラズマ・レーザによる低コスト合成法/Fundamental studies on the low-cost production of high-density BN films by laser-plasma synchronous vapor deposition methods for the next-generation transparent wide bandgap semiconductor materials2010

    • Author(s)
      小松正二郎, 知京豊裕, 小林一昭
    • Organizer
      新学術領域「プラズマナノ界面の相互作用に関する学術基盤の創成」
    • Place of Presentation
      京都大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] レーザ・プラズマ同期プロセスによるsp3-結合性BN多形の結晶学的解析/Crystallographic studies on sp3-bonded BN polytypes prepared by laser-plasma synchronous processing2010

    • Author(s)
      小松正二郎, 小林一昭
    • Organizer
      2010年秋季 第71回 応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス
    • Related Report
      2010 Annual Research Report
  • [Presentation] 次世代透明半導体・高密度窒化ホウ素のプラズマ・レーザによる低コスト合成法/Fundamental studies on the low-cost production of high-density BN films by laser-plasma synchronous vapor deposition methods for the next-generation transparent wide bandgap semiconductor materials2010

    • Author(s)
      小松正二郎, 知京豊裕, 小林一昭
    • Organizer
      新学術領域「プラズマナノ界面の相互作用に関する学術基盤の創成」
    • Place of Presentation
      熱海 南明ホテル
    • Related Report
      2010 Annual Research Report
  • [Presentation] 12H-AlNの第一原理計算と並列化(OpenMP)/First-principles study of 12H-AlN and parallelization(OpenMP)2009

    • Author(s)
      小林一昭, 小松正二郎
    • Organizer
      物性研究所短期研究会計算物理学
    • Place of Presentation
      東京大学物性研究所, 千葉県柏市
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] レーザー支援プラズマCVD法による導電性sp3結合性BN薄膜の作製と特性評価/Characteristics of conductive sp3-bonded BN film by the laser-assisted plasma CVD2009

    • Author(s)
      中村拓也, 小松正二郎, 他
    • Organizer
      日本電子材料技術協会第46回秋期講演大会
    • Place of Presentation
      日本セラミック協会ビル, 東京都新宿区
    • Year and Date
      2009-11-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] レーザ・プラズマ同期CVDにより作製したP型sp3-結合性BN/n型Siヘテロダイオード太陽電池/P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2009

    • Author(s)
      小松正二郎
    • Organizer
      AEPSE 2009
    • Place of Presentation
      BEXCO Convention Center, 釜山, 韓国
    • Year and Date
      2009-09-22
    • Related Report
      2009 Annual Research Report
  • [Presentation] 導電性sp3結合性BN薄膜のレーザ支援プラズマCVD法による低温合成/Low-temperature synthesis of conductive sp3-bonded nH-BN films(n=5, 6,...)by laser-assisted plasma CVD2009

    • Author(s)
      中村拓也, 小松正二郎, 他
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学, 富山市
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 電界電子放出特性を利する自己造形的表面形状を有するSP3結合性窒化ホウ素薄膜とそほ製造方法及びその用途2012

    • Inventor(s)
      小松正二郎, 他
    • Industrial Property Rights Holder
      物材機構
    • Industrial Property Rights Type
      特許
    • Acquisition Date
      2012-02-28
    • Related Report
      2013 Final Research Report
    • Overseas

URL: 

Published: 2009-04-01   Modified: 2018-03-28  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi