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Research on SOI 3D pixel process

Planned Research

Project AreaInterdisciplinary research on quantum imaging opened with 3D semiconductor detector
Project/Area Number 25109002
Research Category

Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionHigh Energy Accelerator Research Organization

Principal Investigator

Arai Yasuo  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 特別教授 (90167990)

Co-Investigator(Kenkyū-buntansha) 倉知 郁生  大学共同利用機関法人高エネルギー加速器研究機構, その他部局等, 特別教授 (00533944)
三好 敏喜  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 研究機関講師 (20470015)
井田 次郎  金沢工業大学, 工学部, 教授 (60506450)
Project Period (FY) 2013-06-28 – 2018-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥286,130,000 (Direct Cost: ¥220,100,000、Indirect Cost: ¥66,030,000)
Fiscal Year 2017: ¥60,190,000 (Direct Cost: ¥46,300,000、Indirect Cost: ¥13,890,000)
Fiscal Year 2016: ¥60,190,000 (Direct Cost: ¥46,300,000、Indirect Cost: ¥13,890,000)
Fiscal Year 2015: ¥60,190,000 (Direct Cost: ¥46,300,000、Indirect Cost: ¥13,890,000)
Fiscal Year 2014: ¥63,440,000 (Direct Cost: ¥48,800,000、Indirect Cost: ¥14,640,000)
Fiscal Year 2013: ¥42,120,000 (Direct Cost: ¥32,400,000、Indirect Cost: ¥9,720,000)
Keywords半導体 / Silicon On Insulator / 放射線センサ / 先端機能デバイス / 微細加工プロセス / 量子線イメージング / 3次元積層 / 低消費電力デバイス / 3次元積層 / 放射線センサー
Outline of Final Research Achievements

We have developed 3-dimentional pixel process which combines sensor and circuit in a Silicon-On-Insulator (SOI) wafer. By introducing a new double SOI technology, we could solve the problem of interference between sensor and circuit, radiation tolerance, charge collection efficiency and so on. Furthermore, we succeeded to reduce leakage current of sensors by adding a pinning layer under Buried Oxide (BOX) layer, and we named this a Pinned Depleted Diode (PDD) structure.
We have also developed Super-Steep transistors, which have very steep Id-Vg characteristic. This is very useful to realize very low-power circuit.

Academic Significance and Societal Importance of the Research Achievements

量子(電子、陽子、ガンマ、X、荷電粒子等)線イメージセンサーは、医療、材料解析、構造解析、X線検査装置等、科学および社会の様々な場面で今後さらに活用が広がっていくと考えられる。SOIピクセル検出器は、このようなセンサーを高機能化、高分解能化、する上で欠かせない技術であり、同時にセンサーを小型で安価に生産できるという特徴を持つ。
本研究により、既存の検出器の機能・性能に満足出来ない研究者自身が、多様な性能を持ったSOIセンサーを設計・開発する事を容易にし、新たな実験手法の開拓に道を開く事が可能となった。

Report

(6 results)
  • 2018 Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (74 results)

All 2018 2017 2016 2015 2014 2013 Other

All Int'l Joint Research (7 results) Journal Article (27 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 26 results,  Open Access: 16 results,  Acknowledgement Compliant: 7 results) Presentation (26 results) (of which Int'l Joint Research: 11 results,  Invited: 15 results) Book (3 results) Remarks (4 results) Patent(Industrial Property Rights) (5 results) (of which Overseas: 2 results) Funded Workshop (2 results)

  • [Int'l Joint Research] IPHC/IN2P3(フランス)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] IHEP(中国)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] AGH Univ. of Science and Technology(ポーランド)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Institute of High Energy Physics(中国)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] AGH-University of Science and Technology/Institute of Nuclear Physics, Krakow(ポーランド)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] Institute of High Energy Physics(中国)

    • Related Report
      2015 Annual Research Report
  • [Int'l Joint Research] AGH University, Krakow/Institute of Nuclear Physics, Krakow(ポーランド)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Fine-Pixel Detector FPIX Realizing Sub-micron Spatial Resolution Developed Based on FD-SOI Technology2018

    • Author(s)
      Sekigawa Daisuke、Endo Shun、Aoyagi Wataru、Hara Kazuhiko、Honda Shunsuke、Tsuboyama Toru、Yamada Miho、Ono Shun、Togawa Manabu、Ikegmi Yoichi、Arai Yasuo、Kurachi Ikuo、Miyoshi Toshinobu、Haba Junji、Hanagki Kazunori
    • Journal Title

      Springer Proceedings in Physics

      Volume: - Pages: 331-338

    • DOI

      10.1007/978-981-13-1316-5_62

    • ISBN
      9789811313158, 9789811313165
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Recent Developments of SOI Pixel Devices2018

    • Author(s)
      Hara Kazuhiko、Sekigawa Daisuke、Endo Shun、Aoyagi Wataru、HONDA Shunsuke、Tsuboyama Toru、Yamada Miho、Ono Shun、Togawa Manabu、Ikegami Yoichi、Arai Yasuo、Kurachi Ikuo、MIYOSHI Toshinobu、Haba Jinji、Hanagaki Kazunori
    • Journal Title

      Proceedings of Science

      Volume: PoS(Vertex 2017)035 Pages: 1-9

    • DOI

      10.22323/1.309.0035

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of monolithic pixel detector with SOI technology for the ILC vertex detector2018

    • Author(s)
      Yamada M.、Ono S.、Tsuboyama T.、Arai Y.、Haba J.、Ikegami Y.、Kurachi I.、Togawa M.、Mori T.、Aoyagi W.、Endo S.、Hara K.、Honda S.、Sekigawa D.
    • Journal Title

      Journal of Instrumentation

      Volume: 13 Issue: 01 Pages: C01037-C01037

    • DOI

      10.1088/1748-0221/13/01/c01037

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Diode Characteristics of a Super-Steep Subthreshold Slope PN-Body Tied SOI-FET for Energy Harvesting Applications2018

    • Author(s)
      Mori Takayuki、Ida Jiro、Momose Shun、Itoh Kenji、Ishibashi Koichiro、Arai Yasuo
    • Journal Title

      IEEE Journal of the Electron Devices Society

      Volume: 6 Pages: 565-570

    • DOI

      10.1109/jeds.2018.2824344

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Performance study of double SOI image sensors2018

    • Author(s)
      Miyoshi T.、Arai Y.、Fujita Y.、Hamasaki R.、Hara K.、Ikegami Y.、Kurachi I.、Nishimura R.、Ono S.、Tauchi K.、Tsuboyama T.、Yamada M.
    • Journal Title

      Journal of Instrumentation

      Volume: 13 Issue: 02 Pages: C02005-C02005

    • DOI

      10.1088/1748-0221/13/02/c02005

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Front-end electronics of double SOI imaging sensors2017

    • Author(s)
      Toshinobu Miyoshi et al.
    • Journal Title

      Journal of Instrumentation

      Volume: 12 Issue: 02 Pages: 1-8

    • DOI

      10.1088/1748-0221/12/02/c02004

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Performance of the INTPIX6 SOI pixel detector2017

    • Author(s)
      Arai Y.、Bugiel Sz.、Dasgupta R.、Idzik M.、Kapusta P.、Kucewicz W.、Miyoshi T.、Turala M.
    • Journal Title

      Journal of Instrumentation

      Volume: 12 Issue: 01 Pages: C01028-C01028

    • DOI

      10.1088/1748-0221/12/01/c01028

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] A Low-Noise X-ray Astronomical Silicon-On-Insulator Pixel Detector Using a Pinned Depleted Diode Structure2017

    • Author(s)
      Kamehama Hiroki、Kawahito Shoji、Shrestha Sumeet、Nakanishi Syunta、Yasutomi Keita、Takeda Ayaki、Tsuru Takeshi、Arai Yasuo
    • Journal Title

      Sensors

      Volume: 18 Issue: 1 Pages: 27-27

    • DOI

      10.3390/s18010027

    • NAID

      120006501335

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] SOI Monolithic Pixel Detector Technology2017

    • Author(s)
      Y. Arai
    • Journal Title

      Proceedings of Science

      Volume: -

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Tradeoff Between Low-Power Operation and Radiation Hardness of Fully Depleted SOI pMOSFET by Changing LDD Conditions2016

    • Author(s)
      Ikuo Kurachi, Kazuo Kobayashi, Marie Mochizuki, Masao Okihara, Hiroki Kasai,Takaki Hatsui, Kazuhiko Hara, Toshinobu Miyoshi, and Yasuo Arai
    • Journal Title

      IEEE Transactions on Electron Devices

      Volume: 63 Pages: 2293-2298

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of an X-ray Imaging system with SOI Pixel Detectors2016

    • Author(s)
      Ryutaro NISHIMURA, Yasuo ARAI, Toshinobu MIYOSHI, Keiichi HIRANO, Shunji KISHIMOTO, Ryo HASHIMOTO
    • Journal Title

      Nuclear Instruments and Methods in Physics Research A

      Volume: 831 Pages: 49-54

    • DOI

      10.1016/j.nima.2016.04.036

    • Related Report
      2016 Annual Research Report 2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Advanced monolithic pixel sensors using SOI technology2016

    • Author(s)
      T. Miyoshi et al.
    • Journal Title

      Nuclear Instruments and Methods A

      Volume: 824 Pages: 439-442

    • DOI

      10.1016/j.nima.2015.11.109

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Super Steep Subthreshold Slope PN-Body Tied SOI FET’s of Ultra Low Drain Voltage=0.1V with Body Bias below 1.0V2016

    • Author(s)
      Takahiro Yoshida, Jiro Ida, Takashi Horii, Masao Okihara and Yasuo Arai
    • Journal Title

      Proceedings of IEEE SOI-3D-Subtreshold Microelectronics Unified Conference

      Volume: - Pages: 1-3

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Compensation for radiation damage for SOI pixel detector via tunneling2016

    • Author(s)
      M. Yamada, Y. Arai, Y. Fujita, R. Hamasaki, Y. Ikegami, I. Kurachi, R. Nishimura, K. Tauchi and T. Tsuboyama
    • Journal Title

      Instruments and Methods in Physics Research A

      Volume: 印刷中 Pages: 309314-309314

    • DOI

      10.1016/j.nima.2016.04.110

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] First results of a Double-SOI pixel chip for X-ray imaging2016

    • Author(s)
      Yunpeng Lu, Qun Ouyang, Yasuo Arai, Yi Liu, Zhigang Wu, Yang Zhou
    • Journal Title

      Nuclear Instruments and Methods in Physics Research A

      Volume: 印刷中 Pages: 44-48

    • DOI

      10.1016/j.nima.2016.04.022

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Tradeoff Between Low-Power Operation and Radiation Hardness of Fully Depleted SOI pMOSFET by Changing LDD Conditions2016

    • Author(s)
      Ikuo Kurachi, Kazuo Kobayashi, Marie Mochizuki, Masao Okihara, Hiroki Kasai, Takaki Hatsui, Kazuhiko Hara,Toshinobu Miyoshi, and Yasuo Arai
    • Journal Title

      IEEE Trans. on Elec. Devices

      Volume: 印刷中 Issue: 6 Pages: 2293-2298

    • DOI

      10.1109/ted.2016.2552486

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Super steep subthreshold slope PN-body tied SOI FET with ultra low drain voltage down to 0.1V2015

    • Author(s)
      Jiro Ida, Takayuki Mori, Yousuke Kuramoto, Takashi Horii, Takahiro Yoshida, Kazuma Takeda, Hiroki Kasai, Masao Okihara, Yasuo Arai
    • Journal Title

      IEEE International Electron Devices Meeting (IEDM)

      Volume: 15800967 Pages: 22.7.1-22.7.4

    • DOI

      10.1109/iedm.2015.7409761

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 3D integration technology for sensor application using less than 5um-pitch gold cone-bump connection2015

    • Author(s)
      M.Motoyoshi, T.Miyoshi, M.Ikebe and Y.Arai
    • Journal Title

      J. of Instrumentation

      Volume: 10 Issue: 03 Pages: 1-8

    • DOI

      10.1088/1748-0221/10/03/c03004

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Investigation of charge-collection efficiency of Kyoto's X-ray astronomical SOI pixel sensors, XRPIX2014

    • Author(s)
      Matsumura, Hideaki; Tsuru, Takeshi Go; Tanaka, Takaaki; Nakashima, Shinya; Ryu, Syukyo G.; Takeda, Ayaki; Arai, Yasuo; Miyoshi, Toshinobu
    • Journal Title

      Nuclear Inst. and Methods in Physics Research, A

      Volume: 765 Pages: 183-186

    • DOI

      10.1016/j.nima.2014.05.025

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Synthetizable digital library created to facilitate design of SOI detectors in 200 nm SOI technology2014

    • Author(s)
      S. Glab, M. Baszczyk, P. Dorosz, M. Idzik, W. Kucewicz, M. Sapor, Y. Arai, T. Miyoshi, P. Kapusta, A. Takeda
    • Journal Title

      Signals and Electronic Systems (ICSES)

      Volume: 14719338 Pages: 1-4

    • DOI

      10.1109/icses.2014.6948729

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Total Ionization Damage Compensations in Double Silicon-on-Insulator Pixel Sensors2014

    • Author(s)
      S. HONDA, K. HARA, K. TSUCHIDA, M. ASANO, N. TOBITA, T. MAEDA, Y. ARAI, T. MIYOSHI, et al.
    • Journal Title

      Proceedings of Science

      Volume: TIPP2014 Pages: 1-8

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] SOI Monolithic Pixel Detector2014

    • Author(s)
      Toshinobu Miyoshi, M.I. Ahmed, Yasuo Arai, Yowichi Fujita, Yukiko, Ikemoto, Ayaki Takeda, and Kazuya Tauchi
    • Journal Title

      J. of Instrumentation

      Volume: 9 Issue: 05 Pages: 1-8

    • DOI

      10.1088/1748-0221/9/05/c05044

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Monolithic pixel detectors with FD-SOI pixel process technology2013

    • Author(s)
      T. Miyoshi, Y. Arai, et al.
    • Journal Title

      Nucl. Instr. and Meth. A

      Volume: 732 Pages: 530-534

    • DOI

      10.1016/j.nima.2013.06.029

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Application of 3D stacking technology to SOI radiation image sensor2013

    • Author(s)
      Y. Arai and M. Motoyoshi
    • Journal Title

      Proceedings of IEEE Electrical Design of Advanced Packaging & Systems (EDAPS)

      Volume: ISBN: 978-1-4799-2312-0 Pages: 5-8

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Measurement results of DIPIX pixel sensor developed in SOI technology2013

    • Author(s)
      M. I. Ahmed, Y. Arai, T. Miyoshi, et al.
    • Journal Title

      Nucl. Instr. and Meth. A

      Volume: 718 Pages: 274-278

    • DOI

      10.1016/j.nima.2012.10.099

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Mechanism of Super Steep Subthreshold Slope Characteristics with Body-Tied SOI MOSFET2013

    • Author(s)
      Takayuki Mori, Jiro Ida
    • Journal Title

      Proceedings of SISPAD Conference

      Volume: 1 Pages: 101-104

    • DOI

      10.1109/sispad.2013.6650584

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Possibility of SOI Based Super Steep Subthreshold Slope MOSFETSfor Ultra Low Voltage Application2013

    • Author(s)
      Takayuki Mori and Jiro Ida
    • Journal Title

      Proceedings of S3S Conference

      Volume: 1 Pages: 1-2

    • DOI

      10.1109/s3s.2013.6716550

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Activities on SOI Monolithic X-Ray Imaging Detectors2018

    • Author(s)
      Yasuo Arai
    • Organizer
      Gordon Research Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Activities on Silicon-On-Insulator Detectors2018

    • Author(s)
      Yasuo Arai
    • Organizer
      The 1st Workshop on Quantum Beam Imaging
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SOIPIX: Status & Perspectives, ~ ILC vertex detector & 3D Integration ~2018

    • Author(s)
      Yasuo Arai
    • Organizer
      International workshop on the high energy Circular Electron-Positron Collider
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SOI ピクセルディテクタ用新型DAQシステムの開発現況について2017

    • Author(s)
      西村 龍太郎, 新井 康夫, 三好 敏喜, 平野 馨一, 岸本 俊二, 橋本 亮
    • Organizer
      日本物理学会
    • Place of Presentation
      大阪大学豊中キャンパス(大阪府・豊中市)
    • Year and Date
      2017-03-17
    • Related Report
      2016 Annual Research Report
  • [Presentation] CP 法による SOI 裏面界面準位密度の評価2017

    • Author(s)
      武田 和馬,井田 次郎, 林 拓郎,細野 竜太郎, 新井康夫
    • Organizer
      応用物理学会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] High Resolution SOI Pixel Detector2017

    • Author(s)
      Yasuo Arai
    • Organizer
      International Symposium HSTD11 & SOIPIX2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SOI monolithic pixel technology for radiation image sensor2017

    • Author(s)
      Yasuo Arai
    • Organizer
      2017 IEEE Electron Device Meeting (IEDM17)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SOI Monolithic Pixel Detector Technology2016

    • Author(s)
      Yasuo Arai
    • Organizer
      International workshop on vertex detectors
    • Place of Presentation
      Isola d'Elba, Italy
    • Year and Date
      2016-09-25
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SOI ピクセルディテクタを用いた放射光用X線計測システムの現況について2016

    • Author(s)
      西村 龍太郎, 新井 康夫, 三好 敏喜, 平野 馨一, 岸本 俊二, 橋本 亮
    • Organizer
      日本物理学会
    • Place of Presentation
      金沢大学(石川県・金沢市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Confirmation of SS=35μV/dec over 3 Decades of Drain Current and Hole Accumulation Effect on PN-Body Tied SOI Super Steep SS FET’s2016

    • Author(s)
      Takashi Horii, Jiro Ida, Takahiro Yoshida, Masao Okihara and Yasuo Arai
    • Organizer
      IEEE SILICON NANOELECTRONICS WORKSHOP 2016
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2016-06-12
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] チャージポンピング法によるSOIデバイスの埋め込み酸化膜裏面界面の評価2016

    • Author(s)
      (2)瀧久幸
    • Organizer
      電子デバイス界面テクノロジー研究会
    • Place of Presentation
      東レ総合研修センタ-( 静岡県三島市)
    • Year and Date
      2016-01-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] Development of SOI Pixel Detectors and their Applications2016

    • Author(s)
      Yasuo Arai
    • Organizer
      International symposium on radiation instruments and users (ISRD) 2016
    • Place of Presentation
      高エネルギー加速器研究機構( 茨城県つくば市)
    • Year and Date
      2016-01-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Super Steep Subthreshold Slope PN-Body Tied SOI FET with Ultra Low Drain Voltage down to 0.1V2015

    • Author(s)
      Jiro Ida
    • Organizer
      IEEE International Electron Devices Meeting (IEDM)
    • Place of Presentation
      Washington, D.C.(USA)
    • Year and Date
      2015-12-07
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a particle and radiation detector using the Silicon-On-Insulator technology2015

    • Author(s)
      Yasuo Arai
    • Organizer
      6th International Workshop on Electrostatic Storage Device
    • Place of Presentation
      理研( 埼玉県和光市)
    • Year and Date
      2015-06-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Introduction of SOI Pixel2015

    • Author(s)
      Yasuo Arai
    • Organizer
      International Workshop on SOI Pixel Detector (SOIPIX2015)
    • Place of Presentation
      片平さくらホール( 宮城県仙台市)
    • Year and Date
      2015-06-03
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Radiation image sensor with Silicon-On-Insulator technology2015

    • Author(s)
      Y. Arai
    • Organizer
      National Symposium on Particles, Detectors and Instrumentation
    • Place of Presentation
      Madurai, India
    • Year and Date
      2015-03-28 – 2015-03-31
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Radiation image sensor with SOI technology2014

    • Author(s)
      Y. Arai
    • Organizer
      2nd Asian Image Sensors and Imaging Systems Symposium
    • Place of Presentation
      東京
    • Year and Date
      2014-12-01 – 2014-12-02
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] SOI技術を用いた放射線イメージング半導体検出器の開発2014

    • Author(s)
      新井康夫
    • Organizer
      次世代画像入力ビジョンシステム部会定例会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-11-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Front End Electronics for SOI Monolithic Pixel Sensor2014

    • Author(s)
      T. Miyoshi
    • Organizer
      Topical Workshop on Electronics for Particle Physics
    • Place of Presentation
      Aix en Provence, France
    • Year and Date
      2014-09-22 – 2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] トンネリング現象を利用したSOIデバイスの放射線損傷回復2014

    • Author(s)
      山田美帆
    • Organizer
      日本物理学会
    • Place of Presentation
      佐賀大学
    • Year and Date
      2014-09-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] Lapis SOI Technology and Activities2014

    • Author(s)
      Y. Arai
    • Organizer
      Workshop on Active CMOS Pixel Sensors for Particle Tracking (CPIX14)
    • Place of Presentation
      Bonn, Germany
    • Year and Date
      2014-09-15 – 2014-09-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Research Status of Super Steep Cut off Devices and Possibility of it by SOI Based Devices for Ultra Low Power Applications2014

    • Author(s)
      J. Ida
    • Organizer
      2014 CMOS Emerging Technologies Workshop
    • Place of Presentation
      Grenoble, France
    • Year and Date
      2014-06-06 – 2014-06-08
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Innovative pixel sensors with an SOI technology2014

    • Author(s)
      Y. Arai
    • Organizer
      日本物理学会、Japan-Korea Joint Symposium
    • Place of Presentation
      東海大学
    • Year and Date
      2014-03-27 – 2014-03-30
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 極低ドレイン電圧で急峻なサブスレッショルド特性を持つPNボディコンタクト付きSOI MOSFETの提案2014

    • Author(s)
      森 貴之、田篠 奏、井田 次郎
    • Organizer
      応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2014-03-17 – 2014-03-20
    • Related Report
      2013 Annual Research Report
  • [Presentation] Application of 3D stacking technology to SOI radiation image sensor2013

    • Author(s)
      Y. Arai
    • Organizer
      IEEE Electrical Design of Advanced Packaging & Systems (EDAPS)
    • Place of Presentation
      Todaiji, Nara, Japan
    • Year and Date
      2013-12-12 – 2013-12-15
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Evaluation Test of SOI Monolithic Pixel Detectors with High-Speed Readout Electronics2013

    • Author(s)
      T. Miyoshi
    • Organizer
      IEEE Nuclear Science Symposium
    • Place of Presentation
      Seoul Korea
    • Year and Date
      2013-10-27 – 2013-11-02
    • Related Report
      2013 Annual Research Report
  • [Book] Radiation Imaging Detectors Using SOI Technology2017

    • Author(s)
      Y. Arai and I. Kurachi
    • Total Pages
      71
    • Publisher
      Morgan & Claypool Publisher
    • ISBN
      9781627056960
    • Related Report
      2017 Annual Research Report
  • [Book] Radiation Imaging Detectors Using Soi Technology2017

    • Author(s)
      Y. Arai and I. Kurachi
    • Total Pages
      71
    • Publisher
      Morgan & Claypool Publisher
    • Related Report
      2016 Annual Research Report
  • [Book] Radiation Imaging Detectors Using Soi Technology2016

    • Author(s)
      Y. Arai, Renato Turchetta(Editor)
    • Total Pages
      306
    • Publisher
      CRC Press
    • Related Report
      2016 Annual Research Report
  • [Remarks] SOI Pixel Detector R&D

    • URL

      http://rd.kek.jp/project/soi/

    • Related Report
      2017 Annual Research Report 2016 Annual Research Report 2015 Annual Research Report 2014 Annual Research Report 2013 Annual Research Report
  • [Remarks] 3次元半導体検出器で切り拓く新たな量子イメージングの展開

    • URL

      https://soipix.jp

    • Related Report
      2017 Annual Research Report
  • [Remarks] 3次元半導体検出器で切り拓く新たな量子イメージングの展開

    • URL

      http://soipix.jp/index.html

    • Related Report
      2016 Annual Research Report 2015 Annual Research Report 2014 Annual Research Report 2013 Annual Research Report
  • [Remarks] 井田 次郎研究室 - 金沢工業大学 工学部 電気電子工学科

    • URL

      http://j-ida.kit.labos.ac/ja

    • Related Report
      2014 Annual Research Report 2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置2017

    • Inventor(s)
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Holder
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-101258
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] RADIATION-DAMAGE-COMPENSATION-CIRCUIT AND SOI-MOSFET2016

    • Inventor(s)
      倉知郁生、新井康夫、山田美帆
    • Industrial Property Rights Holder
      倉知郁生、新井康夫、山田美帆
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-10-06
    • Related Report
      2016 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] Semiconductor Device and Method for Manufacturing Semiconductor Device2016

    • Inventor(s)
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Holder
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-06-30
    • Related Report
      2016 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体装置およびその製造方法2014

    • Inventor(s)
      葛西大樹、新井康夫
    • Industrial Property Rights Holder
      葛西大樹、新井康夫
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-07-24
    • Acquisition Date
      2017-03-17
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置の製造方法2013

    • Inventor(s)
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Holder
      新井康夫、葛西大樹、沖原将生
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013
    • Acquisition Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Funded Workshop] 11th International “Hiroshima” Symposium on the Development and Application of Semiconductor Tracking Detectors (HSTD11) in conjunction with 2nd Workshop on SOI Pixel Detector (SOIPIX2017)2017

    • Related Report
      2017 Annual Research Report
  • [Funded Workshop] International Workshop on SOI Pixel Detector2015

    • Place of Presentation
      片平さくらホール( 宮城県仙台市)
    • Year and Date
      2015-06-03
    • Related Report
      2015 Annual Research Report

URL: 

Published: 2013-07-10   Modified: 2020-03-30  

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