| Project/Area Number |
01044040
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| Research Category |
Grant-in-Aid for international Scientific Research
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| Allocation Type | Single-year Grants |
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| Section | Joint Research |
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| Research Institution | University of Tokyo |
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Principal Investigator |
SUGA Tadatomo Faculty of Engineering, University of Tokyo, 工学部, 助教授 (40175401)
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| Co-Investigator(Kenkyū-buntansha) |
B Gibbesch マックスプランク金属研究所, 研究員
G Elssner マックスプランク金属研究所, 主任研究員
H Fischmeist マックスプランク金属研究所, 所長
ISIDA Youichi Institute of Industrial Science, University of Tokyo, 教授 (60013108)
MIYAZAWA Kun-ichi Faculty of Engineering, University of Tokyo, 工学部, 講師 (60182010)
FISCHMEISTER H. Max-Planck Institute fur Metallforschung
ELSSNER G. Max-Planck Institute fur Metallforschung
GIBBESCH B. Max-Planck Institute fur Metallforschung
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| Project Period (FY) |
1989
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| Project Status |
Completed (Fiscal Year 1989)
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| Budget Amount *help |
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 1989: ¥3,500,000 (Direct Cost: ¥3,500,000)
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| Keywords | Room Temperture Bonding / Ultrahigh Vacuum / Surface Activation / microstructure of Interface / Direct Bonding |
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| Research Abstract |
Bonding experiments were made both in an ultrahigh vacuum bonding apparatus of Max-Planck Institute and in a regular high vacuum apparatus of the University of Tokyo. Transmission electron microscopy showed that microstructure of the Al-Al interfaces was affected by the presence of residual gases in the bonding apparatus and that an atomic direct bonding between two solids was really achieved in a clean atomosphere by the surface activation method.
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