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Elementary Processes of Surface Photodissociation by Time-Resolved Photoelectron Spectroscopic and Laser Spectroscopic Techniques

Research Project

Project/Area Number 01430003
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 構造化学
Research InstitutionHokkaido University

Principal Investigator

KAWASAKI Masahiro  Hokkaido Univ., Res. Inst. of Appl. Elect., Professor, 応用電気研究所, 教授 (70110723)

Co-Investigator(Kenkyū-buntansha) 正源 聡  北海道大学, 応用電気研究所, 教務職員 (50216157)
MATSUMI Yutaka  Hokkaido Univ., Res, Inst, of Appl. Elect., Associate Professor, 応用電気研究所, 助教授 (30209605)
SHOGEN Satoshi  Hokkaido Univ., Res, Inst, of Appl. Elect., Technical Stuff
橋本 訓  北海道大学, 応用電気研究所, 助手 (60164787)
豊島 勇  北海道大学, 触媒研究センター, 教授 (80001709)
Project Period (FY) 1989 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥16,000,000 (Direct Cost: ¥16,000,000)
Fiscal Year 1991: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1990: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1989: ¥11,000,000 (Direct Cost: ¥11,000,000)
KeywordsOrganometallics / Semiconductor / Laser / Kinetic energy / Photofragment / Photoelectron / Monolayer / Time-of-flight / ジメチルアルミニウム / シリコン基板 / アルミ薄膜 / 真空紫外光 / 光電子分光法 / 角度分解 / 紫外光 / 表面 / GaAs / シリコン / X線光電子分光 / 紫外光電子分光 / VUVレ-ザ- / 時間分割光電子分光法 / 表面反応 / 光反応 / メチルラジカル / 並進エネルギ-分布
Research Abstract

We have studied pyrolytic and photolytic dissociation of halogen and organometallic compounds on insulators, metals, and semiconductors with laser techniques and photoelectron spectroscopic techniques.
Laser irradiation at 193 or 351 nm of a multilayer of Cl_3 of CH_3Cl on an Si wafer at 100 K leads to both photodissociation of these molecules and formation of photoetchig products. The kinetic energy distributions of photofragments (Cl, CH_3) and etching products (SiCl, SiCl_2) were measured.
Pyrolytic dissociation of trimethylgallium (TMGa) and trimethylindium (TMIn) on Si, Au, and Al substrates was studied at various temperatures from 80 to 670 K by x-ray photoelectron spectroscopy. The results indicate that TMGa and TMIn on Si (111) dissociates into Ga, In, and CH_3 on the substrateeven at 200 K and CH_3 surther dissociates into C, CH, and CH_2 at higher temperatures. Photodissociation of a monolayer of TMGa and TMIn on Si, GaAs, or Au is observed with an incident wavelength of 193 and 226 nm ; direct absorption by the absorbed molecules occurs at this wavelength. A 355 nm, photodissociation does not occur.
The photodissociation dynamics of organometallic compounds (tetramethyltin, trimethylgallium, trimethylindium and dimethylzinc) absorbed on a quatrz substrate at 100 K have been studied by time-of-flight massspectrometry, detecting mainly CH_3 photofragments.

Report

(4 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • 1989 Annual Research Report
  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] M.Kawasaki,H.Sato,N.Nishi: "Laser photodissociation of chlorine and methyl chloride on low-temperature silicone substrates." J.Appl.Phys.65. 792-798 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Ibuki,A.Hiraya,K.Shobatake,Y.Matsumi,M.Kawasaki: "He(I) photoelectron spectra and vuv absorption cross sections of Ga(CH_3)_3 and In(CH_3)_3." Chem.Phys.Lett.160. 152-156 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S.Shogen,M.Kawasaki,Y.Matsumi,I.Toyoshima,H.Okabe: "Pyrolytic and photolytic dissociation of trimethylgallium on Si,Al,and Au substrates." J.Appl.Phys.70. 462-468 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M.Kawasaki,N.Nishi: "Laser photodissociation of organometallic compounds on a cryosubstrate." Appl.Organometal.Chem.5. 247-255 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S.Shogen,Y.Matsumi,M.Kawasaki: "Photodissociation of trimethylindium on Si(111) at 193 nm." Thin Solid Films. (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H.Ouchi,K.Ishida,M.Hanabusa,S.Shogen,M.Kawasaki: "Photoinduced deposition of aluminum thin film on silicon nitride and oxide." Jpn.J.Appl.Phys.(1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 川崎 昌博,松見 豊: "最先端レ-ザ・テクノロジ-集成" (株)オプトロニクス社, 350-354 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 川崎 昌博: "化学総説" 学会出版センタ-, 30-39 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Kawasaki, H. Sato, N, Nishi: "Laser photodissociation of chlorine and methyl chloride on low-temperature silicone substrates." J. Appl. Phys. G5. 792-798 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Ibuki, A. Hiraya, K. Shobatake, Y. Matsumi, M. Kawasaki: "He (1) photoelectron spectra and vuv absorption cross sections of Ga (CH_3) _3 and In (CH_3) _3." Chem. Phys. Lett.160. 152-156 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S. Shogen, M. Kawasaki, Y. Matsumi, I. Toyoshima, H. Okabe: "Pyrolytic and photolytic dissociation of trimethylgallium on Si, Al, and Au substrates." J. Appl. Phys.70. 462-468 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Kawasaki, N, Nishi: "Laser photodissociation of organometallic compounds on a cryosubstrate." Appl. Organometal. Chem.5. 247-255 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S. Shogen, Y. Matsumi, M. Kawasaki: "Photodissociation of trimethylindium on Si (111) at 193 nm." Thin Solid Films.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Ouchi, K. Ishida, M. Hanabusa, S. Shogen, M. Kawasaki: "Photoinduced deposition of aluminum thin film on silicon nitride and oxide." Jpn. J. Appl. Phys.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Satoshi Shogen: "Pyrolytic and Photolytic Dissociation of Trimethylgallium on Si,Al and Au Substrates" J.Appl.Phys.70. 462-468 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Masahiro Kawasaki: "Laser Photodissociation of Organometallic Compounds on a Cryosubstrate" Appl.Organometal.Chem.5. 247-255 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Satoshi Shogen: "Photodissociation of Tremethylindium on Si(111) at 193 nm" Thin Solid Films.

    • Related Report
      1991 Annual Research Report
  • [Publications] Hideki Ouchi: "Photoinduced Deposition of Aluminum Thin Film on Silicon Nitride and Oxide" Jpn.J.Appl.Phys.

    • Related Report
      1991 Annual Research Report
  • [Publications] 川崎 昌博: "化学総説「表面励起プロセスの化学」" 学会出版センタ-, 182

    • Related Report
      1991 Annual Research Report
  • [Publications] Yutaka Matsumi: "Doppler Spectroscopy of Chlorine Atoms Generated from Photodissociation of Hydrogen Chloride and Methyl Chloride at 157 and 193 nm." Journal of Chemical Physics. 92. 1696-1701 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Toshio Ibuki: "Vacuum Ultraviolet Photochemistry of CHFCl_2 and CHFBr_2;Absorption Spectra and CHF(A^1A")radical Formation." Journal of Chemical Physics. 92. 4277-4282 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Yutaka Matsumi: "Fine Structure Branching Ratios and Doppler Spectroscopy of Chlorine Atoms from the Photodissociation of Alkyl Chlorides and Chlorofluoromethanes at 157 and 193 nm." Journal of Chemical Physics. 93. 7981-7986 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Satoshi Shogen: "Pyrolytic and Photolytic Dissociation of Trimethylgallium on Si,Al and Au Substrates." Journal of Applied Physics. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] Arun Chattopadhyay: "Proofs of the Inversion Mechanism for the Reaction H+CD_4→CD_3H+H." Journal of Chemical Physics. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] Yutaka Matsumi: "Fineーstructure Branching Ratios and Doppler Spectra of O( ^3Pj) produced by the reaction of H+O_2→OH+O." Journal of Chemical Physics. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 川崎 昌博,他(金原ら編集): "薄膜ハンドブック(第6章気相反応)" 共立出版, (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 川崎 昌博,他(日本化学会編集): "化学便覧(第5章気相光化学反応)" 丸善, (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] Y.Matsumi: "Doppler Spectroscope of Chlorine Atoms Generated from Photodissociation of Hydrogen Cholide and Methyl Chloride at 157 and 193 nm." Journal of Chemical Physics. 92. 1696-1701 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] T.Ibuki: "Vacuum Ultraviolet Photochemistry of CHFCL2 and CHFBr2;Absorption Spectra and CHF(A1A")redical Formation." Journal of Chemical Physics.

    • Related Report
      1989 Annual Research Report
  • [Publications] Masahiro Kawasaki: "Pyrolytic and Photolytic Dissociation of Trimethylgallium on Si and Au Substrates." Jounal of Material Research.

    • Related Report
      1989 Annual Research Report
  • [Publications] Masahiro Kawasaki: "Sutudies in Surface Science and Catalysis,47,Ed.M.Ampo and T.Matsuura,"Photochemistry on Solid Surface;Chapter 6.Laser Induced Photoreactions and Photo-CVD on Solid Surface."" Elsevier Science Publishers,New York,U.S.A., (1990)

    • Related Report
      1989 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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