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A Study on Functional Multi-Layered Ceramic Films and their Electronic States

Research Project

Project/Area Number 01430015
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 工業物理化学
Research InstitutionKyushu University

Principal Investigator

ARAI Hiromichi  Kyushu University, Graduate School of Engineering Sciences, Professor, 総合理工学研究科, 教授 (10011024)

Co-Investigator(Kenkyū-buntansha) MACHIDA Masato  Kyushu University, Graduate School of Engineering Sciences, Research Associate, 総合理工学研究科, 助手 (70211563)
OHTAKI Michitaka  Kyushu University, Graduate School of Engineering Sciences, Research Associate, 総合理工学研究科, 助手 (50223847)
EGUCHI Koichi  Kyushu University, Graduate School of Engineering Sciences, Associate Professor, 総合理工学研究科, 助教授 (00168775)
Project Period (FY) 1989 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥23,800,000 (Direct Cost: ¥23,800,000)
Fiscal Year 1991: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1990: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1989: ¥18,800,000 (Direct Cost: ¥18,800,000)
KeywordsSolid Oxide Electrolyte / Ion Plating / Sol-Gel Process / Slip Casting / Slurry Coating / Sputtering / Separating Membrane / Thin Film / セラミックス / 電極 / 発光素子 / 安定化ジルコニア / スプレ-パイロリシス / ランタンクロマイト / 光導波路 / セラミックス薄膜 / イオンプレ-ティング法 / レ-ザ素子 / プラズマスプレ-法
Research Abstract

Application of various fabrication techniques of thin films to several ceramic materials clarified the characteristics and the disadvantages of each technique ; ion plating, sputtering, plasma spraying, spray pyrolysis, slurry coating, slip casting, chemical vapor deposition, and sol-gel process. Lamination of the ceramic materials revealed several problems on fabrication of multi-layered ceramic thin films. The physical properties of the films obtained by these techniques were significantly different : density, porosity, and surface roughness ; deposition rate ; formed crystalline phases and homogeneity of the components. These properties were controlled by selecting an appropriate fabrication technique. It should be particularly noted that thin films with considerably higher quality than those from variousdry processes were successfully fabricated by the wet processes such as slurry coating and slip casting when the size and shape of the material particles, the concentrations and the … More additives of the wet mixtures, and the sintering procedures were properly chosen. Moreover, completely dense thin films of stabilized zirconia were prepared at the substantially lower sintering temperature of 1000゚C by spray pyrolysis using the solutions of the corresponding metal acetylacetonates as the starting materials. Oxide thin films of 1-2 mu m thickness were fabricated by the ion plating technique and shown to be highly resistant against oxidation or 0 reduction and were not affected even at the temperatures higher than 1000゚C. It was revealed that the high temperature treatments during the fabrication of the films or application to the high temperature technologies strongly require that the reactivity between the layered ceramics should be negligible, as well as the thermal expansion coefficient and the thermal shrinkage coefficient of the layers should be similar. Transparent SiC thin films with high electrical resistivity were prepared by the sputtering technique. The optical band gap of the films was varied by controlling the partial pressure of CH_4 in the gas phase during the sputtering. Silica thin films with highly dispersed cobalt porphine obtained by the sol-gel process exhibited the changes in their absorption spectrum specific to nitrogen monoxide. A highly sensitive fiber-type sensor for NO was fabricated by coating the film on the cross section of an optical fiber. Highly porous membranes of BA-AI mixed oxides with micropores of 10-20 nm were prepared from the corresponding metal alkoxides, and found to have large permeation coefficient of hydrogen. It was revealed that the permeation of hydrogen was accelerated by dispersing platinum metals into the membranes. Less

Report

(4 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • 1989 Annual Research Report
  • Research Products

    (58 results)

All Other

All Publications (58 results)

  • [Publications] T.Inoue,T.Setoguchi,K.Eguchi,and H.Arai: "Study of a Solid Oxide Fuel Cell with a Ceria-based Solid Electrolyte" Solid State Ionics. 35. 285-291 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 荒井 弘通,水原 由加子: "新技術と表面・界面(2)センサ-" 表面科学. 10. 877-883 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H.Arai,K.Eguchi,T.Setoguchi,H.Itoh & T.Inoue: "Thin Film Solid Oxide Fuel Cells with Zro_2-and CeO_2-Based Electrolytes" Proc.First Int.Symposium on Solid Oxide Fuel Cells. 89-11. 288-292 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M.Yoshikai,M.Machida,K.Eguchi,and H.Arai: "Gravimetric Characterization of Porous Ceramic Thin Films with Quartz Crystal Microbalance" Chemistry Letters. 1989. 1897-1900 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H.Arai: "Solid Oxide Fuel Cells with Stabilized Zirconia Thick Films Fabricated by Various Techniques" Proc.Int.Symposium on Solid Oxide Fuel Cells. 12-24 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Setoguchi,H.Itoh,M.Sawano,K.Eguch,and H.Arai: "Preparation of Porous Electrodes and Stabilized Zirconia Thick Films for Solid Oxide Fuel Cells." Proc.Int.Symoposium on Solid Oxide Fuel Cells. 177-186 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 江口 浩一,沖本 信之,荒井 弘通: "ZnS系薄膜型エレクトロルミネッセンス素子におけるド-パントの効果" 九州大学総合理工学研究科報告. 11. 287-290 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Setoguchi,T.Inoue,H.Takebe,K.Eguchi,K.Morinaga,and H.Arai: "Fabrication and Evaluation of Flat Thick Film Type Solid Oxide Fuel Cell" Solid State Ionics. 37. 217-221 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] K.Eguchi,T.Hashiguchi,K.Sumiyoshi,and H.Arai: "Optical Detection of Nitrogen Monoxide by Metal Porphine Dispersed in an Amorphous Silica Matrix" Sensors and Actuators. 19. 154-157 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Inoue,K.Eguchi,T.Setoguchi,and H.Arai: "Cathode and Anode Materials and the Reaction Kinetics for the Solid Oxids Fuel Cell" Solid State Ionics. 40/41. 407-410 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Setoguchi,N.Seki,K,Eguchi and H.Arai: "Low-Temperature Operation of Solid Electrolyte Oxygen Sensors Using Perovskite-Type Oxide Electrodes and Cathodic Reaction Kinetics" J.Electrochem.Soc.137. 2523-2527 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 荒井 弘通: "薄膜型高温固体電解質燃料電池の開発" 電池技術. 2. 187-199 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Setoguchi,K.Eguchi,and H.Arai: "Thin Film Fabrication of Stabilized Zirconia for Solid Oxide Fuel Cells." Proc.Int.Conference on Thin Film Physics and Applications. 74-79 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M.Chai,K.Sekizawa,M.Machida,K.Eguchi,and H.Arai: "Preparation of Heat Resistant Microporous Ceramic Membranes for Selective Gas Permeation." 日本セラミックス協会学術論文誌. 99. 530-532 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H.Arai,K.Eguchi,T.Setoguchi,R.Yamaguchi,K.Hashimoto,and H.Arai: "Fabrication of YSZ Thin Film on Electrode Substrate and its SOFC Characteristics" Proc.2nd Int.Symposium on Solid Oxide Fuel Cells,Athens. 167-174 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] K.Eguchi,T.Inoue,M.Ueda,J.Kamimae,and H.Arai: "The Activation and Transfer of Oxygen at Electrolyte/Cathode Interface for SOFCs" Proc.2nd Int.Symposium on Solid Oxide Fuel Cells.Athens. 697-704 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Inoue,N.Seki,J.Kamimae,K.Eguchi,and H.Arai: "The Conduction Mechanism and Defect Structure of Acceptor-and Donor-Doped SrTiO_3" Solid State Ionics. 48. 283-288 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 荒井 弘通: "酸素イオン伝導体とその応用" セラミックス. 27. 100-104 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Setoguchi,M.Sawano,K.Eguchi and H.Arai: "Application of the Stabilized Zirconia Thin Film Prepared by Spray Pyrolysis Method to SOFC" Solid State Ionics.40/41. 502-505 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 荒井 弘通,井上 高教: "エレクトロキャタリシスの展望と応用「酸化物固体電解質における電極材料とその機能」" アイピ-シ-, 25 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 荒井 弘通,井上 高教: "多孔質セラミックスの開発と応用II「多孔質とセンサ」" シ-エムシ-, 10 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Hiromichi Arai and Tetsuo Seiyama: "Sensors Vol.3,Chap.20,“Humidity Sensors"" VCH, 31 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Inoue, T. Setoguchi, K. Eguchi, and H. Arai: ""Study of a Solid Oxide Fuel Cell with a Ceria-based Solid Electrolyte"" Solid State Ionics. 35. 285-291 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai and Y. Mizuhara: ""Sensor"" Hyomen Kagaku. 10. 877-883 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai, K. Eguchi, T. Setoguchi, H. Itoh, and T. Inoue: ""Thin Film Solid Oxide Fuel Cells with ZrO_2-and CeO_2-Based Electrolytes"" Proc. First Int. Symposium on Solid Oxide Fuel Cells. 89-11. 288-292 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Yoshikai, M. Machida, K. Eguchi, and H. Arai: ""Gravimetric Characterization of Porous Ceramic Thin Films with Quartz Crystal Microbalance"" Chemistry Letters. 1989. 1897-1990 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai: ""Solid Oxide Fuel Cells with Stabilized Zirconia Thick Films Fabricated by Various Techniques"" Proc. Int. Symposium on Solid Oxide Fuel Cells. 12-24 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Setoguchi, H. Itoh, M. Sawano, K. Eguchi, and H. Arai: ""Preparation of Porous Electrodes and Stabilized Zirconia Thick Films for Solid Oxide Fuel Cells"" Proc. Int. Symposium on Solid Oxide Fuel Cells. 177-186 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] K. Eguchi, N. Okimoto, and H. Arai: ""An effect of Dopants on ZnS-based Thin Film Electroluminescence Devices"" Eng. Sci. Rep. Kyushu Univ.11(3). 287-290 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Setoguchi, T. Inoue, H. Takebe, K. Eguchi, K. Morinaga, and H. Arai: ""Fabrication and Evaluation of Flat Thick Film Type Solid Oxide Fuel Cell"" Solid State Ionics. 37. 217-221 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] K. Eguchi, T. Hashiguchi, K. Sumiyoshi, and H. Arai: ""Optical Detection of Nitrogen Monoxide by Metal Porphine Dispersed in an Amorphous Silica Matrix"" Sensors and Actuators B1. 19. 154-157 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Inoue, K. Eguchi, T. Setoguchi, and H. Arai: ""Cathode and Anode Materials and the Reaction Kinetics for the Solid Oxide Fuel Cell"" Solid State Ionics. 40/41. 407-410 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Setoguchi, M. Sawano, K. Eguchi, and H. Arai: ""Application of the Stabilized Zirconia Thin Film Prepared by Spray Pyrolysis Method to SOFC"" Solid State Ionics. 40/41. 502-505 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Inoue, N. Seki, K. Eguchi, and H. Arai: ""Low-Temperature Operation of Solid Electrolyte Oxygen Sensors Using Perovskite-Type Oxide Electrodes and Cathodic Reaction Kinetics"" J. Electrochem. Soc.137. 2523-2527 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai: ""Thin Film Solid Oxide Fuel Cell"" Denchi Gijutsu. 2. 187-199 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Setoguchi, K. Eguchi, and H. Arai: ""Thin Film Fabrication of Stabilized Zirconia for Solid Oxide Fuel Cells"" Proc. Int. Conference on Thin Film Physics and Applications. 74-79 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Chai, K. Sekizawa, M. Machida, K. Eguchi, and H. Arai: ""Preparation of Heat Resistant Microporous Ceramic Membranes for Selective Gas Permeation"" Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi. 99. 530-532 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai, K. Eguchi, T. Setoguchi, R. Yamaguchi, K. Hashimoto, and H. Yoshimura: ""Fabrication of YSZ Thin Film on Electrode Substrate and its SOFC Characteristics"" Proc. 2nd Int. Symposium on Solid Oxide Fuel Cells. 167-174 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] K. Eguchi, T. Inoue, M. Ueda, J. Kamimae, and H. Arai: ""The Activation and Tranfer of Oxygen at Electrolyte/Cathode Interface for SOFCs"" Proc. 2nd Int. Symposium on Solid Oxide Fuel Cells. 697-704 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Inoue, N. Seki, J. Kamimae, K. Eguchi, and H. Arai: ""The Conduction Mechanism and Defect Structure of Acceptor-and Donor-Doped SrTiO_3"" Solid State Ionics. 48. 283-288 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai: ""Oxygen Ion Conductor and Its Application"" Ceramics. 27. 100-104 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai and T. Inoue: ""Sankabutsu Kotai Denkaisitsu ni okeru Denkyoku Zairyou to sono Kinou"" Electrocatalysis no Tembou to Ouyou. 301-326 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] H. Arai and T. Inoue: ""Porosity and Sensors"" Takousei Ceramics no Kaihatsu to Ouyo II. 154-163 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Hiromichi Arai and Tetsuro Seiyama: ""Humidity Sensors"" Sensors. 3. chapter20 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Setoguchi,K.Eguchi,and H.Arai: "Thin Film Fabrication of Stabilized Zirconia for Solid Oxide Fuel Cells" Proceedings of Inkrnatunal Conference on Thin Film Physics and Applications. 74-79 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] M.Chai,K.Sekizawa,M.Machida,K.Eguchi,and H.Arai: "Preparation of Heat Resistant Microporous Ceramic Mem branes for Selective Gas Permeation" 日本セラミックス協会学術論文誌. 99. 530-532 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] H.Arai,K.Eguchi,T.Setoguchi,R.Yamaguchi,K.Hashimoto,H.Yoshimura: "Fabrication of YSZ Thin Film on Electrode Substrate and its SOFC Characteristics." Proceedings of 2nd.International Symposium on Solid Dxide Fuel Cells,Athens.167-174 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] K.Eguchi,T.Inoue,M.Ueda,J.Kamimae and H.Arai: "The Activation of Oxygen at Electrolyte/Cathode Interface for SOFCS" Proceedings of 2nd.Inkrnational Symposium on Solid Oxide Fuel Cells,Athens. 697-704 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] T.Inoue,N.Seki,J.Kamimae,K.Eguchi and H.Arai: "The Conduction Mechanism and Defect Structure for Acceptorーand DonorーDoped SrTiO_3" Solid State Jonics. 48. 283-288 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] K.Eguchi T.Hashiguchi K.Sumiyoshi H.Arai: "Optical Detection of Nitrogen Monoxide by Metal Porphine in an Amorphous Silica Matrix" Sensors and Actuators. B1. 154-157 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Setoguchi T.Inoue H.Takebe K.Eguchi K.Morinaga H.Arai: "Fabrication and Evaluation of Flat Thick Film Type Solid Oxide Fuel Cell" Solid State Ionics. 37. 217-221 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Setoguchi M.Sawano K.Eguchi H.Arai: "Application of the Stabilized Zirconia Thin Film Prepared by Spray Pyrolysis Method to SOFC" Solid State Ionics. 40/41. 502-505 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Inoue K.Eguchi T.Setoguchi H.Arai: "Cathode and Anode Materials and the Reaciton Kinetics for the Solid Oxide Fuel Cell" Solid State Ionics. 40/41. 407-410 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Inoue N.Seki K.Eguchi H.Arai: "LowーTemperature Operation of Solid Electrolyte Oxygen Sensors Using PerovskiteーType Oxide Electrodes and Cathodic Reaction Kinetics" J.Electrochem.Soc.137. 2523-2527 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 荒井弘通 水原由加子: "新技術と表面・界面〜センサ〜" 表面科学. 10. 877-883 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] H.Arai,K.Eguchi,T.Setoguchi,H.Itoh,T.Inoue: "Thin Film Solid Oxide Fuel Cells with ZrO_2- and CeO_2- Based Electorolytes" Proc.of the First Int.Symposium on Solid Oxide Fuel Cells. 288-292 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] M.Yoshikai,M.Machida,K.Eguchi,H.Arai: "Gravimetric Characterization of Porous Ceamic Thin Films by Quartz Microbalance" Chem.Lett.1989. 1897-1900 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 江口浩一 沖本信之 荒井弘通: "ZuS系薄膜型エレフトロルミネッセンス素子におけるド-パントの効果" 九大総理工報告. 11. 287-290 (1989)

    • Related Report
      1989 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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