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Study on Ultra-Precision Micro Diamond Cutting

Research Project

Project/Area Number 01460104
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionKobe University

Principal Investigator

MORIWAKI. T  Kobe University, Production Engineering, Professor, 工学部, 教授 (00031104)

Co-Investigator(Kenkyū-buntansha) SHAMOTO E  Kobe University, Production Engineering, Research Associate, 工学部, 助手 (20216146)
OKUDA K  Kobe City College of Technology, Associate Professor, 助教授 (50124061)
SUGIMURA N  Kobe University, Production Engineering, Associate Professor, 工学部, 助教授 (80135813)
IKAI Y  Kobe University, Production Engineering, Associate Professor, 工学部, 助教授 (40031108)
TOMITA Y  Kobe University, Mechanical Engineering, Professor, 工学部, 神授 (10031147)
Project Period (FY) 1989 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥6,300,000 (Direct Cost: ¥6,300,000)
Fiscal Year 1990: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1989: ¥4,300,000 (Direct Cost: ¥4,300,000)
KeywordsUltra-precision micro cutting / Diamond tool / Single crystal metals / Rigid-plastic FEM / Crystal orientation / Roundness of tool edge / 超精密切削 / 超微小切削 / 単結晶ダイヤモンド工具 / 2次元切削 / 切削力 / 仕上げ面あらさ / 銅単結晶
Research Abstract

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;
1. Micro Cutting of Polycrystal Copper
Orthogonal micro cutting of polycrystal copper was carried out by using a ultra-precision lathe, and normal chip formation was observed at a depth of cut down to 2.5nm. Effects of reduction of depth of cut on shear angles, specific cutting forces, and finished surfaces were clarified.
2. Micro Cutting of Single Crystal Copper
Orthogonal micro cutting of single crystal copper was carried out by using the ultra-precision lathe and a micro cutting equipment built in SEM. Effects of crystal orientation on chip formation process were clarified.
3. Rigid-Plastic FEM analysis of cutting process of single crystal copper
A new FEM model is proposed to analyze the chip formation process of single crystal copper from the initial state to steady state on the basis of both the crystal characteristics and the cutting conditions. The results of the FEM analysis, such as the shapes of chips, shear angles and specific cutting forces, are in good agreement with the experimental results.
4. Rigid-plastic FEM analysis taking into consideration of roundness of tool edge
A new FEM model is proposed to analyze the chip formation process taking into consideration of the roundness of tool edge. The results of the analysis clarifies effects of the relative roundness of tool edge on shear angles, specific cutting forces, shear region, and so on.

Report

(3 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 奥田 孝一: "Al粗大結晶のSEM内超微小切削における切りくず生成と結晶粒界段差" 1990年度精密工学会春季大会学術講演会講演論文集. 561-562 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 森脇 俊道: "刃先丸みを考慮した微小切削機構の有限要素法解析" 精密工学会1990年度関西地方定期学術講演会講演論文集. 31-32 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 森脇 俊道: "剛塑性有限要素法による超微小切削機構の解析" 日本機械学会関西支部第249回講演会. 227-228 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki: "Machinability of Copper in UltraーPrecision Micro Diamond Cutting" Annals of the CIRP. 38ー1. 115-120 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 真鍋 圭司: "剛塑性有限要素法による単結晶材料の切りくず生成過程の解析" 精密工学会誌. 56ー9. 1729-1734 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 森脇 俊道: "単結晶銅の超精密超微小2次元切削に関する研究" 日本機械学会論文集(投稿中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Nobuhiro SUGIMURA, et. al.: "Orthogonal Micro CUtting of Single Crystal Copper (in Japanese)" Proc. of Autumn Meeting of JSPE. 449-450 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Koichi OKUDA, et. al.: "Micro Cutting of Aluminum with Large Crystal grains in SEM (in Japanese)" Proc. of Spring Meeting of JSPE. 561-562 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Toshimichi MORIWAKI, et. al.: "Rigid-plastic Finite Element Analysis of Micro Cutting Process (in Japanes)" Proc. of 249th Kansai Meeting of JSME. 227-228 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki and Koichi OKUDA: "Machinability of Copper in Ultra-Precision Micro Diamond Cutting" Annals of the CIRP. 38-1,. 115-120 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Keiji MANABE, Nobuhiro SUGIMURA and Kazuaki IWATA: "Rigid-Plastic Finite Element Analysis of Chip Formation Process of Single Crystal Metals (in Japanese)" J. of JSPE. 56-9. 1729-1734 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Toshimichi MORIWAKI, et. al.: "Study on Ultra-Precision Micro Orthogonal Cutting of Single Crystal Copper (in Japanese)" Trans. of JSME C.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 奥田 孝一: "Al粗大結晶のSEM内超微小切削における切りくず生成と結晶粒界段差" 1990年度精密工学会春季大会学術講演会講演論文集. 561-562 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 森脇 俊道: "刃先丸みを考慮した微小切削機構の有限要素法解析" 精密工学会1990年度関西地方定期学術講演会講演論文集. 31-32 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 森脇 俊道: "剛塑性有限要素法による超微小切削機構の解析" 日本機械学会関西支部第249回講演会. 227-228 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 真鍋 圭司: "剛塑性有限要素法による単結晶材料の切りくず生成過程の解析" 精密工学会誌. 56ー9. 1729-1734 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 森脇 俊道: "単結晶銅の超精密超微小2次元切削に関する研究" 日本機械学会論文集.

    • Related Report
      1990 Annual Research Report
  • [Publications] Toshimichi MORIWAKI,Koichi OKUDA: "Machinability of Copper in Ultra-Precision Micro Diamond Cutting" Annals of the CIRP. 38ー1. 115-118 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] Toshimichi MORIWAKI,Shigeyuki TATEIWA,Toshiaki KAGAWA: "Development of Micro Tool Positioning System for Precision Machining" Proceedings of International Conference on Advanced Mechatronics,JSME. 147-152 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 森脇俊道、堀内明: "圧電素子を用いた超精密微小工具位置決め装置の開発" システム制御情報学会、第2回インテリジェントFAシンポジウム講演論文集. 93-96 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 森脇俊道、堀内明、西内元信、奥田孝一: "超精密ダイヤモンド切削における工具の熱変形と加工形状誤差" 1989年度精密工学会秋季大会学術講演会講演論文集. 133-134 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 森脇俊道、堀内明、西内元信、桂川仁司: "超精密ダイヤモンド切削における切削熱が加工誤差に及ぼす影響" 1990年度精密工学会春季大会学術講演会講演論文集. (1990)

    • Related Report
      1989 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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