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Non-equilibrium Surface-Modification of Metals by Laser Irradiation in Various gas Atmospheres

Research Project

Project/Area Number 01460222
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 金属材料(含表面処理・腐食防食)
Research InstitutionKyoto University

Principal Investigator

YAMAGUCHI Masaharu  Kyoto Univ., Dept. of Metal Sci. & Tech. Professor, 工学部, 教授 (90029108)

Co-Investigator(Kenkyū-buntansha) NISHITANI Shigeto  Kyoto Univ., Dept. of Metal Sci. & Tech., Instructor, 工学部, 助手 (50192688)
SHIRAI Yasuharu  Kyoto Univ., Dept. of Metal Sci. & Tech., Associate Professor, 工学部, 助教授 (20154354)
Project Period (FY) 1989 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥7,800,000 (Direct Cost: ¥7,800,000)
Fiscal Year 1990: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1989: ¥6,500,000 (Direct Cost: ¥6,500,000)
KeywordsLaser irradiation / Nitride / Oxide / Surface Modification / Film / 薄膜作成 / 窒化物膜 / 酸化物膜
Research Abstract

Pure metals (Al, Fe, Nb, Ni, Ti, W and Zr) have been irradiated in air, N_2 and Ar+NH_3 gas using a high-power pulse laser, and surface products have been identified by X-ray diffracto-metry. The results obtained for irradiation at 3x10^9 W/cm^2 can be summarized as follows.
(1) W : Even by low-angle X-ray diffractometry, neither peaks corresponding to oxides nor those corresponding to nitrides were identified.
(2) Zr and Nb : Diffraction peaks from ZrN were clearly identified for Zr irradiated in N_2 gas and in air. No oxide peak was identified in specimens irradiated in air. In low-angle X-ray diffraction spectra of Nb irradiated in both N_2 and air, small but clear peaks corresponding to Nb_2N are found.
(3) Ti and Al : Peaks from TiN were clearly identified for Ti irradiated in N_2 gas and air. A small peak of TiO_2 was also identified in for Ti irradiated in air. The presence of TiO was not clarified since the peak positions of TiO and TiN are almost overlapped. Because the peak positions of TiN are identical for the specimens irradiated in both N_2 gas and air, TiO did not seem to be produced. Formation of AIN was also identified.
(4) Fe and Ni : No peaks corresponding to any nitrides or oxides were identified in specimens irradiated in N_2 gas. On Ni irradiated in air, NiO was identified. On Al and Fe irradiated in air, neither oxide nor nitride was identified, even by low-angle X-ray diffractometry. These metals were heavily damaged by irradiation in N_2 gas and air.
(5) Nb, Zr, and Ti, which have higher boiling points than 3500 K, about the maximum surface temperature attained by the present laser irradiation, show the formation of nitrides for irradiation in both N_2 and air. On the other hand, nitride formation is not identified for the other metals, Fe, and Ni, with boiling points lower than 3500 K by X-ray diffractometry.

Report

(3 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] S.R.Nishitani: "Nitride and oxide deposition by laser irradiation" Japanese J.Applied Physics. 29. 2477-2480 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S.R.Nishitani: "Nitride and oxide deposition by laser irradiation" Japanese J.Applied Physics.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S.R.Nishitani: "Fine nitride and oxide particle formation by laser irradiation" Japanese J.Applied Physics.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 西谷 滋人: "パルスレ-ザ-照射による金属窒化物・酸化物薄膜の生成" 日本金属学会春期大会講演概要. 472 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 西谷 滋人: "レ-ザ-照射による薄膜生成相に対する雰囲気ガスの影響" 日本金属学会秋期大会講演概要. 625 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 吉村 真一: "高出力パルスレ-ザ-照射により生成した薄膜のキャラクタリゼ-ションーRBS測定ー" 日本金属学会秋期大会講演概要. 629 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. R. Nishitani: "Nitride and oxide deposition by laser irradiation" Japanese J. Applied Physics. 29. 2477-2480 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. R. Nishitani: "Nitride and oxide deposition by laser irradiation" Japanese J. Applied Physics.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. R. Nishitani: "Fine nitride and oxide particle formation by laser irradiation" Japanese J. Applied physics.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. R. Nishitani: "Thin film formation of metal nitrides and oxides by pulse laser irradiations" Collected Abstracts of the 1991 Spring Meeting of Japan Inst. Metals. 472 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. R. Nishitani: "Effects of ambient gases on thin films produced by laser irradiations" Collected Abstracts of the 1990 Fall Meeting of Japan Inst. Metals. 625 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. Yoshimura: "Characterization of thin films produced by high-powered pulse laser irradiation through RBS measurements" Collected Abstracts of the 1990 Fall Meeting of Japan Inst. Metals. 629 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S.R.Nishitani: "Nitride and oxide deposition by laser irradiation" Japanese J.Applied Physics. 29. 2477-2480 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] S.R.Nishitani: "Nitride and oxide deposition by laser irradiation" Japanese J.Applied Physics.

    • Related Report
      1990 Annual Research Report
  • [Publications] S.R.Nishitani: "Fine nitride and oxide particle formation by laser irradiation" Japanese J.Applied Physics.

    • Related Report
      1990 Annual Research Report
  • [Publications] 西谷 滋人: "パルスレ-ザ-照射による金属窒化物・酸化物薄膜の生成" 日本金属学会春期大会講演概要. 472 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 西谷 滋人: "レ-ザ-照射による薄膜生成相に対する雰囲気ガスの影響" 日本金属学会秋期大会講演概要. 625 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 吉村 真一: "高出力パルスレ-ザ-照射により生成した薄膜のキャラクタリゼ-ションーRBS測定ー" 日本金属学会秋期大会講演概要. 629 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] S.R.Nishitani,et al.: "Thin nitride and oxide films produced on Ti,Zr,Nb,Fe,Ni and Al by laser irradiation" J.Mater.Sci.

    • Related Report
      1989 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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