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Preparation of Metal Oxide Thin Films by the Surface Fixation Method

Research Project

Project/Area Number 01470083
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 工業物理化学
Research InstitutionNagasaki University

Principal Investigator

KAGAWA Shuichi  Nagasaki Univ., Faculty of Eng., Professor, 工学部, 教授 (80037746)

Co-Investigator(Kenkyū-buntansha) MORIGUCHI Isamu  Nagasaki Univ., Faculty of Eng., Research Associate, 工学部, 助手 (40210158)
TERAOKA Yasutake  Nagasaki Univ., Faculty of Eng., Associate Professor, 工学部, 助教授 (70163904)
Project Period (FY) 1989 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥5,800,000 (Direct Cost: ¥5,800,000)
Fiscal Year 1990: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1989: ¥4,500,000 (Direct Cost: ¥4,500,000)
KeywordsMetal oxides / Thin film / Coating film / Surface fixation method
Research Abstract

Thin or coating films of metal oxides were prepared by the surface fixation (SF) method which utilizes the reaction of metal alkoxides with surface hydroxyls of the substrate.
1. SiO_2-MgO system : The SiO_2-overlayer were deposited on MgO surface by the vapor-phase SF method using tetramethoxysilane. At coverages less than monolayer, Lewis acid sites, the amount and the strength of which were greater than that of silica gel, were generated possibly because of the electronic and structural interaction through the Mg-O-Si bond formed at the interface. The formation of oxide thin films at or less than monolayer was found to yield new characteristics or functions at the surface or interface.
2. SiO_2-zeolite system : The SF methods using tetramethoxysilane in the gas-phase and cyclic dimethylsiloxane oligomer in the liquid-phase produced the SiO_2-overlayer selectively on the external surface of zeolites, which resulted in the control of pore-opening size and the gas adsorbability of zeolites. The control of pore-opening size could be achieved more easily by the liquid-phase method than the vapor-phase method.
3. SnO_2-porous Vycor glass system : The formation of SnO_2 thin film on the porous glass by the liquid-phase SF method using tinpropoxide resulted in the appearance of electrical conductivity and the control of gas permeability. The electrical conductivity changed upon contact with in flammable gases, implying that the present SnO_2-porous glass system can be used as a gas sensor element.
In conclusions, the surface fixation method makes it possible to deposit thin or coating films of metal oxides stepwise in a chemically controlled manner because the method is based on the chemical reaction at the surface of the substrates, and therefore the property of not only the deposited films but also the substrates can be well controlled.

Report

(3 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • Research Products

    (7 results)

All Other

All Publications (7 results)

  • [Publications] Yasutake Teraoka: "Control of Poreーopening Size of Zeolites by Vaporーphase and Liquidーphase Deposition of Silica Overlayer" Proceeding of Internatioal Symposium on Chemistry of Microporous Crystals. 107-108 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 寺岡 靖剛: "CVD法によるマグネシア表面へのシリカ薄層の生成とその表面特性" 表面科学. 11. 489-494 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Yasutake Teraoka: "Control of Pere-opening Size of Zeolites by Vapor-phase and Liquid-phase Deposition of Silica Overlayer." Proceedings of International Symposium on Chemistry of Microporous Crystals. 107-108 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Yasutake Teraoka: "Preparation and Characterization of Silica Overlayers Deposited on Magnesia Surface by Chemical Vapor Deposition Technique." Journal of The Surface Science Society of Japan. 11-8. 489-494 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Yasutake Teraoka: "Control of Poreーopening Size of Zeolites by Vaporーphase and Liquidーphase Deposition of Silica Overlayer" Proceedings of International Symposium on Chemistry of Microporous Crystals. 107-108 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 寺岡 靖剛: "CVD法によるマグネシア表面へのシリカ薄層の生成とその表面特性" 表面科学. 11. 489-494 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 寺岡靖剛: "CVD法によるマグネシア表面へのシリカ薄層の生成とその表面特性" 表面科学.

    • Related Report
      1989 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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