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Statistical Dynamical Diffraction of X-ray from Heat-treated Si Single Crystals

Research Project

Project/Area Number 01580049
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 結晶学
Research InstitutionHokkaido University

Principal Investigator

TAKAMA Toshihiko  Hokkaido Univ., Fac. of Eng., Associate Professor, 工学部, 助教授 (40001309)

Co-Investigator(Kenkyū-buntansha) MARUKAWA Kenzaburo  Hokkaido Univ., Fac. of Eng., Professor, 工学部, 教授 (20001191)
Project Period (FY) 1989 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1990: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1989: ¥2,000,000 (Direct Cost: ¥2,000,000)
KeywordsStatistical dynamical theory / Pendellosung beats / Extinction / White X-ray / Lattice strain / Energy-dispersive diffraction / 消衰補正 / 統計的動力学回析理論 / 白色X線 / 動力学的X線回折 / 統計的動力学回折
Research Abstract

Effects of randomly distributed small defects on the dynamical diffraction phenomenon are studied by measuring the X-ray Pendellosung beats with respect to the wavelength. The intensity beats of white radiation diffracted from Czochralski silicon wafers were successively measured by a solid state detector in a range from 0.1 to 0.8 A. The small defects were introduced by heating the wafers 0.5 mm thick in argon gas for 25-246 hrs at 950^゚C.
As the heat treatment proceeded, the following changes became predominant in the Pendellosung beats : 1. The diffracted intensity increases over the whole range of wavelength. 2. The rate of increase in intensity is high in the long wave length side. 3. The spacing of the beats increases. 4. The amplitude of beats decreases. The degree of changes was dependent on the heat treatment as well as the order of reflections.
An attempt was made to interpret the results by KaTo's statistical dynamical theory of diffraction (Acta Cryst., A36(1980)770-778). The theory has been expressed in terms of the static Debye-Waller factor E, the correlation lengths of lattice phase factor tau and of amplitude of X-ray * . The observed results can be explained well by the theory, provided * is independent of the extinction distance. For example, the data for the 220 reflection from a specimen treated for 246 hrs is explained by the theory with parameters, E, tau and * of 0.906, 0.05 mum and 0.25 mum, respectively.

Report

(3 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 高間 俊彦: "微小格子欠陥を含むSi結晶の動力学回折" 北海道大学高エネルギ-超強力X線回折室年報. 6. 1-3 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Measeuements of the Stuectue Factos of Diamond" Acta Cryst.A46. 514-517 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. TAkama: "Measerenents of Xーray Pendcllo゙sunh Beats from Heatーtieated Silicon Sinefe Cruptals" Acta Cryst.A46. C412-C412 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 高間 俊彦: "白色X線ペンデルビ-ト法による水晶の精密構造解析" 日本板硝子材料工学助成会 成果報告書. 8. 142-148 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T.Takama: "Exnerimental Tests of the Statistical Dynamical Theouy of Diffiaction" Acta Crpt. A.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T.Takama: "Meaトeuements of Xーray Pendello゙seing Beats from Elastically Bent Silicon Criptals" Actd Crpt.A.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Dynamical X-ray Diffraction from Si Single Crystals Containing Micro-defect." Annual Rep. High Brilliance X-ray Lab. Hokkaido Univ. 6. 1. (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Low-Temperature Cryostat for X-ray Diffraction Study Using Perfect Crystals" Annual Rep. High Brilliance X-ray Lab. Hokkaido Univ. 6. 38 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Measurement of Structure Factors of Diamond" Acta Cryst.A46. 514 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Measurements of X-ray Pendellosung Beats from Heat-Treated Silicon Single Crystals." Acta Cryst., Suppl.A46. 142 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Precise Structure Analysis of Alpha-Quartz from the Structure Factors Measured by White X-ray Pendellosung Method" Nippon Sheet Glass Foundation For Materials Science Report. 8. 142 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Kobayashi: "Measurements of Absolute Structure Factors and Structure Analysis of Alpha-Quartz" Annual Rep. High Brilliance X-ray Lab. Hokkaido Univ.7. 17 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Experimental Study of the Statistical Dynamical Theory of Diffraction" Acta Cryst. A.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Takama: "Measurements of X-ray Pendellosung Beats from Elastically Bent Silicon Single Crystal" Acta Cryst. A.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T.Takama: "Meascerements of the Structure Factors of Diamond" Acta Cryst.A46. 514-517 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Takama: "measurements of Xーray Pendello^^¨sung Beats from Heatーtreated Silicon Single Crystals" Acta Cryst.A46. C412-C412 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 高間 俊彦: "白色X線ペンデルビ-ト法による水晶の精密構造解析" 日本板硝子材料工学助成会 成果報告書. 8. 142-148 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Takama: "Exrerimental Tests of the Statistical Dynamical Theory of Diffiaction" Acta Cryst.A.

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Takama: "mesurements of Xーray Pendello^^¨sung Beats from Elastically Bent Silicon Crystals" Acta Cryst.A.

    • Related Report
      1990 Annual Research Report
  • [Publications] 高間俊彦: "微小格子欠陥を含むSi結晶の動力学回折" 北海道大学高エネルギ-超強力X線回折室年報. 6. 1-3 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 丸川健三郎: "多重線トポグラフによる単結晶変形組織の観察II" 北海道大学高エネルギ-超強力X線回折室年報. 6. 4-7 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] Toshihiko Takama: "Measurement of the Structure Factors of Diamond" Acta Crystallography. A46. (1990)

    • Related Report
      1989 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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