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Control of Composition Ratio of Alloy Films by New Magnetron Sputtering and Application to a Joining of Metal-Seramics

Research Project

Project/Area Number 01850067
Research Category

Grant-in-Aid for Developmental Scientific Research (B).

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionToyama National College of Technology

Principal Investigator

NAKASHIMA Takayoshi  Toyama National College of Technology, Professor, 機械学科, 教授 (50023164)

Co-Investigator(Kenkyū-buntansha) NISHINO Toshitugu  Toyama National College of Technology, Lecturer, 金属工学科, 講師 (20198485)
MAE Takehiko  Toyama National College of Technology, Assistant Professor, 金属工学科, 助教授 (10042821)
MIYATANI Daisaku  Toyama National College of Technology, Assistant Professor., 物質工学科, 助教授 (20018980)
TAKEDA Fumio  Toyama National College of Technology, Professor, 電気工学科, 教授 (20042814)
川越 誠  富山高専, 機械工学科, 助教授 (10124009)
Project Period (FY) 1989 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1990: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1989: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsComposition Ratio / Alloy Films / Magnetin Sputtering / Multi-Layer Structure / Ceramic-Ceramic Joining / Wetting / Brazing / 組成制御 / スパッタ / ソレノイドコイル / 組成比 / 接合強度 / マグネットロンスパッタリング / 銅-チタン合金 / シリコンカ-バイド / アルミナ / タ-ゲット / 接触角 / 固相拡散接合
Research Abstract

We propose a new method to control a composition ratio of metal alloy film by new magnetron sputtering method. This magnetron sputtering source has two magnetic coils, one is a conventional magnetron coil behind the target (Bm) and the other is a compressing coil (Bc) to increase magnetic field parallel to the target surface. The Bm and Bc can control the special position of intense plasma on the target surface. Experiments were performed concentric circular target jointed together Cu plate (75 phi) and Ti plate (35 phi). A Cu/Ti composition ratio can be controlled by the magnetic field Bc for constant Bm.
The Cu/Ti ratio was estimated using an x-ray energy dispersive spectrometer. Ti content increases with increasing Bc because the plasma is concentrated on the Ti target. The Cu/Ti ratio is controlled from 20% to 80% by changing Bc.
We can also fabricate multi-layer structure Cu-Ti alloy films with different composition ratio by different DC magnetic fields Bc. The sputtered films showed the uniform quality around 40mm phi on the film surface.
We carried out a ceramic_-ceramic and ceramic_-metal joining using the sputtered films. The contact angle of molten Cu-Ti alloys containing Ti content up to 60 at. % on SiC was investigated by a sessile drop technique at 1373K in vacuum, and the joining of SiC to SiC and Al_2O_3 to Al_2O_3 were conducted using sputtered films of Cu_-Ti, Ti and Zr.
Ti and Zr depress the reaction of Cu with SiC by forming TiC, Ti_3SiC_2 carbides and ZrC respectively. The fracture shear testing of SiC and Al_2O_3 joints were carried out at room temperature. The joining strength of SiC and Al_2O_3 using sputtered films ofCu_-Ti, Ti and Zr are lower than that of ceramics using amorphous filler metals of Cu_-Ti.

Report

(3 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • Research Products

    (14 results)

All Other

All Publications (14 results)

  • [Publications] 武田 文雄,西野 利次,中島 孝慈,宮谷 大学,前 健彦,川越 誠: "スパッタによる拡散接合用CuーTi合金インサ-ト膜の作成" 平成2年度電気関係学会北陸支部連合大会. (1911)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 西野 利次,浦井 茂雄,奈賀 正明: "SiCの溶融度による濡れに及ぼすZrの効果" 日本金属学会1991年春季大会. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] F. Takeda, T. Nishino, T. Nakashima, D. Miyatani, T. Mae, M, Kawagoe: "Fabrication of Cu-Ti Insert Films for Diffusion Joining by Sputtering" Proceeding of 1990 Joint Conference Related Electronics of HOKURIKU Branch. (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Nishino, S. Urai, M. Naga: "Effect of Zr Addition on Wetting of SiC by Molten Cu" 1991 Spring Conference of Japan Institute of Metals. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 武田 文雄,西野 利次,中島 孝慈,宮谷 大作,前 健彦,川越 誠: "スパッタによる拡散接合用CuーTi合金インサ-ト膜の作成" 平成二年度電気関係学会北陸支部連合大会. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 西野 利次,浦井 茂雄,奈賀 正明: "SiCの溶融度による濡れに及ぼすZrの効果" 日本金属学会1991年春季大会. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 西野利次: "Cu-Ti合金と常圧焼結炭化ケイ素の反応" 高温学会誌. 15. 294-296 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] Masaki Naka: "Watting of Silicon Carbide by Copper-Titanium Alloys" Transactions of JWRI. 18. 27-32 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] M.KAWAGOE: "Effect of preexisting crazes on the dynamic viscoelasticity of poly(methyl methacrylate)" Journal of Materials Science. 25. 743-748 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] M.KAWAGOE: "Enivironmental crazing and cracking in poly(methyl mrthacrylate)under diametral compression" Journal of Matersals Science. 25. 1043-1049 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] M.KAWAGOE: "Effect of pre-soak on crazing and fatigue of poly(methyl methacrylate)in methanol" 33rd IUPAC Internal Symposium on Macro-molocules. (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] Takakazu TAKAHASHI: "Relationship between C-Axis Orientation of AIN Films and substrate conductivity in Reactive Magnetron Sputtering" Proc.Jpn.Symp.Plasma Chem.12. 71-76 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] Hideo NAKATANI: "GaSe Nuclear Particle Detectors" Nuclear Instruments and Methods in Physics Research. A283. 303-309 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] T.Mae: "Liquid metal embrittlement of aluminum by several eutectic alloys containing Zinc" Journal of Materals Science.

    • Related Report
      1989 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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