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パルス法,フロ-法およびビ-ム法によるプラズマ内反応素過程の研究

Research Project

Project/Area Number 02214104
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Research InstitutionTokyo Institute of Technology

Principal Investigator

籏野 嘉彦  東京工業大学, 理学部, 教授 (90016121)

Co-Investigator(Kenkyū-buntansha) 新坂 恭士  金沢工業大学, 工学部, 助教授 (50016135)
嶋森 洋  福井工業大学, 工学部, 助教授 (80139815)
田中 大  上智大学, 理工学部, 助教授 (20119134)
高柳 俊暢  上智大学, 理工学部, 助手 (00154914)
西村 幸雄  九州大学, 機能物質科学研究所, 教授 (50038577)
Project Period (FY) 1988 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥18,000,000 (Direct Cost: ¥18,000,000)
Fiscal Year 1990: ¥18,000,000 (Direct Cost: ¥18,000,000)
Keywordsプラズマ内反応素過程 / エネルギ-移動過程 / 電子・分子・衝突解離過程 / 電子・分子衝質励起過程 / 電子付着過程 / パルス法 / フロ-法 / ビ-ム法
Research Abstract

反応性プラズマの制御を行うためには、プラズマ内反応素過程を明らかにしその素過程の断面積または速度定数、反応生成物についての系統的な研究を行うことが不可欠である。本研究ではこの目的にもっとも適していると考えられるパルス法、フロ-法、ビ-ム法を互いに相補的に用いて、励起希ガス原子からシラン、ジシラン、ゲルマンなどの分子へのエネルギ-移動過程、電子衝突によるこれら分子の励起・解離過程、そして電子付着過程について研究を行うことを目的とした。本年度は最終年度にあるが、実施計画に基づき、昨年度に引き続いてパルス法により励起ヘリウム・アルゴン原子から上記分子へのエネルギ-移動過程の断面積絶対値を励起原子の電子的励起状態を選別して測定するとともに、フロ-法を用い、励起原子だけでなくイオン・ラジカルと上記分子との反応生成物からの発光の分光を行ってこの反応の生成物の種類・状態について明らかにした。また放射光を用いたパルス同時計数測定系を確立しシラン・ジシラン等の分子の光吸収・光イオン化断面積の絶対値の測定を行った。ビ-ム法を用いた実験については、平成元年度までに作製した電子と多原子分子との衝突における励起過程、解離的イオン化過程を明らかにするための低速電子・分子衝突実験装置を用いて上記分子の弾性散乱、電子的・振動的励起、解離、付着の各過程断面積の測定を行い、現象的にもエネルギ-的にもきわめて幅広い範囲にわたりこれらの分子についてのはじめてのデ-タの取得を行うことができた。最後にパルス法による電子付着過程の研究についてはマイクロ波空洞法ならびに平成元年度までに確立したマイクロ波空洞加熱法を用いることにより種々の分子への極低エネルギ-領域における付着速度定数の電子エネルギ-依存性を調べた。以上により本年度の研究計画はそれぞれの手法を相補的に用いることにより遅滞なく、かつ効率的に遂行された。

Report

(1 results)
  • 1990 Annual Research Report

Research Products

(31 results)

All Other

All Publications

  • [Publications] H.Yoshida: "Cross sections for deexcitation of He(2^3S,2^1S,and 2^1P)by SiH_4 and GeH_<4゚>" Chemical Physics Letters.176. 173-177 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] Y.Morishima: "Deexcitation of He(2^1P) in a collision with a hydrogen molecule." Journal of Chemical Physics.94. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Yoshida: "Deexcitation cross sections of excited argon atoms by C_2H_6 and Si_2H_6." Proceedings of the 8th symposium of PLASMA PROCESSING.(Nagoya). 313-316 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] K.Kameta: "Absolute measurements of photoabsorption and photoionization cross sections of disilane in the EUV region." Proceedings of the 8th symposium of PLASMA PROCESSING.(Nagoya). 337-340 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] K.Kameta: "Absolute measurements of photoabsorption cross sections,photoーionization cross sedtions,and photoionization quantum yields of silane in the 13ー40 eV region." J.Chem.Phys.

    • Related Report
      1990 Annual Research Report
  • [Publications] M.Ukai: "Ionizing and noーionizing decays of superexcied acetylene molecules in the extremeーUV region." J.Chem.Phys.

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Yoshida: "Deexcitation cross sections of Ar( ^3P_2, ^3P_1, ^3P_0,and ^1P_1)by CH_4,SiH_4,and GeH_4." J.Chem.Phys.

    • Related Report
      1990 Annual Research Report
  • [Publications] 西村 幸雄: "衝突素過程からみた反応性プラズマ" 電気学会誌. 110. 172-176 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Sekiya: "Laserーinduced fluorescence study of the reactions of Ar( ^3P_<2,0>)with CH_3X(X=H,Cl,Br,I),C_2H_6,SiH_4,and Si_2H_6." Chem.Phys.Lett.171. 291-296 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] M.Tsuji: "Dissociative excitation of GeH_4 by collisions with Ar and He active species." J.Chem.Phys. 93. 3133-3141 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Sekiya: "Branching fractions for CCl(X) in the dissociative energy transfer reactions od Ar( ^3P_<2,0>)with chloromethanes." Chem.Phys.Lett.175. 285-290 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Sekiya: "New emission system of SiCl_2 and its cross sections in the reactions of Ar( ^3P_<20,>)" Proceedings of the 8th symposium of PLASMA PROCESSING.(Nagoya). 309-312 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Sekiya: "New electronic emission from SiCl_2." Chem.Phys.Lett.

    • Related Report
      1990 Annual Research Report
  • [Publications] 中谷 佳次: "パルスラジオリシス・マイクロ波空洞法における電子エネルギ-可変化の試みーマイクロ波加熱法の適用ー" 福井工業大学研究紀要. 20. 235-243 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Tanaka: "Observation of the lowest triplet state in silane" J.Chem.Phys.92. 2115-2116 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Tanaka: "Elastic and vibrational differential cross sections for collisions of lowー and intermediateーenergy electrons with silane." J.Phys.B23. 577-588 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] L.Boesten: "Vibrational excitation of ethane by electron impact." J.Phys.B23. 1905-1913 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Tanaka: "Dissociative electron attachment to Ch_4,SiH_4,and GeH_4." Proceedings of the 8th symposium of PLASMA PROCESSING(Nagoya). 329-331 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Tanaka: "Electron elastic scattering and vibrational excitation of GeH_4." 43rd Gaseous Electronic Conference 1990,UrbanaーChampaign.

    • Related Report
      1990 Annual Research Report
  • [Publications] L.Boesten: "Elastic DCS for e+CH_4 collisions,1.5ー100 eV." J.Phys.B.

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Tanaka: "Crossed beam experiment for the scattering of low energy electrons from CF_4." International Conference on the Physics of Electronic and Atomic Collisions XVII (1991),Queensland Australia.(1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] A.Matsumoto: "Measurements of absolute cross section for electronーimpact ioniーzation of double charged rare gas ions:Ne^<2+>,Ar^<2+>,Kr^<2+>,and Xe^<2+>." J.Phys.Soc.Jpn.59. 902-917 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Takayanagi: "Measurement of electronーimpactーexcitation cross section and oscillator strength for Kr." Phys.Rev.A41. 5948-5952 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.A.Sakaue: "Autoionization of C^<4+>(2lnl')measured by electron spectroscopy in in collision of C^<6+> with He." J.Phys.B23. L401-L405 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Ishii: "Post collision interaction in Auger electron emission of rareーgas atom following the electron impact ionization." Phys.Rev.A43. 134-142 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] Y.Sakai: "Anomalous behavior in differential cross sections for the 2^3S excitation in helium at minute scattering angles for fast electron impact." Phys.Rev.A43. 1656-1659 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Y.Suzuki: "Measurement of cross sections and oscillator strengths for Xe by electron impact." Phys.Rev.A.

    • Related Report
      1990 Annual Research Report
  • [Publications] M.Ukai and Y.Hatano: "“Gaseous Electronics and Its Applications",eds.M.Hayashi,R.Cromption,T.Makabe,and D.Boyd." Kruwer Academic Publisher., (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] K.Shinsaka and Y.Hatano: "Nonequilibrium effects in ion and electron transport,eds J.W.Gallagher et al." Plenum Press (New York), 275-289 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] M.Ukai,H.Yoshida,Y.Morishima,H.Nakazawa K.Shinsaka,and Y.Hatano: "Nonequilibrium effects in ion and electron transport,eds.J.W.Gallagher et al" Plenum Press (New York), 417-418 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Shimamori and Y.Nakatani: "Nonequilibrium effects in ion and electron transport,eds.J.W.Gallagher et al." Plenum Press (New York)., 385-386,389-391 (1990)

    • Related Report
      1990 Annual Research Report

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Published: 1990-03-31   Modified: 2016-04-21  

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