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Effects of liquid organic compounds on health used in semiconductor manufacturing processes

Research Project

Project/Area Number 02404035
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field Hygiene
Research InstitutionKeio University

Principal Investigator

SAKURAI Haruhiko  Keio University School of Medicine Department of Preventive Medicine and Public Health, Professor, 医学部, 教授 (70051357)

Co-Investigator(Kenkyū-buntansha) SAKAI Tohru  Keio University School of Medicine Department of Preventive Medicine and Public, 医学部, 助手 (50153846)
OMAE Kazuyuki  Keio University School of Medicine Department of Preventive Medicine and Public, 医学部, 助教授 (60118924)
Project Period (FY) 1990 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥28,100,000 (Direct Cost: ¥28,100,000)
Fiscal Year 1992: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1991: ¥12,100,000 (Direct Cost: ¥12,100,000)
Fiscal Year 1990: ¥14,300,000 (Direct Cost: ¥14,300,000)
KeywordsSemiconductor / Toxicity / Animal / Liquid organic compounds / Tetraethoxysilane
Research Abstract

Because amount of consumption was the largest and information of toxicity was poor, toxicity of tetraethoxysilane [TEOS,Si(OC_2H_5)_4] on ICR male mice was firstly investigated.
TEOS intraperitoneal administration study showed that LD_<50> was around 500mg/kg, and the target organ was the kidney characterized by developing acute tubular necrosis (ATN) and tubulointerstitial nephritis (TIN).
Acute inhalation study (1000 ppm TEOS for 1, 2, 4 or 8 hours) indicated that LD_<50> (4 hours) was greater than 1000 ppm and that the kidney and nasal mucosa were the target organs. Subacute inhalation studies (200, 100, or 50 ppm TEOS for 6 hours/day, 5 day/week, for 2 or 4 weeks) indicated that no-effect level of TEOS inhalation on the kidney was 50 ppm and that on the nasal cavity was less than 50 ppm. From these results, exposure level should be strictly controlled below 10 ppm, the current recommended exposure limit, and that renal tubular function should be assessed and monitored long-term TEOS-exposed workers.
Time course study of TEOS effect on the kidney suggested that the kidney developed renal tubular injury until 12 hours after TEOS i.p., started to recover 3 days after TEOS i.p., and developed TIN by 2 weeks.

Report

(4 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • 1990 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] 酒井 徹、大前 和幸、桜井 治彦、等。: "Tetraethoxysilane(TEOS)腹腔内科与後のマウス臓器の病理組織学的検討。" 産業医学. 33. 256-257 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 大前 和幸: "半導体特殊材料の毒性評価" 慶応医学. 68. 729-735 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Omae K.: "Toxicity of silicon compounds used in semiconductor manufacturing processes." Proceeding of 15th workshop on ULSI ultra clean technology. 101-110 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Omae K,Sakurai H,et al.: "Acute renal injury by tetraethyl orthosilicate in mice:ultrastructure,histochemistry and X-ray microanalysis." J Submicrosc Cytol Pathol. 24. 257-268 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Omae K,Sakai T,Sakurai H,et al.: "Acute and subacute inhalation toxicity of silane 1,000ppm in mice." Arch Texicol. 66. 750-753 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 大前 和幸、等。: "特殊材料ガスの毒性" 安全工学(J Jap Society Safety Engineering). 31. 336-342 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Nakashima H, Sadai T, Yamazaki K, Omae K,Sakurai H: "A histopathological study of tetraethoxysilane (TEOS) intra-peritoneally administrated to ICR mice." Jap J Ind Health. 33. 256-257 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Omae K: "Evaluation of toxicity of fine chemicals used in semiconductor manufacturing industries" Keio Igaku. 68. 729-735 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Omae K: "Toxicity of silicon compounds used in semiconductor manufacturing processes" Proceedings of 15th workshop on ULSI ultra clean technology. 101-110 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Yamazaki K,Nakashima H,Eyden BP, Omae K: "Sakurai H, Acute renal injury by tetraethyl orthosilicate in mice: ultrastructure, histochemistry, and microanalysis." J Submicrosc Cytol Pathol. 24. 257-268 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Omae K,Sakai T,Sakurai H, et al: "Acute and subacute inhalation toxicity of silane 1000 ppm in mice" Arch Toxicol. 66. 750-753 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Omae K, Ishizuka C, Nakashima H, Takabayashi T: "Toxicity of specialty gases for IC manufacturing." J Jap Soc Safety Engineering. 31. 336-342 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 酒井 徹,大前 和幸,桜井 治彦,等。: "Tetraethoxyslane(TEOS)腹腔内投与後のマウス臓器の病理組織学的検討。" 産業医学. 33. 256-257 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] 大前 和幸: "半導体特殊材料の毒性評価" 慶応医学. 68. 729-735 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] Omae K.: "Toxecety of silicon compiunds used in semiconductor manufacturing pricesses." Proceeding of 15th workshop on ULSI ultra clean technology. 101-110 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] Omae k,Sakurai H,etal.: "Acute renal injury by tetraethyl orthosilicate in mice:ultrastructure,histochemistry and X-ray microanalysis." J Submicrosc Cytol Pathol. 24. 257-268 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Omae K,Sakai T,Sakurae H,etal.: "Acute and subacute inhalation toxicity of silane 1,000ppm in mice." Arch Toxecol. 66. 750-753 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 大前 和幸,等。: "特殊材料ガスの毒性" 安全工学(J Jap Society Safety Engineering). 31. 336-342 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 中島 宏,酒井 徹,山崎 一人,大前 和幸,桜井 治彦: "Tetraethoxysilane(TEOS)腹腔内投与後のマウス臓器の病理組織学的検討" 産業医学. 33. 256-257 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 大前 和幸: "半導体特殊材料の毒性評価" 慶応医学. 68. 729-735 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 大前 和幸,酒井 徹: "モノシラン、TEOSに続き半導体用ガス毒性の見直しが必要" 日経マイクロデバイス. 2. 99-103 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 中島 宏、酒井 徹、山崎 一人、大前 和幸、桜井 治彦: "Tetraetoxysilane(TEOS)腹腔内投与後のマウス臓器の病理組織学的検討" 産業医学. 33. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 中島 宏、大前 和幸、酒井 徹、桜井 治彦、山崎 一人: "テトラエトキシシラン(TEOS)の生体毒性Iーマウス腹腔内投与実験ー" 日本衛生学雑誌. 46. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 酒井 徹、大前 和幸、中島 宏、桜井 治彦、山崎 一人: "テトラエトキシシラン(TEOS)の生体毒性IIーマウス吸入曝露実験ー" 日本衛生学雑誌. 46. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 大前 和幸、酒井 徹、中島 宏、桜井 治彦、山崎 一人: "ケイ酸エステル類の毒性ーマウス腹腔内投与実験ー" 日本衛生学雑誌. 46. (1991)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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