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Study on Single-Point Machining Technology of Supersmooth Surface Using a Flying Tool

Research Project

Project/Area Number 02452106
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionUniversity of Tokyo

Principal Investigator

TANI Yasuhiro  University of Tokyo, Institute of Industrial Science, Associate Professor, 生産技術研究所, 助教授 (80143527)

Co-Investigator(Kenkyū-buntansha) IKENO Jun'ichi  University of Tokyo, Institute of Industrial Science, Research Associate, 生産技術研究所, 助手 (10184441)
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥7,500,000 (Direct Cost: ¥7,500,000)
Fiscal Year 1991: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1990: ¥5,800,000 (Direct Cost: ¥5,800,000)
KeywordsUltraprecision Turning / Flying Tool / Diamond / Magnetic Disc / Aluminum / Quadrant Photodiode / On-Machine Measurement / Form Accuracy / 単刃切削 / 圧力転写
Research Abstract

The present ultraprecision turning is based on the concept of motion copying so that the machining accuracies depend on the motion accuracies of a machine tool. The accuracies of a ultraprecision machine tool is worse than 10nm and it is very difficult to improve that in the near future. Then, a new single-point machining technology using a flying tool has been proposed in order to turn a supersmooth surface even if error motions exist on the machine tool. In the process, a discoid slider with a sapphire chip follows the prefinished surface by the action of hydrodynamic bearing. In this research project, the cutting mechanism of the technology was investigated as follows :
(1) The height of the cutting edge was kept between the peak and the vally of the surface roughness so that the surface finish was improved due to the truncation.
(2) The cutting depth varied following the vertical acceleration of workpiece surface with small delay, which has some possibility of improving the waviness.
At the same time, a new optical inspection system has been developed using two quadrant photocells in order to measure the profile of the workpiece on the machine and the posture of the slider in the process. In the system the displacement was measured applying the principle of triangulation and the inclination angle was detected applying the principle of optical lever. The Surface profile was obtained through the integration of the angle. The results had a high repeatability and a high reliability with comparison of the measured data using other optical interferometric method.

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] 榎本 俊之: "浮上工具方式による超平面切削加工技術" 日本機械学会論文集(C編). 57. 991-995 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. ENOMOTO, Y. TANI, H. SATO, T. KAMIMURA: "Single-Point Machining Technology of Supersmooth Surface Using a Flying Tool" Trans. of JSME (C). 57-535. 991-995 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 榎本 俊之: "浮上工具方式による超平面切削加工技術" 日本機械学会論文集(C編). 57. 991-995 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 榎本 俊之、谷 泰弘、佐藤 壽芳、上村 康幸: "浮上工具方式による超平面切削加工技術" 生産研究. 42ー6. 389-392 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Y.Tani,T.Enomoto,H.Sato,Y.Kamimura: "Machining Technology of Supersmooth Surface Using a Flying Tool" Proceedings of 2nd Nanotechnology Seminar. (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 榎本 俊之、谷 泰弘、佐藤 壽芳、上村 康幸: "浮上工具方式による超平面切削加工技術" 日本機械学会論文集(C編). 57ー535. (1991)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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