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Effects of Hydrogen of the Structure of Hydrogen Containing Inorganic Thin Films

Research Project

Project/Area Number 02453066
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 無機工業化学・無機材料工学
Research InstitutionKyoto University

Principal Investigator

IWASAKI Matae  Kyoto Univ., Inst. Atom. Ener., Prof., 原子エネルギー研究所, 教授 (10160102)

Co-Investigator(Kenkyū-buntansha) HOTTA Kokichi  Kyoto Univ., Inst, Atom. Ener., Tech. Official, 原子エネルギー研究所, 教務職員 (00165565)
SAKKA Tetsuo  Kyoto Univ., Inst. Atom. Ener., Instructor, 原子エネルギー研究所, 助手 (10196206)
OGATA Yukio  Kyoto Univ., Inst, Atom. Ener., Assoc. Prof., 原子エネルギー研究所, 助教授 (30152375)
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥7,900,000 (Direct Cost: ¥7,900,000)
Fiscal Year 1991: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1990: ¥7,100,000 (Direct Cost: ¥7,100,000)
Keywordsamorphous / hydrogen / thin films / hydrogenated silicon / hydrated glass / alumina / MO calculation / sputtering / NMR / 水素同位体交換 / プラズマCVD
Research Abstract

Results are summarized as follows :
l. Hydrogenated amorphous silicon (a-Si : H)
The existence of clustered hydrogen, which was introduced in a-Si : H prepared by means of PECVD, was a main cause of the light-induced deterioration on the electric conductivity. Fraction of the clustered hydrogen depended on the substrate temperature during the preparation and the heat treatment after the deposition where the former was more effective for decreasing the fraction. a-Si : H prepared by sputtering, however, indicated the different behavior from the PECVD film. Light-induced changes of electrical properties were considered to be affected by not only the states of hydrogen in a-Si : H but also the structure of the film itself.
2. Hydrated glass
Environment of water in hydrated glasses and their structure changes were investigated by means of IR, NMR, and ab initio MO calculations. Molecular water appeared in the glasses when water fraction increased. The water interacted with nonbridging oxygen a … More toms in a glass network and weakened the bonding. Furthermore, NaOH, which was produced by the exchange between hydrogen of water and alkali, was held stably in glasses and reacted with bridging oxygen resulting in the break of the network. The effects of introduction of water on ionic transport were also compared with those of alkali addition in alkali silicate glasses.
3. Alumina
Alumina thin films prepared by sputtering were in an amorphous state with the coordination numbers of 4, 5, and 6, which were determined by NMR. This amorphous state exhibited higher transformation temperature to the gamma -form than amorphous alumina prepared by conventional methods. A hydrogen isotopic exchange reaction between D2 and H20 proceeded on this amorphous film. Based on the kinetics and the estimation of the adsorptive states of molecules on the surface by MO calculations, the active site was found to be an acid-base pair consisted of three fold coordinated aluminum formed by unsaturation of the four fold coordination and the adjacent oxygen. Less

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] 内野 隆司: "Interpretation of Hydrated States of Sodium Silicate Glasses by Infrared and Raman Analysis" Journal of the American Ceramic Society. 74. 306-313 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 内野 隆司: "Ab Initio Molecular Orbital Calculations on the Electronic Structure of Sodium Silicate Glasses" Journal of Physical Chemistry. 95. 5455-5462 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 内野 隆司: "Changes in the Structure of Alkali Silicate with the Type of Network Modifier Cations:Ab Initio Molecular Orbital Study" Journal of Physical Chemistry.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 内野 隆司: "Mechanism of Hydration of a Sodium Silicate Glass in a Steam Environment: ^<29>Si NMR and ab Initio Molecular Orbital Studies" Journal of Physical Chemistry.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 内野 隆司: "A New Model of Ionic Transport for Single and Mixed Alkali Oxide Glasses Based on ab Initio Molecular Orbital Calculations" Journal of NonーCrystalline Solids.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Uchino, T. Sakka and M. Iwasaki: "Interpretation of Hydrated States of Sodium Silicate Glasses by infrared and Raman Analysis" J. Am. Ceram. Soc.74. 306-313 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Uchino, M. Iwasaki, T. Sakka and Y. Ogata: "Ab Initio Molecular Orbital Calculations on the Eletronic Structure of Sodium Silicate Glasses" J. Phys. Chem.95. 5455-5462 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Uchino, T. Sakka, Y. Ogata and M. Iwasaki: "Changes in the Structure of Alkali Silicate Glasses with the Type of Network Modifier Cations : Ab Initio Molecular Orbital Study" J. Phys. Chem.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Uchino, T. Sakka, Y. Ogata and M. Iwasaki: "Mechanism of Hydration of a Sodium Silicate Glass in a Steam Environment : ^<29>Si NMR and ab Initio Molecular Orbital Studies" J. Phys. Chem.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Uchino, T. Sakka, Y. Ogata and M. Iwasaki: "A New Model of Ionic Transport for Single and Mixed Alkali Oxide Glasses Based on ab Initio Molecular Orbital calculations" J. Non-Cryst. Solids.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 内野 隆司: "Changes in the Structure of Alkali Silicate Glasses with the Type of Network Modifier Cation:Ab Initio Molecular Orbital Study" Journal of Physical Chemistry.

    • Related Report
      1991 Annual Research Report
  • [Publications] 内野 隆司: "Mechanism of Hydration of a Sodium Silicate Glass in a Steam Environment:^<29>Si NMR and ab Initio Molecular Orbital Studies" Journal of Physical Chemistry.

    • Related Report
      1991 Annual Research Report
  • [Publications] 内野 隆司: "A New Model of Ionic Transport for Single and Mixed Alkali Oxide Glasses Based on ab Initio Molecular Orbital Calculations" Journal of NonーCrystalline Solids.

    • Related Report
      1991 Annual Research Report
  • [Publications] 内野 隆司: "Interpretation of hydrated states of sodium silicate glasses by infrared and Raman analysis." Journal of the American Ceramic Society.

    • Related Report
      1990 Annual Research Report
  • [Publications] 内野 隆司: "Ab initio molecular orbital calculations on the electronic structure of sodium silicate glasses." Journal of Physical Chemistry.

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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