| Project/Area Number |
02555005
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied materials
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| Research Institution | Osaka University |
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Principal Investigator |
UEDA Kazuyuki Department of Applied Physics, Faculty of Engineering, Osaka Univ. Associate professor., 工学部, 助教授 (60029212)
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| Co-Investigator(Kenkyū-buntansha) |
SHIMIZU Ryuichi Department of Applied Physics, Faculty of Engineering, Osaka Univ. Professor., 工学部, 教授 (40029046)
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| Project Period (FY) |
1990 – 1991
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| Project Status |
Completed (Fiscal Year 1991)
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| Budget Amount *help |
¥5,500,000 (Direct Cost: ¥5,500,000)
Fiscal Year 1991: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1990: ¥4,500,000 (Direct Cost: ¥4,500,000)
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| Keywords | Electron Stimulated Desorption / Time-of-flight / Adsorption of Hydrogen / TOF-ESD / Hydrogen Detection / Hydrogen / Hydrogen Termination / ESD / Electron stimulated desorption, / Hydrogen detection, / Dynamic observation, / Adsorption of hydrogen, / Time-of-flight, / TOF-ESD, / 水素検知 / 動的反応過程 / 電子励起イオン脱離 / ESD / ESDIAD / 水素シリコン系 / RHEED |
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| Research Abstract |
A study of interaction between hydrogen and solid surfaces becomes important problem in surface science concerning with constructions of nano-scale devices in VLSI technology. In order to passivate surface bonds for oxidation and to get a hydrogen mediated epitaxy, a surface estabilization and bond termination by atomic hydrogen adsorption are recently used. However, effective surface analyser to detect hydrogen is not commercially available. In the present, study it was a purpose to develop a new surface tool for dynamical analysis of hydrogen. Electron stimulated desorption (ESD) method using a time of flight technique makes a possible to detect hydrogen combining with conventional surface analyzers. We have succeeded to develop a time-of-flight type ESD apparatus adopting, microchannel plates which has allowed not only hydrogen detection with high sensitivity but also surface structure and surface composition analysis in the modes of LEED-AES. The detection limit of this apparatus for adsorbed hydrogen is about 0.01 monolayer.
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