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Development of Ultraprecision Intelligent Machine Tool

Research Project

Project/Area Number 02555028
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionKobe University

Principal Investigator

MORIWAKI Toshimichi  Kobe, University, Production Engineering, Professor, 工学部, 教授 (00031104)

Co-Investigator(Kenkyū-buntansha) OTA Masato  Seiko Seiki Co. Ltd., Manager of R & D division, 取締役
SHAMOTO Eiji  Kobe University, Production Engineering, Research Associate, 工学部, 助手 (20216146)
SUGIMURA Nobuhiro  Kobe University, Production Engineering, Associate Professor, 工学部, 助教授 (80135813)
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥10,200,000 (Direct Cost: ¥10,200,000)
Fiscal Year 1991: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 1990: ¥7,600,000 (Direct Cost: ¥7,600,000)
KeywordsUltraprecision machine tool / Machining errors / Error compensation / Intelligent control / Ultraprecision cutting / インテリジェントコントロ-ル / 超精密切削加工 / エキスパ-トシステム
Research Abstract

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;
1. Machining errors in ultraprecision cutting
The causes of machining errors in ultraprecision cutting were classified, . and the characteristics of the main causes such a-s the rotational errors of spindles, the thermal deformation of spindles and the thermal deformation due to the cutting heat were analyzed and clarified.
2. Development of machine elements required for intelligent control
Machine elements were developed which were required to compensate various errors based on the intelligent control scheme. They are micro tool positioning system, precision feed table with high stiffness by means of "Walking Drive" and ultraprecision spindle supported by magnetic bearings.
3. Compensation for spindle displacement by applying timd'series analysis
A new system to predict and compensate spindle errors. by applying time series analysis were developed. It was confirmed-that the machining accuracy was increased by the method and that the system performance was satisfactory.
4. Learning control to compensate machining errors due to cutting heat
A new system was developed to predict and compensate machining errors due to the cutting heat by Terning the relations between the temperature rise of tool and the machining-error. It was confirmed that the machining errors were compensated and high accuracy machining was realized.

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] T.Moriwaki: "Effect of cutting Heat on Machining Accuracy in Ultra-Precision Diamond Turning" Annals of the CIRP. 39-1. 81-84 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Moriwaki: "A Study on Machining Error in Turning due to Thermal Deformation of Tool" Mem.Grad.School Sci.& Technol.,Kobe Univ.8-A. 81-90 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Moriwaki: "Improving Machining Accuracy in Turning with Use of Tool Holder Made of Super-invar" Proceedings of International Mechanical Engineering Congress Sydney. 88-92 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Moriwaki: "Ultra-Precision Diamond Turning of Stainless Steel by Applying Ultrasonic Vibration" Annals of the CIRP. 40-1. 559-562 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Moriwaki: "Analysis of Orthogonal Micro Cutting of Copper" Proc.of CIRP Conf.on PE & MS. 427-438 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Moriwaki: "A Study on Orthogonal Micro Machining of Single Crystal Copper" Transactions of NAMRI/SME. 177-182 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Moriwaki: "Ultraprecision Ductile Cutting of Glass by Applying Ultrasonic Vibration" Annals of the CIRP. 41-1. (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] E.Shamoto: "Walking Drive -A New Precision Feed Drive-" IMACS/SICE RM^2S'92 Kobe. (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 森脇 俊道: "無酸素銅の超精密ダイヤモンド切削における切削熱と熱変形" 1990年度精密工学会秋季大会学術講演会講演論文集. 93-94 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveによる精密送り機構" 1991年度精密工学会関西地方定期学術講演会講演論文集. 37-38 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveによる精密送り機構(第2報)ーリアルタイム速度制御法ー" 1991年度精密工学会秋季大会学術講演会講演論文集. 973-974 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveによる高剛性高精密送り装置の開発" 日本機械学会第69期通常総会講演会講演論文集. (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "Effect of Cutting Heat on Machining Accuracy in Ultra-Precision Diamond Turning" Annls of the CIRP. 39-1. 81-84 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "A Study on Machining Error in Turning due to Thermal Deformation of Tool" Mem. Grad. School Sci. & Tech., Kobe Univ.8-A. 81-90 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "Improving Machining Accuracy in Turning with Use of Tool Holder Made of Super-invar" Proc. of Int. Mechanical Engineering Congress Sydney. 88-92 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "Ultra-Precision Diamond Turning of Stainless Steel by Applying Ultrasonic Vibration" Annals of the CIRP. 40-1. 559-562 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "Analysis of Orthogonal Micro Cutting of Copper" Proc. of CIRP Conf. on PE & MS. 427-438 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "A Study on Orthogonal Micro Machining of Single Crystal Copper" Transactions of NAMRI/SME. 177-182 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "Ultraprecision Ductile Cutting of Glass by Applying Ultrasonic Vibration" Annals of the CIRP. 41-1. (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] E. Shamoto: "Walking Drive -A New Precision Feed Drive-" IMACS/SICE RM^2S'92 Kobe. (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Moriwaki: "Cutting Heat and Thermal Deformation in Ultraprecision Diamond Cutting of Copper" Preprint of Spring Conf. of JSPE. 93-94 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] E. Shamoto: "Precision Feed Mechanism by Means of Walking Drive" Preprint of Conf. of JSPE, Kansai. 37-38 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] E. Shamoto: "Precision Feed Mechanism by Means of Walking Drive (2nd Report) -Realtime Velocity Control-" Preprint of Sprind Conf. of JSPE. 973-974 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] E. Shamoto: "Development of High Rigidity High Precision Feed Drive System by Applying Principle of Walking Drive" Preprint of 69th Conf. of JSME. (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Moriwaki: "Analysis of Orthogonal Micro Cutting of Copper" Proc.of CIRP Conf. on PE & MS. 427-438 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] T.Moriwaki: "A Study on Orthogonal Micro Machining of Single Crystal Copper" Transactions of NAMRI/SME. 177-182 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] T.Moriwaki: "Ultraprecision Ductile Cutting of Glass by Applying Ultrasonic Vibration" Annals of the CIRP. 41-1. (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] E.Shamoto: "Walking Drive -A New Precision Feed Drive-" IMACS/SICE RM^2S'92 Kobe. (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] 社本 英二: "Walking Driveによる精密送り機構(第2報)-リアルタイム速度制御法-" 1991年度精密工学会秋季大会学術講演会講演論文集. 973-974 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 社本 英二: "Walking Driveによる高剛性高精密送り装置の開発" 日本機械学会第69期通常総会講演会講演論文集. (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] 森脇 俊道: "無酸素銅の超精密ダイヤモンド切削における切削熱と熱変形" 1990年度精密工学会秋季大会学術講演会講演論文集. 93-94 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 森脇 俊道: "単結晶銅の超精密超微小2次元切削に関する研究" 日本機械学会論文集C編.

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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