| Project/Area Number |
02555039
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Fluid engineering
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| Research Institution | Nagoya University |
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Principal Investigator |
FUJIMOTO Tetsuo Nagoya Univ., Faculty of Eng., Prof., 工学部, 教授 (00023028)
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| Co-Investigator(Kenkyū-buntansha) |
ODA Masao Mitsubishi Electronic Corp. Material Process Equipment Dept. Mechanical Engineer, 生産技術研究所, 研究員
NIIMI Tomohide Nagoya Univ., Faculty of Eng., Associate Prof., 工学部, 助教授 (70164522)
YAMASHITA Hiroshi Nagoya Univ., Faculty of Eng., Associate Prof., 工学部, 助教授 (20023236)
FUJITA Hideomi Nagoya Univ., Faculty of Eng., Prof., 工学部, 教授 (10023136)
NAKAMURA Ikuo Nagoya Univ., Faculty of Eng., Prof., 工学部, 教授 (00023127)
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| Project Period (FY) |
1990 – 1991
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| Project Status |
Completed (Fiscal Year 1991)
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| Budget Amount *help |
¥10,600,000 (Direct Cost: ¥10,600,000)
Fiscal Year 1991: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1990: ¥9,100,000 (Direct Cost: ¥9,100,000)
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| Keywords | LIF / Iodine Molecule / Temperature Measurement / Two-dimensional Measurement / Visualized Image / High Sensitive CCD Camera / Laser Sheet / Picture Processing / 高感度ビジコンカメラ |
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| Research Abstract |
As a system for measurement of properties of flow in the CVD apparatus, a method for quantitative imaging of temperature in the rarefied gas flow has been developed. The flow field is visualized by planar laserinduced fluorescence (PLIF) of iodine molecules seeded in carrier gas. Iodine molecules have many absorption lines in visible region and radiate intense fluorescence. The fluorescence intensity is proportional to the number of molecules in the energy level excited by the laser beam. From the dependence of this number on the temperature, the local temperature can be decided from the ratio of the fluorescence intensities of two visualized images which are obtained by irradiations of laser beams with different wave length. This method allows to image the two-dimensional temperature distribution of the flow field by means of a laser sheet and a high sensitive CCD camera. This method is applied to the temperature measurement of the flow field of a supersonic free jet in which temperature varies drastically. It is found that the temperature distribution of the jet measured by P(16)/R(18)[514.720 nm] and P(26)/R(28)[514.942 mn] absorption lines in the transition of B(v'=43) X(v"=0) agrees well with the theoretical one.
This system was applied to an interacting flow field between a supersonic free jet and a Si wafer. From the result, the propriety and the effectiveness of the system are verified.
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