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Development of Low Temperature Deposition Process of Carbon Thin Film by Low Frequency 50Hz Plasma CVD.

Research Project

Project/Area Number 02555056
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionCollege of Medical Technology, Hokkaido University

Principal Investigator

SHIMOZUMA Mitsuo  College of Medical Technology, Hokkaido University, Associate Professor, 医療技術短期大学部, 助教授 (70041960)

Co-Investigator(Kenkyū-buntansha) DATE Hiroaki  College of Medical Technology, Hokkaido University, Research associate, 医療技術短期大学部, 助手 (10197600)
OHNO Hideo  Faculty of Engineering, Hokkaido University, Associate Professor, 工学部, 助教授 (00152215)
TAGASHIRA Hiroaki  Faculty of Engineering, Hokkaido University, Professor, 工学部, 教授 (10001174)
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1991: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1990: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsPlasma CVD / Amorphous carbon / Low frequency plasma / Low temperature process / Chemical vapor deposition / Diamond thin film / H_2+CH_4 mixture / Passivation film / 13.56MHzRFプラズマCVD法 / プラズマ解離 / SiH_4+N_2混合ガス / アモルファスカ-ボン薄膜
Research Abstract

Hydrogenated amorphous carbon (a-C : H) films show large thermal conductivity, chemical inertness, high electrical resistivity and breakdown field, and optical transparency, all of which are suitable for the coating material in microelectronics as well as in mechanical applications. A number of reports have been published on the preparation of a-C : H films by various methods. The low-temperature formation of such an a-C : H film is required for microelectronics application. The purpose of the present study is to deposited of amorphous carbon films on unheated substrate using low frequency 50Hz plasma CVD with hydrogen and methane (H_2+CH_4) mixtures. The results obtained may be summarized as below.
1) Major electrical and optical properties of the present a-C : H films were measured. The films were highly transparent and showed very uniform interference color. The refractive index, resistivity, breakdown field strength and the optical band gap of the obtained a-C : H film were 2.4, 10^ … More <14> OMEGA cm, 10^6 V/cm and 4.0 eV, respectively. The deposition rate of a-C : H films under the condition specified above was 60 A/h.
2) Infrared absorption as well as Raman spectroscopy showed that the film predominantly consisted of sp^3-bonded C.
3) The electron temperature for H_2+CH_4 plasma at 50Hz to 13.56MHz plasma power frequency range was measured from the two-line radiance ratio method using the Balmer lines (Halpha, Hbeta). The electron temperature slowly decreased with increased plasma frequency below 200 kHz, but rapidly decreased between 200 kHz and 13.56MHz. The electron temperature was 16000 K at 1kHz and 8200 K at 13.56 MHz. Accordingly, it was deduced that the electron temperature of low-frequency plasmas is larger than that in high-frequency plasmas.
4) From these results, it appears that dissociation of H_2+CH_4 gas is accelerated by high temperature electrons in 50Hz plasma. Moreover, the positive ion in 50Hz plasmas bombard on the deposited film, and the bombarding ion energy is spent as migration energy for rearrangement of deposited atoms. Therefore, the deposited a-C : H films by the 50Hz plasma CVD have the high-quality properties without substrate heating. Less

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] M.Shimozuma,G.Tochitani and H.Tagashira: "Optical emission diagnostics of H_2+CH_4 50Hz-13.56MHz plasmas for chemical vapor deposition" Journal of Applied Physics. Vol.70. 645-648 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 下妻 光夫,村上 仁,栃谷 元,辻 崇,田頭 博昭: "低周波二層プラズマCVD法によるシリコン窒化膜の高速堆積" 真空. Vol.34. 427-431 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M.Ishikawa,M.Shimozuma,G.Tochitani and H.Tagashira: "Silivon Oxide Film Deposition on Unheated Substrate Using 50Hz plasma CVD" Contributed Papers of 20th International Conference on Phenomena in Ionized Gases,Pisa,Italy. Vol.1. 327-328 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 下妻 光夫,石川 基博,栃谷 元,田頭 博昭: "低周波50HzプラズマCVD法による非加熱基板上へのシリコン酸化膜生成" 電気学会論文誌A. Vol.111A. 1064-1070 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M.Ishikawa,G.Tochitani,M.Shimozuma and H.Tagashira: "ESTIMATION OF SILICON OXIDE FILMS DEPOSITED ON INSULATOR WITHOUT HEATING USING 52Hz PLASMA CVD" Proceedings of the 9th Symposium on Plasma Processing. Vol.9. 111-114 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] G.Tochitani,M.Shimozuma and H.Tagashira: "ESTIMATION OF SILICON OXIDE FILMS DEPOSITED BY 50Hz PLASMA CVD USING TEOS" Proceedings of the 9th Symposium on Plasma Processing. Vol.9. 115-118 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Shimozuma, H. Tagashira: "Diagnostics of Plasma in H_2+CH_4 Mixture by Space and Time Resolved Optical Emission Spectroscopy" Annual Reports of The College of Medical Technology, Hokkaido University. 3. 53-60 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] G. Tochitani, M. Shimozuma and H. Tagashira: "Relationship between power frequenct and properties of silicon oxide film deposited from teos by plasm CVD" Proceedings of the 8th Symposium on Plasma Processing. 8. 281-284 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Shimozuma, G. Tochitani and H. Tagashira: "Space and time resolution of optical emission from H_2+CH_4 plasma at various plasma power frequency" Proceedings of the 8th Symposium on Plasma Processing. 8. 361-364 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Ishikawa, M. Shimozuma, G. Tochitani and H. Tagashira: "Silicon oxide films deposition on unheated substrate using 50Hz plasma CVD" Contributed Paper of 20th INternational Conference on Phenomena in Ionized Gases. 1. 327-328 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Shimozuma, J. Murakami, G. Tochitani, T. Tsuji and H. Tagashira: "Improvement of Silicon Nitride Film Deposition Rate by Low Frequency Double Plasma CVD Method" Shinkuu. 34. 427-431 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Shimozuma, G. Tochitani and H. Tagashira: "Optical emission diagnostics of H_2+CH_4 50Hz-13.56MHz plasmas for chemical vapor deposition" Journal of Applied Physics. 70. 645-648 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Shimozuma, M. Ishikawa, G. Tochitani and H. Tagashira: "Deposition of Silicon Oxide Film on Unheated Substrate Using Low Frequency 50Hz Plasma CVD Method" Transaction of The Institute of Electrical Engineers of Japan. 111-A. 1064-1070 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Ishikawa, G. Tochitani, M. Shimozuma and H. Tagashira: "Estimation of silicon oxide films deposited on insulator without heating using 50Hz plasma CVD" Proceedings of the 9th Symposium on Plasma Processing. 9. 111-114 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] G. Tochitni, M. Shimozuma and H. Tagashira: "Estimation of silicon oxide films deposited by 50Hz plasma CVD using teos" Symposium on Plasma Processing. 9. 115-118 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Shimozuma, G. Tochitani, H. Ohno, J. Nakahara and H. Tagashira: "Hydrogenated amorphous carbon films deposited by low-frequency plasma chemical vapor deposition at room temperature" Journal of Applied Physics. 66. 447-449 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M. Shimozuma, G. Tochitani, H. Ohno and H. Tagashira: "Amorphous carbon film deposition on room temperature substrate using low frequency plasma CVD" Prodeedings of 9th International Symposium on Plasma Chemstry. 3. 1462-1467 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] M.Shimozuma,G.Tochitani and H.Tagashira: "Optical emission diagnostics of H_2+CH_4 50Hz-13.56MHz plasmas for chemical vapor deposition" Journal of Applied Physics. Vol.70. 645-648 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 下妻 光夫,村上 仁,栃谷 元,辻 崇,田頭 博昭: "低周波二層プラズマCVD法によるシリコン窒化膜の高速堆積" 真空. Vol.34. 427-431 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] M.Ishikawa,M.Shimozuma,G.Tochitani and H.Tagashira: "Silivon Oxide Film Deposition on Unheated Substrate Using 50Hz Plasma CVD" Contributed Papers of 20th International Conference on Phenomena in Ionized Gases,Pisa,Italy. Vol.1. 327-328 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 下妻 光夫,石川 基博,栃谷 元,田頭 博昭: "低周波50HzプラズマCVD法による非加熱基板上へのシリコン酸化膜生成" 電気学会論文誌A. Vol.111A. 1064-1070 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] M.Ishikawa,G.Tochitani,M.Shimozuma and H.Tagashira: "ESTIMATION OF SILICON OXIDE FILMS DEPOSITED ON INSULATOR WITHOUT HEATING USING 50Hz PLASMA CVD" Proceedings of the 9th Symposium on Plasma Processing. Vol.9. 111-114 (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] G.Tochitani,M.Shimozuma and H.Tagashira: "ESTIMATION OF SILICON OXIDE FILMS DEPOSITED BY 50Hz PLASMA CVD USING TEOS" Proceedings of the 9th Symposium on Plasma Processing. Vol.9. 115-118 (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] 下妻 光夫: "H_2+CH_4混合ガスプラズマ発光の位置・時間分布" 北海道大学医療技術短期大学部紀要. 3. 53-60 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] G.Tochtani: "RELATIONSHIP BETWEEN POWER FREQUENCY AND PROPERTIES OF SILICON OXIDE FILM DEPOSITIED FROM TEOS BY PLASMA CVD" Proceedings of the 8th Symposium on Plasma Processig. 8. 281-284 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] M.Shimozuma: "SPACE AND TIME RESOLUTION OF OPTICAL EMISSION FROM H_2+CH_4 PLASMA AT VARIOUS PLASMA POWER FREQUENCY" Proceedings of the 8th Symposium on Plasma Processing. 8. 361-364 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] F.Ishizuka: "Measurement of the effective ionization coefficient in Ar and C_3F_8 mixtures" The Transactions of The Institute of Electrical Engineers of Japan. 111ーA. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] M.Shimozuma: "Diagnostics of H_2+CH_4 plasma for chemical vapor deposition by optical spectroscopy" Journal of Applied Physics. 67. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 下妻 光夫: "低周波二層プラズマCVD法によるシリコン窒化膜の高速堆積" 真空. 34. (1991)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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