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Development of Directional Point-Focus-Beam Acoustic Microscope System

Research Project

Project/Area Number 02555083
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 計測・制御工学
Research InstitutionTohoku University

Principal Investigator

CHUBACHI Noriyoshi  Tohoku Univ., Faculty of Engr., Professor, 工学部, 教授 (20006224)

Co-Investigator(Kenkyū-buntansha) SHINOZAKI Yukihiro  Chuo Precision Ind.Co., Business Dept., Manager, 営業部, 課長
SUGANUMA Ryosuke  Honda Electron.Co., Industrial Div., Manager, 産業機器事業部, 課長
SANNOMIYA Toshio  Tohoku Univ., Faculty of Engr., Research Staff, 工学部, 教務職員 (40222418)
KUSHIBIKI Junichi  Tohoku Univ., Faculty of Engr., Associate Prof., 工学部, 助教授 (50108578)
Project Period (FY) 1990 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥16,400,000 (Direct Cost: ¥16,400,000)
Fiscal Year 1992: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1991: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1990: ¥12,000,000 (Direct Cost: ¥12,000,000)
KeywordsDirectional acoustic microscope / Imaging / Quantitative measurements / Directional PFB acoustic probe / Polycrystalline Mn-Zn ferrite / LSAW velocity / Anisotropy / V(z) curve analysis / 漏洩弾性表面波速度 / V(x,z)モード / 方向性PFBプロ-ブ / 高分解能方向性画像 / 異方性材料 / 漏洩弾性波 / 弾性的異方性測定 / 振幅・位相の同時測定 / 多結晶材料
Research Abstract

A practical system of directional point-focus-beam(PFB) acoustic microscope with two functions of imaging and quantitative measurements has been developed as a new research tool to characterize anisotropic materials on a microscopic scale in the VHF and UHF ranges. Directional PFB acoustic probes in the frequency range of 200-400 MHz have been developed by introducing directionality into a PFB acoustic probe, limiting excitation of leaky surface acoustic waves(LSAWs) within a narrow angle with a rectangular transducer instead of a circular transducer.
It has been revealed that it is essential to take into consideration the effect of beam steering of LSAWs due to the elastic anisotropy on the transducer output of the acoustic probe in order to realize a directional PFB acoustic microscope, and to limit the region of defocusing distance near the focal point for the V(z) curve analysis.
It is necessary to chose arbitrarily an imaging area and an LSAW propagation direction, for characterizing the elastic properties of anisotropic materials on a microscopic area in imaging and quantitative measurements. The mechanical and electrical systems have been developed, and the experimental procedures in measurements have been established.
The system has been demonstrated for investigation of a polycrystalline sample of Mn-Zn ferrite with an average grain size of 100mum. Directional acoustic images were obtained at 225 and 375 MHz for several different propagation directions of LSAWs. Anisotropy measurements of LSAW velocity in some grains of the sample have been performed through V(z) curve analysis. Anisotropic elastic properties of each grain have been characterized both in imaging and quantitative measurements.

Report

(4 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • 1990 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] N.CHUBACHI: "Acoustic Images Observed by Directional PFB Microscope" Acoustical Imaging. 18. 255-260 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.CHUBACHI: "Acoustic Microscope for Measuring Acoustic Properties by Micro Defocusing Method" Acoustical Imaging. 19. 685-689 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] T.SANNOMIYA: "Directional Point-Focus-Beam Acoustic Microscope System" IEEE Ultrasonics Symp.Proc.IN PRESS (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] H.KANAI: "Microdefocusing method for measuring acoustic properties using acoustic microscope" IEEE Trans.on UFFC. 39-5. 643-652 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Chubachi: "Acoustic images observed by directional PFB microscope" Acoustical Imaging. Vol.18. 255-260 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Chubachi: "Acoustic microscope for measuring acoustic properties by micro defocusing method" Acoustical Imaging. Vol.19. 685-689 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] T.Sannomiya: "Directional point-focus-beam acoustic microscope system" IEEE Ultrason. Symp.Proc.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] H.Kanai: "Micro defocusing method for measuring acoustic properties using acoustic microscope" IEEE Trans.on UFFC. Vol.39, No.5. 643-652 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Chubachi: "Acoustic Microscope for Measuring Acoustic Properties by Micro Defocusing Method" Acoustical Imaging. 19. 685-689 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] T.Sannomiya: "Directional Point-Focus-Beam Acoustic Microscope System" IEEE Ultrasonics Symp.Proc.(1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] H.Kanai: "Microdefocusing method for measuring acou-stic properties using acoustic microscope" IEEE Trans. on UFFC. 39-5. 643-652 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] N.Chubachi: "Acoustic Images Observed by Directional PFB Microscpe" Acoustical Imaging. 18. 255-260 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] N.Chubachi: "Acoustic Miccroscope for Measuring Acoustic Properties by Micro Defocusing Method" Acoustical Imaging. 19. (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] 若原 敏弘: "方向性超音波顕微鏡によるチタンの音響特性の測定" 電気関係学会東北支部連合大会講演論文集. 18 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 中鉢 憲賢: "微小領域の計測を目指した方向性超音波顕微鏡" 電子情報通信学会技術研究会資料. US90ー48. 13-20 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] N.Chubachi: "Acoustic Images Observed by Directional PFB Microscope" Acoustical Imaging. 18. (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 若原 敏弘: "微小なデフォ-カス方式による漏洩弾性表面波伝搬特性の測定方法" 応用物理学会東北支部学術講演会予稿集. 45. 23-24 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 若原 敏弘: "微小なデフォ-カス方式による漏洩弾性表面波伝搬特性の測定方法" 日本音響学会春季講演論文集. 693-694 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] N.Chubachi: "Acoustic Microscope for Measuring Acoustic Properties by Micro Defocusing Method" Acoustical Imaging. 19. (1991)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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