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Development of Ultra-High-Precision Triple-Crystal X-Ray Topografic Camera

Research Project

Project/Area Number 02558012
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 結晶学
Research InstitutionThe University of Tokyo

Principal Investigator

ISHIKAWA Tetsuya  The University of Tokyo, Faculty of Engineering, Associate Professor, 工学部, 助教授 (80159699)

Co-Investigator(Kenkyū-buntansha) HIRANO Keiichi  The University of Tokyo, Faculty of Engineering, Research Associate, 工学部, 助手 (40218798)
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥17,900,000 (Direct Cost: ¥17,900,000)
Fiscal Year 1991: ¥6,500,000 (Direct Cost: ¥6,500,000)
Fiscal Year 1990: ¥11,400,000 (Direct Cost: ¥11,400,000)
KeywordsUltra-HIgh-Precision Triple-Crystal X-Ray Topographic Camera / Triple-Crystal X-Ray Topography / Dual-Coasxial Presision X-Ray Goniometer / Layered Synthetic Microstructures / Asymmetric Analyzer Crystal / Dynamical X-Ray Diffraction / Kinematical Image / 超精密三結晶トポグラフィック・カメラ / 三結晶調整機構 / 三結晶コリメ-タ / 非対称アナライザ結晶 / 精密ディフラクトメ-タ / X線二結晶配置 / 精密X線回折実験
Research Abstract

An ultra-high-precision triple-mystal X-ray topographic camera, which can be used 'for almost every conceivable triple-crystal arrangement, was developed. Adjustment of this equipment is so easy that reseachers other than X-ray optist can manipulate.
A dual-coaxial precision x-ray goniometer was designed and constructed, as beeing the main component of the topographic camera. The distance between the sample and the analyzer crystals was greatly reduced by the coaxial-scheme, leading to the higher spatial resolution of the resulting topographs. Double crystal scheme at the collimator system made it possible to setup V. . arious x-ray optical arrangement only by small translation of the coaxial-goniometer. Newly designed personal-computdr based control system was also developed. C-langauge was used for 1/0 driver routines, whereas the flow control routines were written in FORTRAN. Many softwares for precision x-ray optical experiments were newly developed, including fme adjustment, peak-search etc.
The triple-crystal topography was applied to the charderization of layered synthetic microstructures. High spatial resolution was obtained with the asymmetric analyzer crystal in magnifying mode. Concerning to the image formation mechanism, a possibility of kinematical-diffraction imaging was pointed out by masking the dynamical diffraction with the analyzer crystal.

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] S.Kawado,S.Kojima,I.maekawa and T.Ishikawa: "Influence of Crystal lmpesfection on High-Resolution diffraction profiles of silicon single Crystals Measured by Highly Collimated X-Ray Beams" Appl.Phys.Lett.58. 2246-2248 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Ishikawa,K.Hirano and S.Kikuta: "Applications of the Perfect Crystal X-Ray Optics" Nucl.Instrum.Methods. A308. 356-362 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S.Kawado,S.Kojima,I.Maekawa and T.Ishikawa: "Growth Striations in MCZ Silicon Observed by Synchrotron X-Ray Diffraction Topography" Proc.Symposium on Advanced Science and Technology of silicon Materials. 195-200 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Kitano,T.Ishikawa,J.Mizuki and J.Matsui: "Contrast Formation Mechanism in X-Ray Topography under the condition of simultaneous Specular and Bragg Reflections" Phil.Mag.Lett.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S.Kimura,T.Ishikawa,J.Mizuki and J.Matsui: "Analysis of Minute Strain Fields around A-Swirl Defects in a FZ Silicon Crystal by Means of Plane Wave X-Ray Topogrphy Using Extremely Collimated X-Rays" J.Cryst.Growth. 116. 22-26 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T.Ishikawa and K.Kohra: "Chapter3.Perfect Crystal Methods,pp63-104 in:Handbook on Synchrotron Radiation,Vol.3" North-Holland(Amsterdam), 42 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Ishikawa: "Synchrotron X-Ray Topographic Studies on Minute Strain Fields in As-Grown Silicon Single Crystal" J. Cryst. Growth.103. 131-140 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S. Kawado, S. Kojima, I. Maekawa and T. Ishikawa: "Influence of Crystal Imperfection on High-Resolution Diffraction Profiles of Silicon Single Crystal Measured by Highly Collimated Beams" Appl. Phys. Lett.58. 2246-2248 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Ishikawa, K. Hirano and S. Kikuta: "Applications of Perfect Crystal X-Ray Optics" Nucl. Instrum. Methods. A308. 356-362 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S. Kawado, S. Kojima, I. Maekawa and T. ishikawa: "Growth Striations in MCZ Silicon Observed by Synchrotron X-Ray Diffraction Topography" Proc. Symp. on Advanced Science and Technology of Silicon Materials. 195-200 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S. Kimura, T. Ishikawa, J. Mizuki and J. Matsui: "Analysis of Minute Strain Fields around A-Swirl Defects in a FZ Silicon Crystal by Means of Plane Wave X-Ray Topography Using Extremely Collimated X-rays" J. Cryst. Growth. 116. 22-26 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Kitano, T. Ishikawa, J. Mizuki and J. Matsui: "Contrast Formation Mechanism in X-Ray Topography under the Condition of Simultaneous Specular and Bragg Reflections" Phillos. Mag. Lett.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] S.Kawado,S.Kojima,I.Maekawa and T.Ishikawa: "Influence of Crystal Imperfection on High-Resolution Diflraction Profiles of Silicon Single Crystals Measured by Highly Collimated X-Ray Beams" Appl.Phys.Lett.58. 2246-2248 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] T.Ishikawa,K.Hirano and S.Kikuta: "Applications of the Perfect Crystal X-Ray Optics" Nud.Instrum.Methods. A308. 356-362 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] S.Kawado,S.Kojima,I.Maekawa and T.Ishikawa: "Growth Striations in MCZ Silicon Obserued by Synchrotron X-Ray Dittraction Topography" Proc.Symposium on Aduanced Science and Technology of Silicon Materials. 195-200 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] T.Kitano,T.Ishikawa,J.Mizuki and J.Matsui: "Contrast Formation Mechanism in X-Ray Topography under the Condition of Simultaneous Spowlar and Bragg Reflections" Phil.Mag.Lett.

    • Related Report
      1991 Annual Research Report
  • [Publications] S.Kimura,T.Ishikawa,J.Mizuki and J.Matsui: "Analysis of Minute Strain Fields around A-Swirl Defects in a FZ Silicon Crystal by Means of Plane Wave X-Ray Topography Using Extremely Collimated X-Rays" J.Cryst.Growth.116. 22-26 (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] T.Ishikawa and K.Kohra: "Chupter 3.Pertect Crystal Methods,pp63-104 in:Handbook on Synchrofron Radiation,Vol.3" North-Holland(Amsterdam), 42 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] K.Tohji,Y.Udagawa,T.Matsushita,M.Nomura and T.Ishikawa: "Anisotropic Effects in XーRay Raman Scattering from Graphite" J.Chem.Phys.92. 3233-3235 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Ishikawa: "Synchrotron XーRay Topographic Studies on Minute Strain Fields in AsーGrown Silicon Single Crystals" J.Cryst.Growth. 103. 131-140 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Kitano,T.Ishikawa and J.Matsui: "Lattice Spacing Measurement around Dislocations in an Undoped GaAs Crystal Grown by LiquidーEncapsulated Czochralski Method" Phil.Mag.A. 63. 95-109 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] K.Hirano,K.Izumi,T.Ishikawa,S.Annaka and S.Kikuta: "An XーRay Phase Plate Using BraggーCase Diffraction" Jpn.J.Appl.Phys.30. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] T.Ishikawa,K.Hirano and S.Kikuta: "Applications of the Perfect Crystal XーRay Optics" Nutl.Instrum.Method,A.

    • Related Report
      1990 Annual Research Report
  • [Publications] S.Kawado,S.Kojima,I.Maekawa and T.Ishikawa: "Influence of Crystal Imperfection on High Resolution Diffraction Profiles of Silicon Single Crystals Measured by Highly Collimated XーRay Beams" Appl.Phys.Lett.

    • Related Report
      1990 Annual Research Report
  • [Publications] 冨増 多喜夫: "シンクロトロン放射技術" 工業調査会, 541 (1990)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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