| Project/Area Number |
02650026
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
物理計測・光学
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| Research Institution | Tokyo University of Agriculture and Technology |
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Principal Investigator |
UMEDA Norihiro Tokyo Univ. of Agri & Tech., Faculty of Tech., Associate Professor, 工学部, 助教授 (60111803)
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| Project Period (FY) |
1990 – 1991
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| Project Status |
Completed (Fiscal Year 1991)
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| Budget Amount *help |
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1991: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1990: ¥1,500,000 (Direct Cost: ¥1,500,000)
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| Keywords | Photothermal vibration / Optical deflection method / Atomic force microscope / scanning force microscope / micro-cantilever |
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| Research Abstract |
In this research, a new atomic force microscope based on a photothermal vibration of force sensing cantilever was developed. A surface profile of sample is obtained by scanning the fine needle tip over the sample so as to maintain a force derivative applied to the tip. The force derivative is detected by the use of loCK-in amplifier of which reference frequency is that of photothermal vibration of the cantilever. In the term of research project, we have obtained the results as follow.
1) The cantilever was fabricated by a laser assisted etching.
2) The atomic force microscope (AFM) system was constructed. The tripod scanner composed of stacking PZTs is used as a fine positioner, and the motorized micrometer is also used as a coarse positioner. The vibration of the cantilever caused by a amplitude modulated laser diode was detected by the optical deflection method with He-Ne laser. The system was mounted on the vibration isolation table. The feedback circuit including the interface of personal computer was constructed.
3) In order to estimate the lateral and vertical resolution of the AFM, the samples of known structure around the size of submicrometer was observed by the AFM. As a result the lateral and vertical resolution of the AFM was 2 and 50 nm, respectively.
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