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Waveness Profilometer of Large Optical Parts Insensitive to the Waveness and Roughness of Reference Mirror

Research Project

Project/Area Number 02650028
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 物理計測・光学
Research InstitutionKANAZAWA University

Principal Investigator

ADACHI Masaaki  KANAZAWA Univ. Asst. Prof. (FACULTY OF TECHNOLOGY), 工学部, 講師 (50212519)

Co-Investigator(Kenkyū-buntansha) TAKEUCHI Nozomu  KANAZAWA Univ. Prof. (FACULTY OF TECHNOLOGY), 工学部, 教授 (20035588)
Project Period (FY) 1990 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1992: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1991: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1990: ¥700,000 (Direct Cost: ¥700,000)
KeywordsInterferometer / Profilometer / Digital signal processing / Supersmooth-surface / 光反射率 / 移動テーブル / 振動 / 位置制御 / 移動テ-ブル / 光干渉 / 形状計測 / うねり形状
Research Abstract

A profiling instrument is developed for large supersmooth surfaces, which has a height sensitivity of 0.1 nm under vibrational environments of approximately 0.4-gal root mean square. In taking a profile, a measurement point is scanned on a surface at a constant rate. An interferometric system continues to measure a differential height between the aimed point and its surroundings. The same part in a reference mirror is used during the measurement, then the roughness of the mirror does not affect the measured data. The differential height has the attenuated intensities for high spatial-frequency components. However, a digital signal processing can retrieve the original intensities of the components except one characteristic parameter, the radius of curvature of the surface. This radius can be evaluated from the data which have been measured by this instrument for another large smooth surface having a known absolute profile.

Report

(4 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • 1990 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] 安達 正明・他: "上下振動の影響を受けない高精度粗さ測定法-オプティカル・スキッド法の提案-" 精密工学会誌. 56. 140-145 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 安達 正明・他: "オプティカルスキッド法における反射率の変動が与える測定誤差の補正法" 精密工学会誌. 56. 757-760 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 安達 正明・他: "上下振動の影響を受けない高精度粗さ測定法-完全な平面を必要としない断面形状の測定法-" 精密工学会誌. 56. 1088-1093 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 安達 正明・他: "遂次3点法の連続形状計測への拡張" 計測自動制御学会論文集. 26. 989-994 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M.ADACHI et al.: "Supersmooth-Surface Profilometer using Optical Skid" Int.J.Japan Soc.Prec.Eng.,. 26. 213-218 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M.ADACHI,: "Precision Profiling Method Insensitive to Vertical Vibration (1st Report)" J. Japan Soc. Prec. Eng.Vol.56, No.1. 140-146 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M.ADACHI,: "Correction Method for Measurement Error due to Reflectivity Variation in Optical Skid Profilometry," Japan Soc. Prec. Eng.Vol.56, No.4. 757-760 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M.ADACHI,: "Precision Profiling Method Insensitive to Vertical Vibration (2nd Report)" J. Japan Soc. Prec. Eng.Vol.56, No.6. 1088-1093 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M.ADACHI,: "Expantion of Serial Multi-Point Method for Continuous Profile Measurement" Trans. Soc. Instr. Contr. Eng.Vol.26, No.9. 989-994 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M.ADACHI,: "Supersmooth-Surface Profilometer using Optical Skid, Int." J. Japan Soc. Prec. Eng.Vol.26, No.3. 213-218 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M.ADACHI et al.: "Supersmooth-Surface Profilometer using Optical Skid" Int.J.Japan Soc.Prec.Eng.,. 26. 213-218 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 安達 正明,三宅 富士雄,竹内 望,鈴木 紀生: "SupersmoothーSurface Profilometer using Optical Skid" International Journal of the Japan Society for Precision Engineering.

    • Related Report
      1991 Annual Research Report
  • [Publications] 安達 正明,北川 洋一,松本 哲也,竹内 望: "遂次3点法の連続形状計測への拡張" 計測自動制御学会論文集. 26. 7-12 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 安達 正明: "光スキッド法による高精度形状測定法" O plus E. No.124. 97-102 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 安達 正明: "光スキッド法による超精密面の形状評価" 光学技術コンタクト. 28. 14-23 (1990)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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