Nanometer-area-electron diffraction of strained semiconductor superlattices
| Project/Area Number |
02650039
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
応用物理学一般(含航海学)
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| Research Institution | Nagoya University |
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Principal Investigator |
TAMAKA Nobuo Nagoya Univ. Engineering, Associate Professor, 工学部, 助教授 (40126876)
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| Co-Investigator(Kenkyū-buntansha) |
MIHAMA Kazuhiro Daido Ins. Tech. Professor, 工学部, 教授 (50023007)
KIZUKA Tokuji Nagoya Univ. Engineering, Research Associate, 工学部, 助手 (10234303)
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| Project Period (FY) |
1990 – 1991
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| Project Status |
Completed (Fiscal Year 1991)
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| Budget Amount *help |
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1991: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1990: ¥1,500,000 (Direct Cost: ¥1,500,000)
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| Keywords | Nano-electron diffraction / Strained superlattices quantum well / interfaces / analysis of strain / 歪解析 / 半導体歪超格子 / 界面歪 / InGaP / InP / 極微小構造解析 |
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| Research Abstract |
1990 :
(1) The method and experimental apparatus were developed for the present nano-electron diffraction from the interfaces of InP/InGaP strained superlattices. Especially, the sample preparation methods for super-lattices of 0.3 x 0.3 x 0.3 mm in cubic were established.
(2) In order to detect strain-distribution in InP/InGaP superlattices, we tried dark-fieled electron microscopy and nano-electron diffraction techniaue. The results were that the strain-distribution was no-symmetrical and the order of the strain was 10^<-3> tilt for the (220) atomic planes.
1991 :
(1) The interfaces of Ge/Si superlattices Prepared by a gas-MBE method were studied. We observed many misfit-dislocations in the interfaces, which were not periodic such as suggested by the Mattewes theory. The result was confirmed by slso the nano-diffraction.
(2) We tried nano-diffraction by using a new electron microscope equipped with field-emission gun. In comparison with the previous microscopes, we obtained nano-diffraciton patterns with higher angular resolution of 10^<-4> rad.
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Report
(3 results)
Research Products
(8 results)
