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Experimental Studies on Improvement of Surface Properties of Material By Pulsed-Ion-Beam Implantation

Research Project

Project/Area Number 02650055
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 機械材料工学
Research InstitutionYamanashi University

Principal Investigator

TAKAAI Tetsuya  Mechanical System Engineering Department, Faculty of Eng. Yamanashi Univ. (Professor)., 工学部, 教授 (80020460)

Co-Investigator(Kenkyū-buntansha) YATSUI Kiyoshi  Laboratory of Beam Technology, University of Technology, Nagaoka (Professor), 教授 (80029454)
NAKAYAMA Yoshihiro  Mechanicl System Engineering Department, Faculty of Engineering, Yamanashi Univ., 工学部, 助手 (40227971)
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1991: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1990: ¥1,200,000 (Direct Cost: ¥1,200,000)
KeywordsPulse Ion Beam / B, N Ion Implantation / Surface Layer of Titan / X-ray Analysis / ESCA / Partial Pressure of Nitrogen Gas / Mechanical Properties / Physical Properties. / パルスイオンビ-ム発生装置 / 金属チタン表面 / B,Nイオン注入 / アパタイト皮膜 / x線解析 / ESCA分析 / 熱的残留応力
Research Abstract

Conventional, steady state charged ion beams have been widely and successfully applied in the R and D of materials such as in welding, semiconductor processing and lithography. On the other hand, intense pulsed light ion beam(LIB), which significantly differs from the conventional ion beams have been recently considered for various applications, particularly in material science. If the LIB is irradiated onto the materials, the surface will be quickly heated to produce high density plasma. In the present experiment, an intense pulsed LIB applications in material science have been experimentally studied, where the LIB is utilized as effective "heat" source as well as ion implantation source. Sintered BN, or sintered apatite chips were used as ion sorces of the present. study.
The effect of irradiations were examined by various physical analysis procredures. The hardness and irradiated surface contours were also investigated. Besides the LIB irradiation. chemical reaction by nitrogen gas flow was also examined in order to investigate the surface modification effect of the materials.
The obtained conclusions can be summarized as follows ;
(1) The substantial effects of irradiation were obtained under the restricted irradiation conditions. According to analysis by ESCA, the amount of implantations were so small as the material test result showed no marked change of mechanical properties.
(2) Chemical reactions of nitogren gas with the surface layer of titanium plate were so active under the temperatures above. 1173 K and nitogen partial pressure over 10^<-2> Torr. According to the tensile test, 0.2% proof stress and tensile strength increased by about 10% as compared to those specimens without treatment. No regression of the toughness was observed and an existence of high degree of nitrides were detected by X-rny annlysis.

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] T.TAKAAI,T.HATSUSHIKA,T.SUZUKI,K.YATSUI,K.MASUKATA: "Surface Modification Experiment by Intense Pulsed Beam" Proc.8th International Couf.on Surface Engineering,Toronto,Canada,June 27〜July pp188〜197. 8th. 188-197 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] K.TATSUI,K.MASUKATA,T.TAKAAI: "Quick Deposition of Various Thin Films by Intense Pulsed Ion Beam" Proc.8th International Couf.of High Power Particle Beams Novorsibirsk,USSR,July 1〜July 4. 8th. (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 鷹合 徹也,八井 浄: "パルスイオンビ-ルによる材料の表面改質" 月刊ジョイテック. 6. 93-98 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 佐藤 哲也,曽根川 富博,鷹合 徹也,八井 浄外: "大強度パルスイオンビ-ムによるTi基板へのNイオン注入" 第54回応用物理学会 学術講演会概要. 第54回. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Takaai, T. Hatsushika, T. Suzuki, K. Yatsui and K. Masukata: "Surface Modification Experiment by Intense Pulsed Ion Beam." Proc. 8th International Conf. on Surface Eng.(1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] K. Yatsui, K. Masukata and T. Takaai et al.: "Quick Deposition of Various thin Films by intense Pulsed Ion Beam." Proc. 8th International Conf. on High Power Particle Beam.(1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Takaai and K. Yatsui: "Materials Surface Modification by Intense Pulsed Ion Beam." Monthly Joy Tech.6. (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] T. Satoh, T. Sonegawa, T. Takaai and K. Yatsui et al.: "N Ion Implantation onto Titan Substrate by High Power Pulsed 10n Beam." Proc. 54th Japan Conference of Applied Physics.(1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 佐藤 哲也: "大強度パルスイオンビ-ムによるTi基板へのNイオン注入" 第54回応用物理学会学術講演会概要 第54回. (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] T.TAKAAI: "Surface Modification Experiment by Intense Pulsed Ion Beam" Proc.8th International Conf.on Surface Engineering,/Toronto,Canada,June 27〜July. 188-197

    • Related Report
      1990 Annual Research Report
  • [Publications] K.YATUI: "Quick Deposition of Various Thin Films by Intense Pulsed Ion Beam" Proc.8th International Conf.of High Power Particle Beams/Novorsibirsk,USSR,July 1〜July 4.

    • Related Report
      1990 Annual Research Report
  • [Publications] 鷹合 徹也: "パルスイオンビ-ムによる材料の表面改質" 月刊ジョイテック. 6. 93-98 (1990)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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