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Ultra-Precision Machining and Surface Evaluation of Optical Flats for High Power Ultra-Violet Lasers

Research Project

Project/Area Number 02650104
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionChubu University

Principal Investigator

NAMBA Yoshiharu  Chubu Univ, Faculty of Engg., Prof., 工学部, 教授 (40029129)

Project Period (FY) 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1990: ¥2,000,000 (Direct Cost: ¥2,000,000)
KeywordsUltra-Precision Grinding / Float Polishing / Ultra-Violet Laser / Laser Fusion / Surface Roughness / Scanning Tunneling Microscope / Laser Damage / Exima Laser
Research Abstract

The final objects of this study is to develop the flat optical components having high accuracy, high transparency or reflectivity, higher laser damage threshold and higher responsibility for high power lasers of ultra-violet in wavelength, in order to help the development of high power examiner lasers and laser fusion program. This year's study was summarized as follows :
1) Clean rooms keeping both constant temperature and humidity have been established for the ultra-precision machining and measuring. Anti-vibration foundations also have set up for ultra-precision instruments.
2) A scanning tunneling microscope (STM) has been founded by a photographic instruments for a Nomarski interference microscope in order to show the correct place for measuring the micro-surface structure by STM. The STM has been calibrated by measuring the grating having 1000 grooves per mm. It has succeeded to measure Mn-Zn ferrite surfaces by STM without metal coating, though the measured material is not conductive.
3) Various optical glasses have been ground into very smooth surfaces better than optically-polished ones by a ultra-precision surface grinder having a glass-ceramic spindle of zero-thermal expansion. Laser damage thresholds of ground laser glass surfaces have been measured. It is cleared that the damage threshold depends upon the surface roughness and contamination of ground surfaces. Ground surfaces show the higher damage thresholds rather than optically-polished surfaces.
4) The float-polished laser glass shows the highest laser damage threshold of 30J/cm^2, which is double number rather than that of optically-polished surfaces.

Report

(2 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • Research Products

    (40 results)

All Other

All Publications (40 results)

  • [Publications] Y.NAMBA: "UltraーPrecision Grinding of Optical Materials to Produce Smooth Optical Components" OSA Technical Digest Series. 9. 38-41 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] J.M.BENNETT: "Ductile Grinding Study of Glass Using an UltraーPrecison Surface Grinder and Different Grinding Wheels" OSa Technical Digest Series. 9. 43-46 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] "光学ガラスの超精密研削" 光学. 20. 78-79 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] I.YAMADA: "XーRay Characteristics of Atomically Flat Gold Films Deposited by ICB" Nuclear Instruments and Methods in Physics Research. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] G.H.TAKAOKA: "XーRay Characteristics of Atomically Flat Gold Films Prepared by Ionized Cluster Beam" Proc.of 13th symposium on Ion Sources and IonーAssisted Technology. 127-130 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] I.YAMADA: "Preparation of Atomically Flat Gold Films by Ionized Cluster Beam" Abstracts 8th International Conference on Implantation Technology. 1-16 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 佐藤 文彦: "X線反射ミラ-用ICBーAu薄膜の表面粗さ" 1990年秋季第51回応用物理学会学術講演会講演予稿集. 501- (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 難波 義治: "MnーZnフェライト単結晶の精密研削" 1990年度精密工学会秋季大会学術講演会講演論文集. 243-244 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 難波 義治: "MnーZnフェライト単結晶の精密研削面の微小表面形状" 1990年度精密工学会秋季大会学術講演会講演論文集. 245-246 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 難波 義治: "アルミニウム合金の超精密非球面切削" 1991年度精密工学会春季大会学術講演会講演論文集. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 難波 義治: "各種光学ガラスの超精密研削" 1991年度精密工学会春季大会学術講演会講演論文集. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 難波 義治: "レ-ザ散乱計による加工表面の評価" 1991年度精密工学会春季大会学術講演会講演論文集. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 難波 義治: "21世紀への展望" 中部大学, 336 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] R.S.CUTLER: "Engineering in Japan" Technology Transfer Society, (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 山下 広順: "重点領域研究「X線結像光学」第8回研究会講演資料集" 重点領域研究「X線結像光学」, 90 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 波岡 武: "重点領域研究「X線結像光学」第2回公開シンポジウム講演資料集" 重点領域研究「X線結像光学」, 180 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Y. NAMBA: "Ultra-Precision Grinding of Optical Materials to Produce Smooth Optical Components" OSA 1990 Technical Digest Series. 9. 38-41 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] J. M. BENNETT: "Ductile Grinding Study of Glass Using an Ultra-Precision Surface Grinder and Different Grinding Wheels" OSA 1990 Technical Digest Series. 9. 43-46 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Y. NAMBA: "Ultra-Precision Grinding of Optical Glasses" Kougaku. 20. 78-79 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] I. YAMADA: "X-Ray Characteristics of Atomically Flat Gold Films Deposited by ICB" Nuclear Instruments and Methods in Physics Research. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] G. H. TAKAOKA: "X-Ray Characteristics of Atomically Flat Gold Films Prepared by Ionized Cluster Beams" Proc. 13th Symp. on Ion Sources and Ion-Assisted Technology. 127-130 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] I. YAMADA: "Preparation of Atomically Flat Gold Films by Ionized Cluster Beam" Abstracts 8th Int. Conf. on Implantation Technology. 1-16 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Y. NAMBA: "Ultra-Precision Machining for 21th Century" A View for 21th Century, Chubu University. 1-11 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Y. NAMBA: "Education in High-Technology for Engineers in Japan" Engineering in Japan, Technology Transfer Society. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Y.NAMBA: "UltraーPrecision Grinding of Optical Materials to Produce Smooth Optical Components" OSA 1990 Technical Digest Series. 9. 38-41 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] J.M.BENNETT: "Ductile Grinding Study of Glass Using an UltraーPrecision Surface Grinder and Different Grinding Wheels" OSA 1990 Technical Digest Series. 9. 43-46 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] I.YAMADA: "XーRay Characteristics of Atomically Flat Gold Films Deposited by ICB" Nuclear Instruments and Methods in Physics Research. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 難波 義治: "光学ガラスの超精密研削" 光学. 20. 78-79 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] G.H.TAKAOKA: "XーRay Characteristics of Atomically Flat Gold Films Prepared by Ionized Cluster Beam" Proc.of 13th Symposium on Ion Sources and IonーAssisted Technology. 127-130 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] I.YAMADA: "Preparation of Atomically Flat Gold Films by Ionized Cluster Beam" Abstracts 8th Int'l Conf.on Implantation Technology. 1-16 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 佐藤 文彦: "X線反射ミラ-用ICBーAu薄膜の表面粗さ" 1990年秋季第51回応用物理学会学術講演会講演予稿集. 501 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 難波 義治: "MnーZnフェライト単結晶の精密研削" 1990年度精密工学会秋季大会学術講演会講演論文集. 243-244 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 難波 義治: "MnーZnフェライト単結晶の精密研削面の微小表面形状" 1990年度精密工学会秋季大会学術講演会講演論文集. 245-246 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 難波 義治: "アルミニウム合金の超精密非球面切削" 1991年度精密工学会春季大会学術講演会講演論文集. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 難波 義治: "各種光学ガラスの超精密研削" 1991年度精密工学会春季大会学術講演会講演論文集. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 難波 義治: "レ-ザ散乱計による加工表面の評価" 1991年度精密工学会春季大会学術講演会講演論文集. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 難波 義治: "21世紀への展望" 中部大学, 336 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Robert S.Cutler: "Engineering in Japan" Technology Transfer society, to be published (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 山下 広順: "重点領域研究「X線結像光学」第8回研究会講演資料集" 重点領域研究「X線結像光学」, 90 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 波岡 武: "重点領域研究「X線結像光学」第2回公開シンポジウム講演資料集" 重点領域研究「X線結像光学」, 180 (1991)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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