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Development of Porous-Silica AR Coating for Ultra-Violet Lasers

Research Project

Project/Area Number 02805007
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 物理計測・光学
Research InstitutionOsaka University

Principal Investigator

YOSIDA Kunio  Osaka University, Institute of Laser Engineering, Associate Professor, レーザー核融合研究センター, 助教授 (70029338)

Co-Investigator(Kenkyū-buntansha) TANAKA Kazuo  Osaka University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (70171741)
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 1991: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1990: ¥1,000,000 (Direct Cost: ¥1,000,000)
KeywordsPorous-silica AR coating / Ultra-violet Laser / Ion-injection / Surface Treatment / Spectral Transmittance / surface Roughness / Laser-induced Damage / 化学処理 / 石英基板 / 反射防止膜 / イオン打込み / 屈折率勾配
Research Abstract

We have studied the porous-silica AR coating used for UV lasers in conjunction with ion-injection and surface treatment. Spectral transmittance, surface roughness and laser-induced damage were measured.
The experimental results over two years has been completed and published in this end of March, 1992.

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report

URL: 

Published: 1990-04-01   Modified: 2016-04-21  

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