• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Fundamental Research on Ionized Cluster Beam Processes

Research Project

Project/Area Number 03044082
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research InstitutionKyoto University

Principal Investigator

YAMADA Isao  Ion beam Engineering Experimental Laboratory, Kyoto University, Professor, 工学部, 教授 (00026048)

Co-Investigator(Kenkyū-buntansha) J. Nothby  ロードアイランド大学, 工学部, 教授
Y. Kuk  AT&Tベル研究所, 金属誘電体薄膜研究部, 研究員
MAREK Sosnowski  Department of Electrical Engineering, New Jersey Institute of Technology, Profes, 電気工学科, 教授
W.L. Brown  AT&Tベル研究所, 金属誘電体薄膜研究部, 部長
TAKAOKA Gikan  Ion Beam Engineering Experimental Laboratory, Kyoto University, Associate Profes, 工学部, 助教授 (90135525)
WALTER L. Brown  This Film Metal and Dielectric Research Department, AT & T Bell Laboratories, De
USUI Hiroaki  Faculty of Engineering, Tokyo University of Agr. and Tech., Associate Professor
YOUNG Kuk  Department of Physics, Seoul National University, Professor
JAN Northby  Department of Physics, Univ. of Rhode Island, Professor
NORTHBY J.  ロードアイランド大学, 物理学科, 教授
KUK Y.  AT&Tベル研究所, 薄膜研究部, 所員
SOSNOWSKI M.  ニュージャージー工科大学, 電気工学科, 教授
BROWN W.L.  AT&Tベル研究所, 薄膜研究部, 部長
臼井 博明  東京農工大学, 工学部, 助教授 (60176667)
Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥9,500,000 (Direct Cost: ¥9,500,000)
Fiscal Year 1992: ¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 1991: ¥5,500,000 (Direct Cost: ¥5,500,000)
KeywordsInternational Exchange / Joint Research / Ionized Cluster Beam / Gas Cluster / Film Formation / Shallow Implantation / Clean Surface Formation / Atomically Flat Surface / クラスタ- / クラスタ-イオンビ-ム / エキシマレ-ザ- / 薄膜形成 / 配列制御 / エピタキシャル成長 / 走査トンネル顕微鏡
Research Abstract

We have been doing Joint Research with AT & T Bell Laboratories, New Jersey Institute of Technology, and University of Ryode Island for Fundamental Research on Ionized Cluster Beam (ICB) Processes by Grant under The Monbusho International Scientific Research Program. The investigations of ICB processes by these groups could provide important and useful results to each group.
The experimental results obtained during the research term;namely (1) atomic-scale observations by Scanning Tunneling Microscopy (STM) of the early stages of film growth, and (2) recent studies of the detailed composition of beams from ICB sources, have led to a new understanding of the origins of the extraordinary properties of thin films deposited by ICB methods. The presence of a small fraction of atoms is the form large clusters initiates a novel sequence of film growth steps staring with the immediate formation of stable islands for film growth.
In addition, a gas cluster ion source was newly developed and clusters with the size range of several hundreds to thousands of molecules were generated with this apparatus. For impacts with large clusters, We observed unique properties of the materials modified by the implantation, sputtering, and cleaning processes. These results can be applied to the development of new technologies for surface treatment.

Report

(2 results)
  • 1992 Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (51 results)

All Other

All Publications (51 results)

  • [Publications] I. YAMADA: "Irradiation Effects of Gas-Cluster Co_2 Ion Beams on Si" To be published in Nuclear Instruments and Methods. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] J.A. NORTHBY: "A Method and Applicatications for Surface Modification by Gas-Cluster Ion Impact" To be published in Nuclear Instruments Methods. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Surface Modification and Other Advanced Ion Beam Processing Projects in Japan" Surface and Coatings Technoloqy. 51. 514-521 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Novel Paths Nucleation and Growth of Thin Films by Ionized Cluster Beam (ICB)" Materals Research Society Symposium Proceedings. 235. 597-607 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S. WADA: "Epitaxial Al(110)Films Grown on Heavily-Doped Si(100)by Cluster Beam Deposition" Materials Resarch Society Symposium Proceedings. 235. 621-626 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] G.H. TAKAOKA: "Surface Modification of Bio-Active Ceramic (Artificial Bone)by Ion Implantation" Materials Research Society Symposium Proceedings. 252. 23-28 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Advanced Ion Beam Material Processing Projects in Japan" Materials Research Symposium Proceedings. 268. 261-272 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] G.H. TAKAOKA: "Surface and Interface Properties of Copper Phthalocyanine Multilayer Structure Prepared by Method" Proceedings of the First Meeting on the Engineering Society of Japan. 251-254 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y. YAMASHITA: "Irradiation Effects of a Mass Andlyzed Gas Cluster Ion Beam Silicon Substrates" Proceedings of the First Meeting on the Ion Engieering Society of Japan. 247-250 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Ionized Cluster Beam Deposition and Epitaxy of Metal Films on Large Lattice Misfit Substrate" Physica Scripta. T35. 245-250 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Recent Progress in Depositing Epitaxial Metal Films by Ionezed Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 544-549 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Advanced Ion Beam Processing Projects in Japan" Nuclear Instruments and Methods in Physics Research. B59/60. 1467-1475 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Investigatin of Ionized Cluster Beam Bombardment and Its Characteristics for Paterials Modification" Radiation Effects and Defects in Solids. 124. 69-80 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Preparation pf Atomically Flat Gold Films by Ionized Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 876-879 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "X-ray Characteristics of Atomecally Flat Gold Films Deposited by ICB" Nuclear Instruments and Methods in Physics Research. B59/60. 216-218 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAJIMA: "Film Formation of Tetraphenylporphine by Use of the ICB Method" Nuclear Instruments and Methods Physics Research. B59/60. 219-224 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Large-Misfit Heteroepitaxy of Aluminum Films by ICB Deposition" Nuclear Instruments Methods in Physics Research. B59/60. 302-307 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Thin Film Deposition and Growth Processes by Ionized Cluster Beams" Materials Research Society Symposium Proceedings. 206. 383-390 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M. ADACHI: "Optical Characteristics of High-Power Excimer Laser Mirrors of Single-Crystal Aluminum Film with High Refectance and Durability" Nuclear Instruments and Methods in Physics Research. B59/60. 940-942 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] R.L. McEACHERN: "An Investigaion of Cluster Formation in an Ionized Cluster Beam Deposition Source" Journal of Vacuum Science and Technology. A9. 3105-3112 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Physics and Chemistry:From Clusters to Crystals" Kluwer Academic Publishers, (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. YAMADA: "Low Temperature Epitaxial Growth of Semiconductors" World Scientific, 343 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Irradiation Effects of Gas-Cluster CO_2 Ion Beams on Si" Nuclear Instruments and Methods. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] J. A. Northby: "A Method and Applications for Surface Modification by Gas-Cluster Ion Impact" Nuclear Instruments and Methods. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Surface Modification and Other Advanced Ion Beam Processing Projects in Japan" Surface and Coatings Technology. 51. 514-521 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Novel Paths for Nucleation and Growth of This Films by Ionized Cluster Beam (ICB) Techniques : Atomic-Scale Observation" Materials Research Society Symposium Proceedings. 235. 597-607 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S. Wada: "Epitaxial A1(110) Films Grown on Heavily-Doped Si(100) by Cluster Beam Deposition" Materials Research Society Symposium Proceedings. 235. 621-626 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Advanced Ion Beam Material Processing Projects in Japan" Materials Research Society Symposium Proceedings. 268. 261-272 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] G.H. Takaoka: "Surface and Interface Properties of Copper Phthalocyanine Multilayer Structure Prepared by ICB Method" Proceedings of the First Meeting on the Ion Engineering Society of Japan. 251-254 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y. Yamashita: "Irradiation Effects of a Mass Analyzed Gas Cluster Ion Beam on Silicon Substrates" Proceedings of the First Meeting on the Ion Engineering Society of Japan. 247-250 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Ionized Cluster Beam Deposition and Epitaxy of Metal Films on Large Lattice Misfit Substrate" Physica Scripta. T35. 245-250 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Recent Progress in Depositing Epitaxial Metal Films by an Ionized Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 544-549 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Advanced Ion Beam Processing Projects in Japan" Nuclear Instruments and Methods in physics Research. B59/60. 1467-1475 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Investigation of Ionized Cluster Beam Bombardment and Its Characteristics for Materials Modification" Radiation Effects and Defects in Solids. 124. 69-80 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Preparation of Atomically Flat Gold Films by Ionized Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 876-879 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "X-ray Characteristics of Atomically Flat Gold Films Deposited by ICB" Nuclear Instruments and Methods in Physics Research. B59/60. 216-218 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Film Formation of Tetraphenylporphine by Use of the ICB Method" Nuclear Instruments and Methods in Physics Research. B59/60. 219-224 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Large-Misfit Heteroepitaxy of Aluminum Films ICB Deposition" Nuclear Instruments and Methods in Physics Research. B59/60. 302-307 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: "Thin Film Deposition and Growth' Processes by Ionized Cluster Beams" Materials Research Society Symposium Proceedings. 206. 383-390 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] M. Adachi: "Optical Characteristics of High-Power Excimer Laser Mirrors of Single-Crystal Aluminum Film with High Reflectance and Durability" Nuclear Instruments and Methods in Physics Research. B59/60. 940-942 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] R. L. McEachern: "An Investigation of Cluster Formation in an Ionized Cluster Beam Deposition Source" Journal of Vacuum Science and Technology. A9. 3105-3112 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: Kluwer Academic Publishers. Physics and Chemistry : From Clusters to Crystals, (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I. Yamada: World Scientific. Low Temperature Epitaxial Growth of Semiconductors, 1-343 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Isao Yamada: "Ionized Cluster Beam Deposition and Eptiaxy of Metal Films on Large Misfit Substrates" Physica Scripta. T35. 245-250 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Isao Yamada: "Recent Progress in Depositing Epitaxial Metal Films by an Ionized Cluster Beam" Nuclear Instruments and Methods in Physics Research B. 55. 544-549 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Isao Yamada: "New Horizons in Materials Processing with ICB" Proceedings of the 14th Symposium on Ion Sources and Ion-Assisted Technology. 227-235 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Isao Yamada,Gikan Takaoka,Hiroaki Usui and Seok K.Koh: "Thin Film Deposition and Growth Processes by Ionized Cluster Beams" Materials Research Society Symposium Proceedings. 206. 383-390 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Rand McEachern,Walter Brown,Martin Jarrold,Marek Sosnowski,Gikan Takaoka,Hiroaki Usui,Isao Yamada: "An Investigation of Cluster Formation in an Ionized Cluster Beam Deposition Source" Journal of Vacuum Science and Technology. A9. 3105-3112 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Isao Yamada,Gikan Takaoka,Michael Current,Marek Sosnowski and Walter Brown: "Atomic Scale Observations of the Effects of Ion Bombardment on the Growth of Eptiaxial Thin Metal Films on Substrates with Large Lattice Misfits" Materials Research Society Symposium Proceedings. (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] Isao Yamada(分担執筆): "Low Temperature Epitaxial Growth of Semiconductor(Ed.by Takashi Hariu)" World Scientific, 1-343 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 山田 公: "イオンビ-ムによる薄膜設計" 共立出版, 1-114 (1991)

    • Related Report
      1991 Annual Research Report

URL: 

Published: 1991-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi