| Project/Area Number |
03452293
|
|---|
| Research Category |
Grant-in-Aid for General Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
結晶学
|
|---|
| Research Institution | Nagoya Institute of Technology |
|---|
Principal Investigator |
TORAYA Hideo Nagoya Institute of Technology, Associate Professor, 工学部, 助教授 (20143662)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
TORAYA Hideo Nagoya Institute of Technology, Associate Professor (20143662)
|
|---|
| Project Period (FY) |
1991 – 1993
|
| Project Status |
Completed (Fiscal Year 1993)
|
| Budget Amount *help |
¥7,600,000 (Direct Cost: ¥7,600,000)
Fiscal Year 1993: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1992: ¥200,000 (Direct Cost: ¥200,000)
Fiscal Year 1991: ¥7,100,000 (Direct Cost: ¥7,100,000)
|
|---|
| Keywords | Grazing Incidence Diffraction / Thin-Film / Asymmetric Diffraction / Surface Structure / Parallel-Beam Optics / Computer Software for Analysis / スレスレ入射回析 / スレスレ入射回折法 / 計算機用ソフトウェア- / 解析システム開発 |
|---|
| Research Abstract |
The diffractometer for grazing incidence diffraction (GID) has been developed, which can be used for thin-film structure analysis by using specular reflection technique. High quality of the data was obtained by using this instrument. A new diffractometer for asymmetric diffraction experiment has also been developed by modifying the instrument for GID.
For quantitative analysis of thin-film structures, the use of parallel-beam geometry is essntially important, because the focusing (divergent-beam) geometry induces the degradation of diffraction profiles. Profiles in asymmetric diffraction were examined in both theory and experiment using synchrotron radiation parallel-beam geometry and pseudo-parallel-beam geometry in a laboratory system developed in the present project. It has been demonstrated that the present laboratory system is very useful for the quantitative study of thin-film structure analysis.
A computer software for analyzing grazing incidence diffraction patterns has been developed.
|
