The development of the system for analyzing thin-film structure by using grazing incidence diffraction technique
| Project/Area Number |
03452293
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
結晶学
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| Research Institution | Nagoya Institute of Technology |
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Principal Investigator |
TORAYA Hideo Nagoya Institute of Technology, Associate Professor, 工学部, 助教授 (20143662)
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| Co-Investigator(Kenkyū-buntansha) |
TORAYA Hideo Nagoya Institute of Technology, Associate Professor (20143662)
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| Project Period (FY) |
1991 – 1993
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| Project Status |
Completed (Fiscal Year 1993)
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| Budget Amount *help |
¥7,600,000 (Direct Cost: ¥7,600,000)
Fiscal Year 1993: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1992: ¥200,000 (Direct Cost: ¥200,000)
Fiscal Year 1991: ¥7,100,000 (Direct Cost: ¥7,100,000)
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| Keywords | Grazing Incidence Diffraction / Thin-Film / Asymmetric Diffraction / Surface Structure / Parallel-Beam Optics / Computer Software for Analysis / スレスレ入射回析 / スレスレ入射回折法 / 計算機用ソフトウェア- / 解析システム開発 |
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| Research Abstract |
The diffractometer for grazing incidence diffraction (GID) has been developed, which can be used for thin-film structure analysis by using specular reflection technique. High quality of the data was obtained by using this instrument. A new diffractometer for asymmetric diffraction experiment has also been developed by modifying the instrument for GID.
For quantitative analysis of thin-film structures, the use of parallel-beam geometry is essntially important, because the focusing (divergent-beam) geometry induces the degradation of diffraction profiles. Profiles in asymmetric diffraction were examined in both theory and experiment using synchrotron radiation parallel-beam geometry and pseudo-parallel-beam geometry in a laboratory system developed in the present project. It has been demonstrated that the present laboratory system is very useful for the quantitative study of thin-film structure analysis.
A computer software for analyzing grazing incidence diffraction patterns has been developed.
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Report
(4 results)
Research Products
(23 results)
