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Development of high resolution TRAXS and its applications to surface science

Research Project

Project/Area Number 03554007
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 固体物性
Research InstitutionThe University of Tokyo

Principal Investigator

HASEGAWA Shuji  The University of Tokyo, Faculty of science, Research associate, 理学部, 助手 (00228446)

Co-Investigator(Kenkyū-buntansha) INO Shozo  The University of Tokyo, Faculty of Science Professor, 理学部, 教授 (70005867)
Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥9,000,000 (Direct Cost: ¥9,000,000)
Fiscal Year 1992: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1991: ¥7,600,000 (Direct Cost: ¥7,600,000)
KeywordsX-ray spectroscopy / total reflection angle / crystal spectrometer / surface analysis / RHEED / chemical analysis / surface conductivity / semiconductor surface / EXAFS / 深さ分析
Research Abstract

The aim of this project is to improve a "RHEED-TRAXS" method, our original technique for surface analysis, and to develop a "high resolution TRAXS". The achievements in this project term are as follows;
1. For the high resolution RHEED-TRAXS (reflection-high-energy electron diffraction--total-reflection-angle-X-ray spectroscopy), we developed an X-ray spectrometer which consisted of a crystal spectrometer and a position-sensitive X-ray detector. Combining it with our RHEED-MBE(molecular beam epitaxy) apparatus, we obtained high-resolution X-ray energy spectra which had intensities enough for observations of dynamical processes with short data-aquisition time.
2. Using a flat LiF(200) crystals as a spectrometer, we confirmed an energy resolution of about 13eV at GaK lines (9.2keV), which was about ten times higher than that (150eV) of the previous TRAXS method. Then, we expect to carry out EXAFS (extended X-ray absorption fine structures) with this high energy resolution.
3. With use of a Si surface, of which atomic structures and chemical compositions were well characterized with this new technique, we measured the surface conductance, and found it to be sensitively influenced by the atomic-scale structures of the surface. The changes in atomic arrangements on the surface lead to changes of surface electronic states and space-charge layer, resulting in changes in the macroscopic electrical properties such as surface conductance. This findings will be important not only from the fundamental interests, but also from their devise applications.

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] 長谷川 修司: "Surface structures and conductance at epitaxial growths of Ag and Au on the Si(III) surface" Physical Review Letters. 68. 1192-1195 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 長谷川 修司: "Surface structures and conductance at initial stages in epitaxy of metals on a Si(III) surface" Surface Science. 283. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 長谷川 修司: "Hysteresis in phase transitions at clean and Au-covered Si(III) surfaces" Physical Review B. 47. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 長谷川 修司: "Structure-dependent surface conductance at initial stages in metal epitaxy on Si(III) surface" Thin Solid Eilms. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 長谷川 修司: "Correlation between atomic-scale structures and macroscopic electrical properties of metal-covered Si(III) surfaces" International Journal of Modern Physics B(招待論文). (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 鈴木 芳夫: "Theoretical studies on total-reflection-angle effect of fluorescent X-rays emitted from deposited atoms on surfaces" Japanese Journal of Applied Physics. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Hasegawa and S.Ino: "Surface structures and conductance at epitaxial growths of Ag and Au on the Si(111) surface" Physical Review Letters. 168. 1192-1195 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Hasegawa and S.Ino: "Surface structures and conductace at initial stages in epitaxy of metals on a Si(111) surface" Surface Science. 283. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Hasegawa, Y.Nagai, T.Oonishi,and S.Ino: "Hysteresis in phase transitions at clean and Au-covered Si(111) surfaces" Physical Review. B47. (1973)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Hasegawa and S.Ino: "Structure-dependent surface conductance at initial stages in metal epitaxy on Si(111) Surface" Thin Solid Films. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Hasegawa and S.Ino: "Correlation between atomic-scale structures and macroscopic electrical pnperties of metal-covered Si(111) surfaces" International Journal of Modern Physics B. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y.Suzuki,and S.Hasegawa: "Theoretical studies on total-reflection-angle effect of fluorescent X-rays emitted from deposited atoms on surfaces" Japanese Journal of Applied Physics.(1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 長谷川 修司: "Surface structures and conductance at epitaxial growths of Ag and Au on the Si(111)surface" Physical Review Letters. 68. 1192-1195 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 長谷川 修司: "Surface structures and conductance at initial stages in epitaxy of metals on a Si(111)surface" Surface Science. 283. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 長谷川 修司: "Hysteresis in phase transitions at clean and Au-covered Si(111)surfaces" Physical Review B. 47. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 長谷川 修司: "Structure-dependent surface conductanie at initial stages in metal epitaxy on Si(111)surface" Thin Solid Films. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 長谷川 修司: "Correlation between atomic-scale structures and macroscopic electrical properties of metal-covered Si(111)surfaces" International Journal of Modern Physics B(招待論文). (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 鈴木 芳夫: "Theoretical Studies on total-reflection-angle effect of fluorescent X-rays emitted from deposited atoms on surfaces" Japanese Journal of Applied Physics. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 長谷川,井野: "Surface structures and conductance at epitaxial growths of Ag and Au on the Si(111)surface" Physical Review Letters. 68. 1192-1195 (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] 長谷川,井野: "High resolution TRAXS(total-reflection-angle X-ray spectroscopy)combined with RHEED" Review of Scientific Instruments.

    • Related Report
      1991 Annual Research Report
  • [Publications] 長谷川,井野: "High resolution TRAXS(total-reflection-angle X-ray spectroscopy)and its application to EXAFS analysis" Japanese Journal of Applied Physics.

    • Related Report
      1991 Annual Research Report

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Published: 1991-04-01   Modified: 2016-04-21  

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