• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of high current liquid metal ion source for large area, high speed surface treatment

Research Project

Project/Area Number 03555002
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Applied materials
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

ISHIKAWA J  Kyoto Univ., Dept. of Electronics, Professor, 工学部, 教授 (80026278)

Co-Investigator(Kenkyū-buntansha) GOTOH Y  Kyoto Univ., Dept. of Electronics, Research Associate, 工学部, 助手 (00225666)
TSUJI H  Kyoto Univ., Dept. of Electronics, Research Associate, 工学部, 助手 (20127103)
Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥7,500,000 (Direct Cost: ¥7,500,000)
Fiscal Year 1992: ¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1991: ¥5,100,000 (Direct Cost: ¥5,100,000)
Keywordshigh current ion beam / liquid metal ion source / impregnated-electrode / multiple-point-emission / surface modification / beam profile / sheet shaped beam / droplet / 誘導加熱 / 集束レンズ / 大電流イオンビ-ム / ビ-ムプロファイル / シ-トビ-ム
Research Abstract

We have designed and developed the high current liquid metal ion source in which multiple tip-and-reservoirs can be equipped. In order to avoid the serious increase of the heating current as the increase of the tip-and-reservoirs, the tip-and-reservoirs could be connected electrically in series. We examined also the material of and the configuration of the heat introducing electrode, and the timing of the power input. As a result, the ion source could be heated up to 1200゚C with two or four-tip-and-electrodes.
With the present source, maximum indium ion current of 9 mA was obtained with four tip-and-reservoirs ; we almost achieved the ion current of the initial objective (10 mA). The current of 9 ma is limited by the current capacity of the ion-extraction power supply. Larger current will be obtained by using the larger power supply.
Furthermore, we examined the inductive heating of the ion source to achieve stable operation of much larger source.
The profiles of the extracted beams were measured to obtain the details of the ion beam characteristics. We indicated the anisotropy of the beam profils when operated with multiple emission points. Along the direction parallel to the emission points array, the beamlets were converged. This anisotropy would be attributed to the presence of the neighboring cusps. The fact implies that the beam could be automatically converged along the direction which we have much difficulty to converge by the external electric field. From the results, we examined the arrangement of the tip-and-reservoirs suitable to the surface modification apparatus.
Emission of droplets, charged particles with fairly large mass, were also investigated to obtain details of them on the matter such as diameter and special distribution. Droplet emission occurred uniformly. The effective use of these droplets will be beneficial for the high speed deposition and surface modification.

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] Y.GOTOH et al.: "Intensification of an Impregnated-Electrode-Type Liquid-Metal Ion Source by Multiplying the Number of Tip-and-Reservoirs" Review of Scientific Instruments. 63. 2438-2440 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] J.ISHIKAWA et al.: "Profiles of metal ion beams extracted from impnregnated-electrode-type liquid-metal ion source with linear array emission points" Vacuum.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y.GOTOH et al.: "Metal-sheet-beam formation using impregnated-electrode-type liquid-metal ion source with linear array of emission points" Nuclear Instruments and Methods B.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 辻 博司 他: "含浸電極型液体金属イオン源" アイオニクス. No.205. 57-64 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 後藤 康仁 他: "多点放出含浸電極型液体金属イオン源のビームプロファイルとシートビームの形成" 第3回粒子線の先端的応用技術に関するシンポジウム講演予稿集. BEAMS1992. 93-96 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y.Gotoh et al.: "Intensification of an Impregnated-Electrode-Type Liquid-Metal Ion Source by Multiplying the Number of Tip-and-Reservoirs" Rev.Sci.Instr.63(4). 2438-2440 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] J.Ishikawa et al.: "Profiles of metal ion beams extracted from impregnated-electrode-type liquid-metal ion source with linear array emission points" Vacuum.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y.Gotoh et al.: "Metal-sheet-beam formation using impregnated-electrode-type liquid-metal ion source with linear array of emission points" Ncul.Instr.Meth. in Physics Research B.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] H.Tsuji et al.: "Impregnated-electrode-type liquid-metal ion source" aionikusu. 205. 57-64 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y.Gotoh et al.: "Beam profiling of and sheet beam formation with impregnated-electrode-type liquid-metal ion source" Proc. of the 3rd Symp. on Beam Engineering of Advanced Material Syntheses. 93-96 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y.Gotoh et al.: "Intensification of an Impregnated-Electrode-Type Liquid-Metal Ion Source by Multiplying the Number of Tip-and-Reservoirs" Review of Scientific Instruments. 63. 2438-2440 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] J.Ishikawa et al.: "Profiles of metal ion beams extracted from impregnated-electrode-type liquid-metal ion source with linear array emission points" Vacuum. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] Y.Gotoh et al.: "Metal-sheet-beam formation using impregnated-electrode-type liquid-metal ion source with linear array of emission points" Nuclear Instruments and Methods B. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 辻 博司他: "含浸電極型液体金属イオン源" アイオニクス. No.205. 57-64 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 後藤 康仁他: "多点放出含浸電極型液体金属イオン源のビームプロファイルとシートビームの形成" 第3回粒子線の先端的応用技術に関するシンポジウム講演予稿集. BEAMS1992. 93-96 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Y.Gotoh: "Intensification of an Impregnated-Electrode-Type Liquid-Metal Ion Source by Multiplying the Number of Tip-and-Reservoirs" Review of Scientific Instruments. (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] Y.Gotoh: "Simultaneous Operation of Two Tip-and-Reservoirs of Impregnated-Electrode-Type Liquid Metal Ion Source" Proc.of the 14th Symposium on Ion Sources and Ion-Assisted Technology. ISIAT'91. 23-26 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Y.Gotoh: "Numerical Study on Microfabrication of Field Emitter by Focused Ion Beam" Proc.of the 14th Symposium on Ion Sources and Ion-Assisted Technology. ISIAT'91. 323-326 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 後藤 康仁: "含浸電極型液体金属イオン源の大電流化に関する検討" 第2回粒子線の先端的応用技術に関するワ-クショップ講演予稿集. BEAMS1991. 61-64 (1991)

    • Related Report
      1991 Annual Research Report

URL: 

Published: 1991-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi