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STUDY ON A TRIAL MANUFACTURE OF HIGHLY 3-DIMENSIONAL PROFILING SYSTEM BY USING FIBER-OPTIC INTERFEROMETER

Research Project

Project/Area Number 03555078
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子機器工学
Research InstitutionUNIVERSITY OF TOKYO

Principal Investigator

FUJII Yoichi  UNIVERSITY OF TOKYO, INSTITUTE OF INDUSTRIAL SCIENCE, PROFESSOR, 生産技術研究所, 教授 (00013110)

Co-Investigator(Kenkyū-buntansha) OZAKI Masao  UNIVERSITY OF TOKYO, INSTITUTE OF INDUSTRIAL SCIENCE, RESEARCH ASSOCIATE, 生産技術研究所, 助手 (50194543)
ARAKAWA Yasuhiko  UNIVERSITY OF TOKYO, INSTITUTE OF INDUSTRIAL SCIENCE, ASSOCIATE PROFESSOR, 生産技術研究所, 助教授 (30134638)
Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥7,900,000 (Direct Cost: ¥7,900,000)
Fiscal Year 1992: ¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 1991: ¥4,600,000 (Direct Cost: ¥4,600,000)
KeywordsSurface Roughness Measuring System / 3-dimensional Profiling System / Fiber-Optic Interferometer / Temperature Sensor / Fiber-Optic Loop Resonator / Michelson Interferometer / Optical Phase Sensing / Phase Contrast / 表面形状形測 / 表面粗さ計測 / 光ファイバ干渉センサ / 表面プロファイル測定 / 光センサ / 光ファイバ / 光ヘテロダイン / 光干渉計 / 表面粗さ
Research Abstract

The purpose of this research is to measure the surface shape of a specimen with extremely high precision, and still more, to improve the fiber-optic measurement technology which is after still more, to improve the fiber-optic measurement technology which is after the higly precise multipoint fiber-optic temperature measurement or the highly contrastive 3-dimensional measurement of objects by using optical heterodyne effect.
This surface roughness measuring system composes an interferometer by using the single mode optical fiber coupler, 3-dimensionally moves the sepcimen by employing mechanical scanning equipments, and automatically output's the result of the measurement by doing data information processing machines.
It has the resolution of 0.3nm and 1mum for the vertical and horizontal direction respectively, which can make us get the measuring system having sufficient stability to be used practically. Besides, since this study pursues the practical use of applicable fiber-optic interf … More erence sensor measurements, it particularly aims to have the surface profiling measurement system with super high sensitivity practicallized by using simple Michelson interferometer, optical phase sensing and synchronized detection system.
With the optical fiber, we can make multipoint temperature sensors which is on the basis of the optical fiber circuit device obtained by the fiber-optic loop resonators whose resonance frequency changes with the change of the temperature. This optical temperature sensor is considered as a highly practical thing since the structure of the sensor part is quite simple and endurable, and the place to be located is selectable according to the parameters such as the length of the resonator.
Except these, plans for the improvement and development of new fiber-optic sensors to measure voltages or sounds by using optical fiber resonator are being taken into consideration.
As we have said and done, this research has developed a new type of fiber-optic sensor beyond its simple purpose so that it could be considered as what confirmed its effectiveness. Less

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] 加藤 考利: "光ファイバリング共振器を用いた多点温度センサ" 電子情報通信学会春季大会. C-361. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Masao OZAKI: "CHARACTERISTICS OF DIFFERENTIAL HETERODYNE LASER MICROSCOPE" THE IN TERNATIONAL CONFERENCE ON CONFOCAL MICROSCOPY & 3D IMAGE PROCESSING. P02. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y.Jin: "Highly Sensitive Fiber-Optic Profiling System" International Conference of Optical Fibre Sensors. 24. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Yukio OHSAWA: "Stationary Solution of Nonlinear Propagation of Femtsecond Optical Pulse by Circuit Model" Journal of The Physical Society of Japan. 61. 3977-3983 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 藤井 陽一: "レーザ顕微鏡" 電子情報通信学会誌. 74. 503-505 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] T.YAMAUCHI: "Quantum wires with strain effect:Tight binding analysis" Surf.Sci.267. 291-295 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Takatoshi Kato: "Multipoint Temperature Sensor Using Fiber-Optic Ring Resonator" PROCEEDINGS OF THE 1993 IECE SPRING CONFERENCE. C-361. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Masao Ozaki: "CHARACTERISTICS OF DIFFERENTIAL HETERODYNE LASER MICROSCOPE" THE INTERNATIONAL CONFERENCE ON CONFOCAL MICROSCOPY & 3D IMAGE PROCESSING. P02. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Y. Jin: "Highly Sensitive Fiber-optic Profiling System" International Conference of Optical Fiber Sensors. 24. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Yukiko Ohsawa: "Stationary Solution of Nonlinear Propagation of Femtosecond Optical Pulse by Circuit Model" J. Phys. Soc. of Japan. Vol.61. 3977-3983 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Yoichi Fujii: "Laser Microscope" J. IECE. Vol.74. 503-505 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] T. Yamauchi: "Quantum wires with strain effect: Tight-binding analysis" Surf. Sci.Vol.267. 291-295 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 加藤 考利: "光ファイバリング共振器を用いた多点温度センサ" 電子情報通信学会春季大会. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] Masao Ozaki: "CHARACTERISTICS OF DIFFERENTIAL HETERODYNE LASER MICROSCOPE" THE INTERNATIONAL CONFERENCE ON CONFOCAL MICROSCOPY & 3D IMAGE PROCESSING. P02. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] Yoichi Fujii: "OPTIMUM TRANSMISSION OF SOLITON" International Soliton Symposium in Kyoto. (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] T.Yamauchi: "Quantum wires with strain effect:Tight-binding analysis" Surf.Sci.267. 291-295 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Yukio Ohsawa: "Stationary Solution of Nonlinear Propagation of Femtosecond Optical Pulse by Circuit Model" Journal of The Physical Society of Japan. 61. 3977-3983 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 尾崎 政男: "レーザ顕微鏡" オプトロニクス. 159-163 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 尾崎 政男 藤井 陽一: "レ-ザ顕微鏡" 電子情報通信学会. 74. 503-505 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Y.JIN,Y.FUJII: "Highly Sensitive Fiber-optic Profiling System" International Conference on Optical Fibre Sensors. 24- (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Yorgzhe.Jin,Hanzhang.Diug,Yoichi.Fujii: "First-order properties of radial gradient leuses with spherical ends" MOC'91 YOKOHAMA. 178-181 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 尾崎 政男 藤井 陽一: "2個の光電子増倍管を用いたヘテロダインレ-ザ顕微鏡" レ-ザ顕微鏡研究会第8回講演会. 42-47 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] M.Ozaki,T.Kato,Y.Fujii: "Differential Heterodyne Laser Microscope" OITDA Second International Foum New Trends on Scanning Optical Microscopy. 9-13. 27- (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] 藤井 陽一,尾崎 政男: "レ-ザ顕微鏡" オプトロニクス. 1. 159-163 (1992)

    • Related Report
      1991 Annual Research Report

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Published: 1991-04-01   Modified: 2016-04-21  

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