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A New Measurement Method of Thickness of a Thin Film

Research Project

Project/Area Number 03650098
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionNiigata University

Principal Investigator

ICHIMIYA Ryoichi  Faculty of Engineering.Professor, 工学部, 教授 (10035595)

Co-Investigator(Kenkyū-buntansha) KAGA Toshihiro  Faculty of Engineering.Assistant Professor, 工学部, 助教授 (20018477)
Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1992: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1991: ¥1,400,000 (Direct Cost: ¥1,400,000)
KeywordsFilm / Measurement / Thickness / Frequency / Sound / Resonance / 音響信号 / 共鳴周波数 / 厚さ測定 / 非接触測定
Research Abstract

Sound generated from a speaker through a signal generator travels to a thin film which in spread on a rigid container with an air-layer. Resonant sound generates in an air-layer of the container. Resonant frequency of sound depends on the thickness of the thin film and air-layer. Resonant sound in introduced to the FFT though the microphone, and resonant frequency is analyzed. A new measuring method of the thickness of a thin film by using the sound frequency is presented. Experimental equipment was set up to measure the thickness of the thin film. Experiments were conducted for polyethylene and vinyl chloride films. Following conclusion were obtained.
(1) Good correspondence between the resonant frequency and thickness of the film was obtained. It was made clear that thickness of the film can be measured from the resonant frequency.
(2) The measurement frequency increases with the decrease of the distance between the speaker and film, thickness of air-layer and thickness of the film.
(3) The variation of the resonant frequency caused by the variation of thin film is big in case that the height of the speaker and thickness of the air-layer are small.
(4) Relationship between the thickness of the film and the resonant. frequency describes a curved line with the decrease of the height of the speaker and thickness of the air-layer.

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (36 results)

All Other

All Publications (36 results)

  • [Publications] 一宮 亮一: "音響インテンシティ法を利用した隙間の音響特性に関する研究" 日本機械学会論文集C編536号. 57. 338 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 一宮 亮一: "音響信号を利用した管の長さ測定(管内空気柱の共振周波数検出)" 日本機械学会論文集C編539号. 57. 2217-2222 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 一宮 亮一: "音響信号を利用した体積測定の研究(スピーカ音源と音響周波数による体積の測定)" 日本機械学会論文集C編541号. 57. 2888-2893 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 柳本 憲作: "円板状工具から放射される風切音に関する研究(風切音に及ぼすスリットの傾き角の影響)" 日本機械学会論文集C編547号. 58. 945-950 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Shuichi SAKAMOTO: "A New Method of Measuring Displacement by means of Variation of Sound Frequency and the Length of Air Column in a Small Pipe.(A Resonant Method using Speaker and Flectric Feedback Loop)" JSME International Journal,SeriesIIINo.1. 35. 9-13 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 山田 正直: "音響信号を利用した円筒軸計の計測(反響による位相遅れ量の拡大)" 日本機械学会論文集C編553号. 58. 2680-2685 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 山田 正直: "音響信号を利用した円筒軸計の計測(平面波の位相遅れによる計測)" 日本機械学会論文集C編554号. 58. 3024-3028 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 坂本 秀一: "管内空気柱の音響周波数変化を利用した変位の精密測定(電気音響式非接触変位センサ)" 日本機械学会論文集C編555号. 58. 3259-3264 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 鈴木 祐治: "水中における音響信号を利用した変位の精密測定(音響周波数と変位の関係)" 日本機械学会論文集C編558号. 59. 587-592 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 坂本 秀一: "音響を利用したシートの枚数検出法" 日本機械学会論文集C編559号. 59. 819-826 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 一宮亮一: "機械系の音響工学" コロナ社, 188 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Ryoichi ICHIMIYA: "Analysis of Acoustic Characteristics of Aperture Using the Acoustic Intensity Measuring Method" Trans of JSME Series C (Japanese). Vol.57 No.536. 334-338 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Ryoichi ICHIMIYA: "A New Method of Measuring Length of Pipe by Means of Sound Signals (Detecting Resonant Frequency of Air Column in Pipe)" Trans of JSME Series C (Japanese). Vol.57 No.539. 2217-2222 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Ryoichi ICHIMIYA: "Study of Volume Measurement using Sound Signal (Measurement of Volumu using a Speaker as Sound Source and Sound Frequency)" Trans of JSME Series C (Japanese). Vol.57 No.541. 2888-2893 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Kensaku YANAGIMOTO: "Aerodynamic Noise Radiation from a Circular Cutting Tool (Influence of an Attack Angle of a Slit Tooth on Aerodynamic Noise)" Trans of JSME Series C (Japanese). Vol.58 No.547. 945-950 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Shuichi SAKAMOTO: "A New Method of Measuring Displacement by means of Variation of Sound Frequency and the Length of Air Column in a Small Pipe. (A Resonant Method using Speaker" JSME International Journal, Series III. Vol.35 No.1. 9-13 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Shuichi SAKAMOTO: "A New Method of Measuring Displacement by means of Variation of Sound Frequency and the Length of Air Column in a Small Pipe. (A Resonant Method using Speaker" JSME International Journal, Series III. Vol.35 No.1. 9-13 (1992)"and Electric Feedback Loop)"

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Masanao YAMADA: "Measurement of Cylinder Diameter by means of Sound Signal (Increase of Sound Phase Delay by Echo)" Trans of JSME Series C (Japanese). Vol.58 No.553. 2680-2685 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Masanao YAMADA: "Measurement of Cylinder Diameter by means of Sound Signal (Measurement by Phase Delay of Plane Waves)" Trans of JSME Series C (Japanese). Vol.58 No.554. 3024-3028 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Shuichi SAKAMOTO: "New Displacement Measuring Method Using Variations in Sound Frequency of Air Column in a Small Pipe (Electric Acoustic Noncontact Displacement Sensor)" Trans of JSME Series C (Japanese). Vol.58 No.555. 3259-3264 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Yuji SUZUKI: "A New Measuring Method of Underwater Displacement by Utilizing Sound Signal (Experimental Relation between Sound Frequency and Displacement)" Trans of JSME Series C (Japanese). Vol.59 No.558. 587-592 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Shuichi SAKAMOTO: "Detecting Method of Number of Sheets by Using Sound" Trans of JSME Series C (Japanese). Vol.59 No.559. 819-826 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 一宮 亮一: "音響インテンシティ法を利用した隙間の音響特性に関する研究" 日本機械学会論文集C編 536号. 57. 334-338 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] 一宮 亮一: "音響信号を利用した管の長さ測定(管内空気柱の共振周波数検出)" 日本機械学会論文集C編 539号. 57. 2217-2222 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] 一宮 亮一: "音響信号を利用した体積測定の研究(スピーカ音源と音響周波数による体積の測定)" 日本機械学会論文集C編 541号. 57. 2888-2893 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] 柳本 憲作: "円板状工具から放射される風切音に関する研究(風切音の及ぼすスリットの傾き角の影響)" 日本機械学会論文集C編 547号. 58. 945-950 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Shuichi SAKAMOTO: "A New Method of Measuring Displacement by means of Variation of Sound Frequency and the Length of Air Column in a Small Pipe.(A Resonant Method using Speaker and Electric Feedback Loop)" JSME International Journal,Series III No.1. 35. 9-13 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 山田 正直: "音響信号を利用した円筒軸計の計測(反響による位相遅れ量の拡大)" 日本機械学会論文集C編 553号. 58. 2680-2685 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 山田 正直: "音響信号を利用した円筒軸計の計測(平面波の位相遅れによる計測)" 日本機械学会論文集C編 554号. 58. 3024-3028 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 坂本 秀一: "管内空気柱の音響周波数変化を利用した変位の精密測定(電気音響式非接触変位センサ)" 日本機械学会論文集C編 555号. 58. 3259-3264 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 鈴木 祐治: "水中における音響信号を利用した変位の精密測定(音響周波数と変位の関係)" 日本機械学会論文集C編 558号. 59. 587-592 (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 坂本 秀一: "音響を利用したシートの枚数検出法" 日本機械学会論文集C編 559号. 59. 819-826 (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 一宮 亮一: "機械系の音響工学" コロナ社, 188 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 一宮 亮一: "音響インテンシティ法を利用した間隙の音響特性に関する研究" 日本機械学会総文集. 57. 1408-1412 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 一宮 亮一: "音響信号を利用した体積測定の研究(スピ-カ音源と音響周波数による体積の測定)" 日本機械学会論文集. 57. 2888-2893 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 一宮 亮一: "音響信号を利用した管の長さ測定(管内空気柱の共振周波数検出)" 日本機械学会論文集. 57. 2217-2222 (1991)

    • Related Report
      1991 Annual Research Report

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Published: 1991-04-01   Modified: 2016-04-21  

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