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Study on Ion Beam Machining of Diamond Knives for Ultra-Microtomes

Research Project

Project/Area Number 03650114
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionScience University of Tokyo

Principal Investigator

MIYAMOTO Iwao  Science University of Tokyo,Department of Applied Electronics, Associate Professor, 基礎工学部, 助教授 (10084477)

Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1992: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1991: ¥1,300,000 (Direct Cost: ¥1,300,000)
KeywordsDiamond Knife / Ion beam machining / Radiation Damage / Atomic force microscope / Reactive ion beam machining / Microtome / Tip radius / 損傷 / ミクロト-ム / イオンビ-ム加工 / 生物試料 / 切刃稜丸み半径 / 濡れ性
Research Abstract

Diamond knives pre-finished by mechanical lapping can be sharpen with Ar ion beams of 1.0 kev at the normal ion incidence. however, effects of the thin radiation damage layer of the knives on cutting performance and life of the knives have not been investigated. Therefore, crystallinity of the diamond specimens bombarded with Ar ions is examined utilizing an AFM (atomic force microscope). Moreover, the tip radius of quadrangular and triangular pyramidal diamond probes sharpened with ion beams is examined because of the difficulty of measurering the cutting edge sharpness of the diamond knives. Machining characteristics and surface integrity of the diamond specimens processed with oxgen ion beams was also investigated. From the experiments, conclusion are summarized as follows :
(1) Tip radius of the quadrangular and triangular pyramidal proves can be predicted with simple equations.
(2) Surface integrity of the diamond specimens processed with 1.0 keV argon and oxygen ions depends on crystal faces because of the difference of the initial surface integrity and scratched parts on the diamond specimens is machined faster than the other parts.
(3) Diamond specimen can be machined faster with oxygen ion beams than with argon ion beams.

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] 宮本 岩男ほか: "半導体ダイヤモンドのイオンビーム加工ーピラミッド型STM用探針の作製ー" 1992年度精密工学会春季大会学術講演会講演論文集. 965-966 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 宮本 岩男ほか: "STM用三角錐型ダイヤモンド探針のイオンビーム加工" 1992年度精密工学会秋季大会学術講演会講演論文集. 383-384 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I.Miyamoto et al.: "Ion Beam Machining of Quadrangular Pyramidal Diamond Probes for Nano-Indentation Using a Scanning Tunneling Microscope" 第1回イオン工学会大会論文集. 169-172 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 宮本 岩男: "ダイヤモンドの微細加工の現状と将来" 超精密(精密工学会超精密加工専門委員会編). 2. 109-118 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I.Miyamoto: "Ion Beam sharpening of Quadrangular and Triangular Pyramidal Indenters or Probes" ASPE/JSPE合同学術講演会. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Iwao Miyamoto et al.: "Ion Beam Machining of Semiconductor Diamond Probes" Proc. of the 1992 Spring Meeting of Japan Society of Precision Engineering. 1992-3. 965-966

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Iwao Miyamoto et al.: "Ion Beam Machining of Triangular Pyramidal Probes" Proc. of the 1992 Autumn Meeting of Japan Society of Precision Engineering. 1992-10. 383-384

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] I.Miyamoto et al.: "Ion Beam Machining Quadrangular Pyramidal Probes" Proc. of the First Meeting on The Ion Engineering Society of Japan. 1992-6. 169-172

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Iwao Miyamoto: "Trend and Future of Fine-machining of Diamond" Ultra-precision Machining (JSPE). 2. 109-118 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Iwao Miyamoto et al.: "Ion Beam Sharpening of Quadrangular and Triangular Pyramidal Indenters or Probes" ASPE 8th Annual Meeting (1993-11) in Seattle, U.S.A.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 宮本 岩男 ほか: "半導体ダイヤモンドのイオンビーム加工 -ピラミッド型STM用探針の作製-" 1992年度 精密工学会 春季大会学術講演会 講演論文集. 965-966 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 宮本 岩男 ほか: "STM用三角錐型ダイヤモンド探針のイオンビーム加工" 1992年度 精密工学会秋季大会学術講演会 講演論文集. 383-384 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] I. Miyamoto et al.: "Ion Beam Machining of Quadrangular Pyramidal Diamond Probes for Nano-Indentation Using a Scanning Tunneling Microscope" 第1回 イオン工学会大会論文集. 169-172 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 宮本 岩男: "ダイヤモンドの微細加工の現状と将来" 超精密(精密工学会超精密加工専問委員会編). 2. 109-118 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 宮本 岩男: "走査型プロ-ブ顕微鏡について" 細胞. 23. 553-557 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 宮本 岩男: "ダイヤモンドの微細加工の現状と採来" 超精密. 2. (1992)

    • Related Report
      1991 Annual Research Report

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Published: 1991-04-01   Modified: 2016-04-21  

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