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"Fundamental Research on Amorphous Silicon Photosensor with Internal Multiplication Function"

Research Project

Project/Area Number 03650325
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 電子機器工学
Research InstitutionOsaka University

Principal Investigator

OKAMOTO Hiroaki  Osaka University, Faculty of Engineering Science, Associate Professor, 基礎工学部, 助教授 (90144443)

Co-Investigator(Kenkyū-buntansha) HATTORI Kiminori  Osaka University, Faculty of Engineering Science, Research Associate, 基礎工学部, 助手 (80228486)
Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1992: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1991: ¥2,000,000 (Direct Cost: ¥2,000,000)
KeywordsAmorphous Silicon / High-gain Photosensor / Photocurrent Multiplication / 高感度光センサー / 高感度光センサ- / アモルファス半導体ヘテロ接合
Research Abstract

Photocurrent multiplication has been observed in a hydrogenated amorphous silicon-based p-i/a- SiN/i-n multi ayered heterojunction under a reverse biased condition. A systematic investigation on the photocurrent characteristics in this junction system has been carried out, including photocurrent-voltage characteristics, light intensity and operation temperature dependences, spectral dependence and transient response characteristics. It has been found from the analysis of the results that multiplication arises from the interband tunneling injection of valence band "electron" through the a-SiN barrier layer. The photocurrent multiplication process is modeled to be comprised of three key elemental processes occurring sequentially in time: (a) accumulation of holes at the a-SiN/a-Si heterojunction interface, (b) field redistribution over the heterojunction, and (c) interband tunneling of carriers via the localized states in the a-SiN layer's energy gap. The device modeling on the basis of the experimental data permits us to design the device structure for achieving better device performances. By an optimization of device structure, an external quantum efficiency exceeding 70 with a response time as fast as 500 mus has been obtained under the operation voltage of 30V in the heterojunction photodiode provided with a-SiN (thickness of 40nm with optical energy gap 2.1 eV) at the p a-SiC/i a-Si interface. The proposed highly sensitive photomultiplier device would have a wide variety of application fields such as a solid-state imager for high-definitive television, and so on.

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] 吉見 雅士: "Tuuneling Assisted Photocurrent Multiplicatim in a-si based p-i/S:Nx/i-n structure junctim" MRS Symposium Proceeding. 192. 453-458 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 吉見 雅士: "Observation ob Tunreling Assisted Photocurrent Multiplicatim in a-s:N/a-s: Heterojurction" J.Nm-Cryst.Solids. 137&138. 1283-1286 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 吉見 雅士: "Photocurrent Multiplication in Hytrogenated Amorphous Silican Basis p-i-n Junction Iuserted an a-S:N Layer" J.Appl.phys.72. 3186-3193 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Masashi Yoshimi: "Tunneling Assisted Photocurrent Multiplication in a-Si Based p-i/SiN/i-n Structure Junction" Mat. Res. Soc. Symp. Proc. 192. 453-458 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Masashi Yoshimi: "Observation of Tunneling Assisted Photocurrent Multiplication in a-SiN/a-Si Heterojunction" J. Non-Cryst. Solids. 137&138. 1283-1286 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Masashi Yoshimi: "Photocurrent Multiplication in Hydrogenated Amorphous Silicon Based p-i-n Junction with an a-SiN:H Layer" J. Appl. Phys. 72. 3186-3193 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 吉見 雅士: "Tumeling Assisted Photocurient Multiplication in a S:based p-i/s:Nx/i-n structure Junction" MRS Symposium Proceeding. 192. 453-458 (1990)

    • Related Report
      1992 Annual Research Report
  • [Publications] 吉見 雅士: "Obsercation of Tunneling Assisted Photocumeut Multiplication in a-siN/a-si Heterojunction" J.Nn-Cryst.Solids. 137-138. 1283-1286 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] 吉見 雅士: "Phto current Multiplication in Hydrogeuated Amorphous Silicon Basis p-i-n Junction Interted an a-s:N Layer" J.Appl.phys.72. 3186-3193 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 吉見 雅士: "Tunneling Assisted Photocurrent Multiplication in aーSi based Pーi/SiNx/iーn Structure Junction" MRs Symposium Proceeding. 192. 453-458 (1990)

    • Related Report
      1991 Annual Research Report
  • [Publications] 吉見 雅士: "Observation of Tunneling Assisted Photocurrent Multiplication in aーSiN/aーSi Hetero junction" J.NonーCryst.Solids. B7&138. 1283-1286 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 吉見 雅士: "Photocurrent Multiplication in Hydrogenated Amorphous Silicon Basis Pーiーn Junction Inserted on aーSiNiH Layer" J.Appl.Phys.

    • Related Report
      1991 Annual Research Report

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Published: 1991-04-01   Modified: 2016-04-21  

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