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Formation of High Corrosion Resistant Artificial Passivation Films by LP-MOCVD

Research Project

Project/Area Number 03650565
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 金属材料(含表面処理・腐食防食)
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

HARA Nobuyoshi  Tohoku University, Engineering, Associate Professor, 工学部, 助教授 (40111257)

Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1992: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1991: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsChemical vapor deposition / MOCVD / Artificial passivation film / Corrosion resistance / Ellipsometry / Composite oxide film / エリプソメトリ-
Research Abstract

Single oxide films of Al_2O_3, TiO_2, Ta_2O_5, ZrO_2 and SiO_2, and composite oxide Films of Fe_2O_3-Cr_2O_3-NiO and Ta_2O_5-ZrO_2 have been formed on Pt substrates by metal organic chemical vapor deposition (MOCVD) technique. The corrosion resistance of these films were examined in 5M-HCl and 5M-NaOH by the measurement of film thickness using ellipsometry and the chemical analysis of test solutions using inductively-coupled plasma-emission spectroscopy.
It was found that the corrosion resistance of the single oxide films increased in the following order: Al_2O_3<TiO_2<SiO_2<ZrO_2<Ta_2O_5 in 5M-HCl, and Al_2O_3<SiO_2<TiO_2<Ta_2O_5<ZrO_2 in 5M-NaOH. Composite oxide films of Ta_2O_5-ZrO_2 having cationic mass fraction of Ta^<5+> ions between 0.3 and 0.5 showed the highest corrosion resistance against both the HCl and NaOH solutions. The dissolution rate of Fe_2O_3-Cr_2O_3 composite films in 5M-HCl decreased exponentially with an increase in the cationic mass fraction of Cr^<3+> ions, X_<cr>, of the films. The same type of changes in the dissolution rate with X_<cr> was also observed for the NiO-Cr_2O_3 composite films. On the other hand, the addition of NiO to Fe_2O_3-Cr_2O_3 composite films containing adequate amount of Cr_2O_3 did not bring an effective improvement in corrosion resistance. The corrosion resistance of SiO_2-coated SUS304 stainless steels increased with increasing thickness and formation temperature of the SiO_2 films.

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] Katsuhisa SUGIMOTO: "Corrosion Resistance of Artificial Passivation Films of Fe_2O_3-Cr_2O_3-NiO Formed by MOCVD" Journal of the Electrochemical Society. 140. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] 吉川 周仁: "TEOS-O_3系CVDによるSUS304ステンレス鋼上へのSiO_2防食被覆の形成" 材料と環境. 42. (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Katsuhisa Sugimoto,: "Mashahiro Seto, Shigeaki Tanaka, and Nobuyoshi Hara, "Corrosion Resistance of Artificial Passivation Films of Fe_2O_3-Cr_2O_3-NiO Formed by MOCVD"" Journal of the Electrochemical Society,. Vol.140. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] Shuji Kikkawa: "Tetsu Go, Nobuyoshi Hara, and Katsuhisa Sugimoto "Formation of SiO_2 Protective Coating on SUS304 Stainless Steel by Chemical Vapor DEposition Using TEOS-O_3 Gas System"" Zairyou-To-Kankyo (Corrosion Engineering). Vol.42, No.5. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary

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Published: 1991-04-01   Modified: 2016-04-21  

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