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Analysis of epilayr structures by high-resolution X-ray methods

Research Project

Project/Area Number 04044066
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research InstitutionTokyo Institute of Technology

Principal Investigator

HASHIZUME Hiroo  Tokyo Institute of Technology, Res.Lab.Eng.Mater., 工業材料研究所, 教授 (10011123)

Co-Investigator(Kenkyū-buntansha) NIKULIN A.Yu  メルボルン大学, 物理学科, 研究員
DAVIS T.R.  オーストラリア国立科学産業研究機構, 研究員
STEVENSON Andrew  CSIRO,Div.of Mater. Sci.& Tech., 主任研究員
WILLEINS S.W  オーストラリア国立科学産業研究機構, 主任研究員
SAKATA Osami  Tokyo Institute of Technology, Res.Lab.Eng.Mater., 工業材料研究所, 助手 (40215629)
OHSUMI Kazumaso  National Lab.for High-Energy Physics, Photon Factory, 高エネルギー物理学研究所, 教授 (70011715)
WILKINS Steve  CSIRO,Div.of Mater. Sci.& Tech.
NIKULIN Andrei  University of Melbourne, School of Physics
DAVIS Timothy  CSIRO,Div.of Mater. Sci.& Tech.
WILKINS S.W.  オーストラリア国立科学産業研究機構, 主任研究員
TIMOTHY R Da  CSIRO, Division of Materials Science & Te, Research S
ANDREW W Ste  CSIRO, Division of Materials Science & Te, Research S
STEPHEN W Wi  CSIRO, Division of Materials Science & Te, Senivr Pri
尾嶋 正治  日本電信電話株式会社, 機能材料研究所, 主幹研究員
佐々木 聰  東京工業大学, 工業材料研究所, 助教授 (10162364)
Project Period (FY) 1992 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥5,300,000 (Direct Cost: ¥5,300,000)
Fiscal Year 1994: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 1993: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1992: ¥1,800,000 (Direct Cost: ¥1,800,000)
KeywordsSynchrotron radiation / X-ray diffractometry / phase retrieval / lattice distortion / ion implantation / multilayr / X-ray imaging / 位相コントラスト / 高分解能X線回折 / 3結晶回折計 / エピタキシャル結晶 / 薄膜構造解析 / 表面・界面構造 / X線光学 / サブミクロン結晶 / 白色X線回析 / エピタキシャルHgCdTe結晶 / すれすれ入射 / ラウエ回析 / 近表面構造欠陥
Research Abstract

Two-dimensional lattice distortions in ion-implanted silicon crystals have been mapped out with spatial resolutions of 0.016 and 0.265 mum in the depth and lateral directions respectively using synchrotron X-ray diffractometry data. Intensity profiles along the crystal-truncation-rods associated with the fundamental 111 Bragg reflections and satellite reflections were measured and phase information was retrieved using the Petrashen-Chukhovskii algorithm for each reflection. Two equally plausible maps have been obtained by determining the relative phases of the satellite reflections with a sequential trial method and a local energy-minimum method.
X-ray phase-contrast images of voids and glass fibers in a polymer matrix has been obtained using both a monolithic 3-reflection asymmetric channel-cut monochromator and analyzer with 1.54-* X-rays. The mechanism of contrast formation in the images of voids and glass fibers are discussed in detail and numerical simulations of the images are found to agree with the experiments.

Report

(3 results)
  • 1994 Final Research Report Summary
  • 1993 Annual Research Report
  • 1992 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] A.Nikulin,A.Stevenson,H.Hashizume,S.Wilkins,D.Cookson,G.Foran,R.Garrett: "High-resolution trigle-crystal X-ray diffraction experiments performed at ANBF" J.Applied Crystallography. 28. 57-60 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Nikulin,T.Gueyev.A.Stevenson,S.Wilkins,H.Hashizume,D.Cookson: "High-resolution mapping of two-dimensional lattice distortions in ion-implanted crystals" J.Applied Crystallography. (投稿中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] C.Carvalho,H.Hashizume,O.Yokota,O.Sakata,A.Stevenson,I.Robinson: "Application of the maximum-entropy method to the calculation of electron densities of the Si(111)7×7 surface" Report of RLEM,T.I.T.20. 53-64 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Davis,D,Gao,T.Goureev,A.Stevenson,S.Wilkins: "Phase-contrast imaging of weakly absorbing materials using hard X-rays" Nature. (投稿中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] D.Gao,T.Davis,S.Wilkins: "X-ray phase-contrast imaging study of voids and fibers in a polymer matrix" Australian J.of Physics. (投稿中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.Yasuami,T.Takase,K.Ohsumi: "Characterization of polycrystalline Al and Cu metal films sputtered on SiO_2/Si substrate" Applied Physics Letters. 65. 55-57 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Nikulin, A.Stevenson, H.hashizume, S.Wilkins etal.: "High-resolution triple-crystal X-ray diffraction experiments performea at ANBF" J.Applied Crystallography. 28. 57-60 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] A.Nikulin, T.Gureyev, A.Stevenson, S.Wilkins, H.Hashizume, D.Cookson: "High-resolution mapping of two -dimensional lattice distortions in ion-implanted crystals" J.Applied Crystallography. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] C.Carvalho, H.hashizume, O.Yokota, O.Sakata, A.Stevenson, I.Robinson: "Application of the maximum-entropy method to the calculation of electron densities of the Si(III)7*7 surface" Report of RLEM,T.I.T. 20. 53-64 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Davis, D.Gao, T.Goureev, A.Stevenson, S.Wilkins: "Phase-contrast imaging of weakly absorbing materials using hard X-rays" Nature. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] D.Gao, T.Davis, S.Wilkins: "X-ray Phase-contrast imaging study of voids and fibers in a polymer matrix" Australian J.of Physics. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] S.yasuami, T.takase, K.Ohsumi: "characterization of polycrystalline Al and Cu metal films sputtered on SiO_2lSi substrate" Applied Physics Letters. 65. 55-57 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] O.Sakata,H.Hashizume and H,Kurashina: "In-plane structure of arsenic deposited or the Si(111)surface studied with the grazing angle X-ray standing-wave methods" Physical Review B.48. 11408-11411 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Nakanishi,H.Hashizume,T.Terashima,Y.Bando,O.Michikami,S.Maeyama & M.Oshima: "Structure of the growth interface of Y-Ba-Cu-O analogs on SrTiO_3(001)substrates" Physical Review B.48. 10524-10529 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Kataoka,K.Suda,N.Ishizawa,F.Marumo,Y.Shimizugawa and K.Ohsumi: "Determination of the c/a ratio of a submicrometer-sized crystal of tetragonal barium titanate by the synclntron radiation" Journal of the Ceramic Society of Japan.102. 213-216 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Nogami,K.Ogasawara,S.Takeuchi,T.Ishiguro,K.Ohsumi and Y.Shimizugawa: "High resolntion X-ray study on anamolous diffraction peak shift in dimerized Lagmuir-Blodgett Superlattice films" J.physical Society of Japan. 62. 3114-3126 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] A.W.Stevenson: "X-ray Integrated Intensities from Scmiconductor Substrates and Epitaxic Layers-a Comparison of Kinematical and Dynamical Theories with Experiment" Acta Cryst. A49. 174-183 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] D.Gao,A.W.Stevenson,S.W.Wilkins,G.N.Pain: "Microcracks in a GaAs/Si wafer Studied by X-ray Diffraction" J.Cryst.Growth. 129. 134-142 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.NIWA: "Structure of fluoride/GaAs(111)heteroepitaxial interfaces" Sunface Science. 282. 342-356 (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] O.SAKATA: "X-ray evalnation of micro roughness of mechanochemieally polished silicon sunfaces" Jpn.J.Appl.Plrys.(1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] M.SUGIYAMA: "Sunface and inter face structares of S-passivated GaAs(111)studied by soft X-ray starding waves" Appl.Plrys.hett.60. 3247-3249 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] K.OHSUMI: "Characterizatirr" Rev.Sci.Instrum.63. 1181-1184 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] T.J.Davis: "A stochastic model for X-ray diffraction form inper fect cystols" Acta Cryst.A. A48. 872-879 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] D.Gao: "Nean-sunface micro structural charactevizatim by extreme asymmetric Bragg oeflection topograply" J.Appl.plys.(1993)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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