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Characterization of and detection of defects in semiconductor crystals by infrared light scattering tomography

Research Project

Project/Area Number 04402018
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field Applied materials
Research InstitutionDepartment of Physics, Gakushuin University

Principal Investigator

OGAWA Tomoya  Gakushuin Univ., Dept.of Phys., Professor, 理学部, 教授 (50080437)

Co-Investigator(Kenkyū-buntansha) MA Minya  Gakushuin Univ., Dept.of Phys., Guest Researcher, 理学部, 客員研究員 (60255263)
NARAOKA Kiyoiki  Gakushuin Univ., Dept.of Phys., Guest Researcher, 理学部, 客員研究員
OYAMA Yasunao  Gakushuin Univ., Dept.of Phys., Assistant, 理学部, 助手 (20265573)
坂井 一文  学習院大学, 理学部, 助手 (40205703)
Project Period (FY) 1992 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥17,400,000 (Direct Cost: ¥17,400,000)
Fiscal Year 1994: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1993: ¥5,600,000 (Direct Cost: ¥5,600,000)
Fiscal Year 1992: ¥10,300,000 (Direct Cost: ¥10,300,000)
Keywordssemiconductors / silicon wafers / GaAs single crystal / ZnSe single crystal / tomography (LST) / lattice defects / dislocation / EL2 center / シリコン・ウエハ- / 赤外線 / イントリンシック・ゲッタリング / Light Scattering / Defects in Crystals / Semiconductors / Characterization / 赤外線散乱 / Brewster角照明 / 半導体ウエハー / 非破壊検査 / 非接触検査 / 結晶欠陥
Research Abstract

Defects in crystals, such as dislocations, stacking faults, segregated impurities and interstitial atoms, will induce scattered light with disordered phases according to their disordered positions, because all atoms radiate from their dipoles generated by illumination of a laser beam.
Since electrical characteristics of GaAs crystals is strongly dependent upon EL2 centers, their density and distribution must be controlled and adjusted for opto-electric and high electron mobility devices, where infrared light scattering tomography (IR-LST) is very useful for these processing because the centers are clearly observed by IR-LST.Dispersions of the absorption and scattering due to EL2 centers are caused by resonance of electrons trapped in the EL2 centers.
Since ZnSe crystal is one of the most promising candidates for blue lasers, detection of defects in and characterization of the crystals are successfully done by LST and Raman scattering tomography (RST). Here, a new habit of dislocations wa … More s observed by LST : many dislocations were piled up within thin layrs on (111) planes of the crystals, which are called "DISLOCATION WALLS".
Density and distribution of intrinsic gettering (IG) centers and quality of denuded zones in Cz-Si wafers are very important for planar devices on wafer surfaces because a sigle crystalline layr is epitaaxially grown on the denuded zone, which is, therefore, the most important key factors.
The defects located just under a mirror polished surface are very harmful for the epitaxial growth, even if they were very tiny and few. Here we have developed an inside total reflection (ITR) method to clearly and accurately detect the defects and interstitial oxygen atoms there, because only the light scattered by the defects and interstitial atoms can pass through the mirror surface since this light impinges ontothe surface with angles smaller than the total reflection angle while the total reflection prevents the main part of the laser beam from passing through. Less

Report

(4 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • 1992 Annual Research Report
  • Research Products

    (36 results)

All Other

All Publications (36 results)

  • [Publications] 小川智哉: "Piled up dislocations in vapour phase grown ZnSe crystals" Philosophical Magazine. (in press). (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 小川智哉: "Defects in β-BaB203(BBO)crystals observed by laser scanning tomography" J.Crystal Growth. 141. 393-398 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 小川智哉: "Effect of human blood addition on dendritic growth of cupric chloride crystals in aqueous solutions" J.Crystal Growth. 142. 147-155 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 小川智哉: "Characterization of GdBa2Cu307 superconducting thin films by a new optical interference fringe method" J.Materials Science. 29. 3702-3704 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 小川智哉: "Crystal perfection and detection of defects just under wafer surfaces of semiconducting and insulating materials" Institute of Physics,Conference Series. 135. 127-130 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 小川智哉: "Characterization of interface and surface structures by ultra-thin film interference fringes" Institute of Physics,Conference Series. 135. 267-270 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 小川智哉: "Materials and Process Characterization for VLSI '94" Asia-Pacific Microanalysis Association, 583 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ma & Ogawa: "Piled-up dislocation in a vapor phase grown ZnSe crystals observed by light scattering tomography" Phil. Mag.(in press). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ogawa: "Detection of defects near a wafer surface by Brewster angle illumination" "Materials and Process Characterization for VLSI,1994" ed. by X.F.Zong, M.K.Balaz & J.J.Wang, Asia-Pacific Microanalysis Association, Shanghai, China. 34-38 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Shibata & Ogawa: "Effect of human blood addition on dendritic growth of cupric chloride crystals in aqueous solutions" J.Crystal Growth. 142. 147-155 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Mai & Ogawa: "Characterization of GdBa2Cu307 superconducting thin films by a new optical interference fringe method" J.Materials Science. 29. 3702-3704 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Tan & Ogawa: "Defects in beta-BBO (beta barium borate) crystals observed by laser scanningtomography" J.Crystal Growth. 141. 393-398 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Nango & Ogawa: "Crystal perfection and detection of defects just under wafer surfaces of semiconducting and insulating materials" Inst. Phys. Conf.Ser.No.135. 127-130 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Lu & Ogawa: "Characterization of interface and surface structures by ultra-thin film interference fringes" Inst. Phys. Conf. Ser.No.135. 267-270 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Lu & Ogawa: "Effect of surface structure upon ultra-thin interference fringes" J.Materials Research. 8. 2315-2318 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ogawa: "Characterization of dielectric crystals by light scattering tomography" Ferroelectronics. 142. 19-29 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ogawa: "Light scattering tomography to evaluate and characterize crystals" "From Galileo's OCCHIALINO to Optoelectronics" ed. by P.Mazzoldi World Science, Singapore. 578-585 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ataka & Ogawa: "Nucleation and growth of oxide precopitates in CZ-Si wafers" J.Materials Research. 8. 2889-2892 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Ogawa: "Optical characterization of silicon wafers for ULSI" Materials Sci. & Eng.B20. 172-174 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Sakai & Ogawa: "A study on IR light intensities scattered from defects in an In-doped LEC GaAs crystalsas functions of wavelength and intensity of bias light superposed on the defects." Jpn. J.Appl. Phys.31. 2945-2948 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Sakai, Kondo & Ogawa: "Raman scattering tomography studies on semiconductors" Semicond. Sci. Technol.7. A279-A282 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 小川智哉: "Effect of surface structures upon ulta-thin interference fringes" J. Materials Reearch. 8. 2315-2318 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小川智哉: "Characterization of dielectric crystals by light scattering tomography" Ferroelectronics. 142. 19-29 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小川智哉: "Nucleation and growth of oxide precopitates in CZ-Si wafers" J.Materials Research. 8. 2889-2892 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小川智哉: "A phenomenological study on crystal growth from aqueous solution" Progress in Crystal Growth and Characterization of Materials. 25. 51-101 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小川智哉: "Optical characterization of silicon wafers for ULSI" Materials Science & Engineering B. 20. 172-174 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小川智哉: "Characterization of extremely thin epitaxial layers and films by new interference fringes" J.Materials Research. 7. 2182-2185 (1992)

    • Related Report
      1993 Annual Research Report
  • [Publications] 小川智哉 編著: "朝倉書店" 結晶評価技術ハンドブック. 1092 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Sakai et al and T.OGAWA: "IR light intensities scattered from defects in an In-doped LEC GaAs crystals as functions of wave length and intensesy of bias light superposed on the defects" Japanese J.Applied Pgysics. 31. 2945-2948 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Lu Taijin et al and T.OGAWA: "characterization of extremrly thin epitaxial layers and films by new interference fringes" Journal of Materials Research. 7. 2182-2185 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Li Lian et al and T.OGAWA: "In situ observation of subcritical crystalline particles and their behavior on growthg of KDP crystals from aqueous solution by light scattering technique" Journal of Materials Research. 12. 3275-3279 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] T.OGAWA et al: "Opsical characterization of Si wafers" Materials Science and Engineering. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] T.OGAWA: "A pghenomenological study on crystal growrh from aqueous solutions" Progress in Crystal Growth and Cgharacterization of Materials. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 陸太 進他,小川 智哉: "超薄膜干渉縞およびそれによる半導体薄膜の評価" レーザー科学. 14. 70-73 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 小川 智哉,編集主任分担執筆: "結晶評価技術ハンドブック" 朝倉書店, (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 小川 智哉,分担執筆: "結晶成長ハンドブック" 共立出版社, (1993)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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