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Development of Deposition System of Size-Controlled Clusters

Research Project

Project/Area Number 04402020
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 応用物理学一般(含航海学)
Research InstitutionNagoya Institute of Technology

Principal Investigator

OKUYAMA Fumio  Nagoya inst.Technol., Dept.Technol., Professor, 工学部, 教授 (30024235)

Co-Investigator(Kenkyū-buntansha) TANEMURA Masaki  Nagoya Inst.Technol., Dept.Technol., Lecturer, 工学部, 講師 (30236715)
Shigetomo  Nagoya Inst.Technol., Dept.Technol., Associate Professor, 工学部, 助教授 (60006153)
Project Period (FY) 1992 – 1993
Project Status Completed (Fiscal Year 1993)
Budget Amount *help
¥15,800,000 (Direct Cost: ¥15,800,000)
Fiscal Year 1993: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1992: ¥14,700,000 (Direct Cost: ¥14,700,000)
KeywordsCluster / New Material / Mass Spectrometry / Thin Film
Research Abstract

The aim of this study was to construct a deposition system of mass-selected metal clusters. The results obtained are summarized as floows.
1) Construction of cluster-deposition system
The cluster-deposition system schematically shown in Fig. 1 was constructed. The system is comprised of field ion source, cluster-beam source, quadrupole mass spectrometer, ion detection system and differential pumping system. The entire system is made of stainless stell, thus being bakable.
2) Field Ion Mass spectrometry of Li and Zn clusters
The prerequisite for depositing mass-selected metal clusters is to detect their field ions. Field ion mass spectrometry was therefore attempted for Li and Zn clusters, using the system constructed. The key results were as foolows. 1) Li_3, which is thought to be forbidden cluster, was confirmed to be involved in Li cluster vapors. 2) The intensity distribution of Zn_2 did not reflect the relative abundance of Zn isotopes, suggesting a selectivity of isotope combination in dimer formmation.
3) Deposition of Zn dimer films
Zn dimers were successfully deposit on epoxy films. Zn film was amorphous, and thus differed structually from monomer Zn films which usually possess a poly- or monocrystalline structure. Mass-selected cluster deposition is thus expected to provide metal films with novel structure.

Report

(2 results)
  • 1993 Annual Research Report   Final Research Report Summary
  • Research Products

    (3 results)

All Other

All Publications (3 results)

  • [Publications] H.Hoshino,M.Tanemura and F.Okuyama: "A new mass spectromtery system for analyzing metal cluster beams" Rev.Sci.Instruments. (to be published).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] "A New mass spectrometery system for anlyzing metal cluster beams" Rev.Sci.Instrum.to be published. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Hoshino,M.Tanemura and F.Okuyama: "A new mass spectromtery system for analyzing metal cluster beams" Rev.Sci.Instruments. (to be published).

    • Related Report
      1993 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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