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Development of Soft-X-Ray Multilayrs and Novel Multilayr Optics

Research Project

Project/Area Number 04452099
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 物理計測・光学
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

YAMAMOTO Masaki  Res. Inst. Sci. Meas., Tohoku University, Associate Professor, 科学計測研究所, 助教授 (00137887)

Co-Investigator(Kenkyū-buntansha) YANAGIHARA Mihiri  Res. Inst. Sci. Meas., Tohoku University, Associate Professor, 科学計測研究所, 助教授 (40174552)
Project Period (FY) 1992 – 1993
Project Status Completed (Fiscal Year 1993)
Budget Amount *help
¥6,800,000 (Direct Cost: ¥6,800,000)
Fiscal Year 1993: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 1992: ¥5,000,000 (Direct Cost: ¥5,000,000)
KeywordsSoft-X-Ray / Multilayr / Ultra-thin Film / Optical Constants / Soft-X-Ray Polarizer / Soft-X-Ray Phase Shifter / Transmission Multilayr / Soft-X-Ray Ellipsometry
Research Abstract

Aim of this project is to develop soft-x-ray multilayrs of short period thickness of less than 6nm and also to develop novel multilayr optics, with fundamental study of growth process.
We have established the reflectance vs. angle of incidence method and collected optical contants of C, Mo, Ru, Rh, W, Pt, Au, BK7 glass, and fused silica at several photon energies between 60 to 900eV.Correlation between reflectance and special frequency spectrum of surface roughness was olso studied.
In-situ, ellipsometry was found useful for growth phase study including roughness smoothing and compound formation at boundaries.
Multilayrs of Ru/B4C and Mo/B4C of 4.70 to 5.34nm period, fabricated by magnetron sputtering, were found to have 16 to 18% reflectance at 45゚ angle of incidence with 167.3 to 186.2eV soft-x-ray.
By soft-x-ray ellipsometry, realized with high performance polarizers of >98% polarizance and phase shifters developped, relative amplitude attenuation Rp/Rs=tanPSIexp(iDELTA) of a thin Mo layr was measured for the first time.

Report

(3 results)
  • 1993 Annual Research Report   Final Research Report Summary
  • 1992 Annual Research Report
  • Research Products

    (62 results)

All Other

All Publications (62 results)

  • [Publications] M.Yanagihara: "Thickness Dependence of the Optical Constants of Thin Pt,Au,and Rh Films in the Soft-X-Ray Region" Proc.Soc.Photo-Opt.Instr.Eng.1720. 246-251 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 柳原美廣: "超薄膜の軟X線光学定数" 東北大学科学計測研究所報告. 41. 1-26 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Nomura: "Soft-X-Ray Reflectance of Mo/Si Multilayer Polarizers" Photon Factory Activity Report. 10. 289 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] J.B.Kortright: "Soft x-ray (97eV) phase retardation using transmission multilayers" Appl.Phys.Lett.60. 2963-2965 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Nomura: "Design,fabrication,and polarization of soft-x-ray transmission multilayers" Proc.Soc.Photo-Opt.Instr.Eng.1720. 395-401 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Polarization Study of Soft-X-Ray Transmission Multilayers" Photon Factory Activity Report. 10. 287 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "In-situ Performance Tests of Soft-X-Ray Multilayer Mirrors Exposed to Synchrotron Radiation from a Bending Magnet" Appl.Opt.31. 972-976 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Stability Tests for Soft X-Ray Multilayers under Exposure to Multipole-Wiggler Radiation" Proc.Soc.Photo-Opt.Instr.Eng.1739. 621-627 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Calorimetric Measurements of Power Distribution in Multiple-Wiggler Radiation" Proc.Soc.Photo-Opt.Instr.Eng.1739. 282-287 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Power Density of Multiple-Wiggler Radiation Measured by Photocalorimetrie Method" Proc.Sino-Japan Symposium on Eng.Opt.176-179 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Y.Goto: "Soft-X-Ray Reflectance of Short Period Ni/C Multilayer Mirrors" Photon Factory Activity Report. 10. 288 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Performance of a Wideband Multilayer Polarizer for Soft X-Rays" Rev.Sci.Instrum.63. 1516-1518 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Soft-x-ray polarization measurement with a laboratory reflectometer" Proc.Soc.Photo-Opt.Instr.Eng.1720. 390-394 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "X-Ray/EUV Multilayer Optics" Proc.Sino-Japan Symposium on Eng.Opt.166-171 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 柳原美廣: "軟X線多層膜反射鏡" 大学・高専・公設試験研究機関の研究情報. 2. 24-25 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 山本正樹: "軟X線用多層膜の形成とその利用" 応用物理. 62. 676-682 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Maehara: "Optical constants of very thin Pt and Rh films determined from soft-x-ray reflectance and photoelectric yield measurements" Nucl.Instrum.Meth.Phys.Res.B74. 362-367 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Sasaki: "Soft X-Ray Scattering due to the Surface Roughness within the Range of the Coherence Length" Photon Factory Activity Report. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "In situ ellipsometry of soft X-ray multilayer fabrication" Thin Solid Films. 233. 268-271 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Polarimetry with use of soft x-ray multilayers" Proc.Soc.Photo-Opt.Instrum.Eng.2010. 152-159 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Kimura: "Polarization characteristics of synchrotron radiation by means of rotating-analyzer ellipsometry using soft x-ray multilayer" Proc.Soc.Photo-Opt.Instrum.Eng.2010. 37-44 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Development and use of soft-x-ray multilayer polarizing elements" Opt.Soc.Amer.Technical Digest Series. (印刷中). (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] J.Cao: "Simultaneous determination of the optical constants and thickness of very thin films using soft-x-ray reflectance measurements" Appl.Opt.,Optical Technol.(印刷中). (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Soft x-ray Reflectance and Surface Roughness of Vapor Deposited Thin Films" Opt.Soc.Amer.Technical Digest Series. (印刷中). (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Thickness Dependence of the Optical Constants of Thin Pt, Au, and Rh Films in the Soft-X-Tay Region" Proc. Soc. Photo-Opt. Instr. Eng.1720. 246-251 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Soft-X-Ray optical constants measured with ultra-thin layr samples (in Japanese)" Bull. Res. Inst. Sci. Meas., Tohoku Univ.41. 1-26 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Nomura: "Soft-X-Ray Reflectance of Mo/Si Multilayr Polarizers" Photon Factory Activity Report. #10. 289 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] J.B.Kortright: "Soft x-ray(97eV) phase retardation using transmission multilayrs" Appl. Phys. Lett.60. 2963-2965 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Nomura: "Design, fabricartion, and polarization of soft-x-ray transmission multilayrs" Proc. Soc. Photo-Opt. Instr. Eng.1720. 395-401 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Polarization Study of Soft-X-Ray Transmission Multilayrs" Photon Factory activity Report. #10. 287 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "In situ Performance Tests of Soft-X-Ray Multilayr MirrorsExposed to Synchrotron Radiation from a Bending Magnet" Appl. Opt.31. 972-976 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Stability Tests for Soft X-Ray Multilayrs under Exposure to Multipole-Wiggler Radiation" Proc. Soc. Photo-Opt. Instr. Eng.1739. 621-627 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Calorimetric Measurements of Power Distribution in Multipole-Wiggler Radiation" Proc. Soc. Photo-Opt. Instr. Eng.1739. 282-287 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Power Density of Mutipole-Wiggler Radiation Measured by Photocalorimetric Method" Proceedings of the Sino-Japan Symposium on Engineering Optics. 176-179 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Y.Goto: "Soft-X-Ray Reflectance of Short Period Ni/C Multilayr Mirrors" Photon Factory Activity Report. #10. 288 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Performance of a Wideband Multilayr Polarizer for Soft X Rays" Rev. Sci. Instrum.63. 1516-1518 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Soft-x-ray polarization measurement with a laboratory reflectometer" Proc. Soc. Photo-Opt. Instr. Eng.1720. 390-394 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "X-Ray/EUV Multilayr Optics" Proc. Sino-Japan Sym. Eng. Opt., Beijin, China. 166-171 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Fabrication and use of soft-x-ray multilayrs (in Japanese)" OYOBUTSURI. 62. 676-682 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Maehara: "Optical constants of very thin Pt and Rh films determined from soft-X-ray reflectance and photoelectric yield measurements" Nucl. Instrum. Meth. Phy. Res.B74. 362-367 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Sasaki: "Soft X-Ray Scattering due to the Surface Roughness within the Range of the Coherence Length" to appear in Photon Factory Activity Report. #11. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "In situ ellipsometry of soft X-ray multilayr fabrication" Thin Solid Films. 233. 268-271 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Polarimetry with use of soft x-ray multilayrs" Proc. Soc. Photo-Opt. Instr. Eng.2010. 152-159 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Kimura: "Polarization characteristics of synchrotron radiation by mean of rotating-analyzer ellipsometry using soft x-ray multilayr" Proc. Soc. Photo-Opt. Instr. Eng.2010. 7-44 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yamamoto: "Development and use of soft-x-ray multilayr polarizing elements" OSA Technical Digest Series. in print. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] J.Cao: "Simultaneous determination of the optical constants and thickness of very thin films using soft-x-ray refrectance measurements" Appl. Opt., Optical Technol.in print. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Yanagihara: "Soft X-ray Reflectance and Surface Roughness of Vaper Deposited Thin Films" OSA Technical Digest Series. in print. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 山本正樹: "軟X線用多層膜の形成とその利用" 応用物理. 62. 676-682 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Maehara: "Optical constants of very thin Pt and Rhfilms determined from soft-x-ray reflectance and photoelectric yield measurements" Nucl.Instrum.Meth.Phy.Res.B74. 362-367 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Sasaki: "Soft X-Ray Scattering due to the Surface Roughness within the Range of the Coherence Length" Photon Factory Activity Report. (印刷中).

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Yamamoto: "In-situ ellipsometry of soft X-ray multilayer fabrication" Thin Solid Films. 233. 268-271 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Yamamoto: "Polarimetry with use of soft x-ray multilayers" Proc.Soc.Photo-Opt.Instr.Eng.2010. 152-159 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Kimura: "Polarization characteristics of synchrotron radiation by means of rotating-analyzer ellipsometry using soft x-ray multilayer" Proc.Soc.Photo-Opt.Instr.Eng.2010. 37-44 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Yamamoto: "Development and use of soft-x-ray multilayer polarizing elements" Opt.Soc.Amer.Tech.Digest Ser.(印刷中). (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] J.Cao: "Simultaneous determination of the optical constants and thickness of very thin films using soft-x-ray reflectance measurements" Appl.Opt.,Optical Technol.(印刷中). (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Yanagihara: "Soft X-ray Reflectance and Surface Roughness of Vapor Deposited Thin Films" Opt.Soc.Amer.Tech.Digest Ser.(印刷中). (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Yamamoto: "Soft-x-ray polanzation measure ment with a Labaratory reflectometer" Proc.Soc.Photo-optical Instr.Engineers. 1720. 390-394 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] M.Yanagihara: "Thickness dependence of the optical eonstants of thin Pt,Ak and Rh films in the soft-x-ray region" Proc.Soc.Photo-Dptical Instr-Engineers. 1720. 246-251 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] M.Yamamoto: "X-ray/EUV multilayer Optics" Proc.Sino-Japan Symposium on Engineening Optics25-28 Oct.1992,Beijing,P.R.China. 166-171 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] M.Yanagihara: "Power Density of Multipole-Wiggler Radiation Measured by Photocalorimetric Method" Proc.Sino-Japan Symposium on Engineeving Optics 25-28 Oct.1992,Beijing,P,R.China. 176-179 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] T.Maehara: "Optical Constants of very thin Pt and Rh films determined from soft-x-ray reflectance and Photoelecrtric yield measurements" Nucl.Instrum.Meth.B. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] M.Yamamoto: "In-situ ellipsometry of soft-x-ray multilayer fabrication" Thin Solid Films. (1993)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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