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Study on development of cluster ion implantation system for LSI

Research Project

Project/Area Number 04555003
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Applied materials
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

YAMADA Isao  Kyoto Univ., Ion Beam Eng.Exp.Lab., Professor, 工学部, 教授 (00026048)

Co-Investigator(Kenkyū-buntansha) MATSUDA Kouji  Nissin Elec.Co.Manager, 生産技術研究開発部, 主幹
YAMANISHI Kenichirou  Mitsubishi Elec.Corp.Group Manager, 生産技術センター, グループマネージャー
TOMODA Toshimasa  Mitsubishi Elec.Corp.Manager, 生産技術センター, 部長
MATSUO Jirou  Kyoto Univ., Research Assoc., 工学部, 助手 (40263123)
TAKAOKA Gikan  Kyoto Univ., Assoc.Prof., 工学部, 助教授 (90135525)
松永 幸二  日新電機株式会社, 研究開発本部, 課長
Project Period (FY) 1992 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥14,300,000 (Direct Cost: ¥14,300,000)
Fiscal Year 1994: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1993: ¥5,200,000 (Direct Cost: ¥5,200,000)
Fiscal Year 1992: ¥6,800,000 (Direct Cost: ¥6,800,000)
Keywordsgas cluster / high density irradiation effect / low energy ion beam / lateral sputtering / ion implantation / surface cleaning / film formation / LSI / イオンビーム / クラスターイオン / ラテラルスパッタ効果 / 多体衝突効果 / クラスターイオン注入 / クラスターイオンビーム技術 / ラバルノズル / フリージェットノズル / スパッタ / 高密度照射 / 極浅接合形成
Research Abstract

We have developed gas cluster ion implantation apparatus, which has a high potential for (a) shallow implantaiton, (b) very flat surface formation, (c) low damage surface cleaning, (d) high rate sputtering and (e) formation of better quality thin film.
The effects of energetic Ar and CO_2 cluster on solid surfaces have been studied for different energies and sizes of cluster. The damaged layr by cluster ion irradiation was very small in comparison with the monomer ion irradiation, which is due to comparatively low energy of constituent atom of the cluster. In addition, the sputtering yield from metal, semiconductor and insulator films, using gas cluster ion, was larger by a few tens to hundreds times than that for the case of monomer ion because of the effect of high energy density irradiation. A very flat surface was obtained after irradiation of gas cluster, which indicates lateral sputtering at the surface.It was also possible to achieve the shallow implantation by adjusting the energy and size of cluster ion.Furthermore, computer simulation showed that when energetic cluster hit a solid surface, multiple collisions between cluster constituent atoms occurred and many unusual effects were observed.

Report

(4 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • 1992 Annual Research Report
  • Research Products

    (67 results)

All Other

All Publications (67 results)

  • [Publications] G.H.Takaoka: "Irradiation Effects of Ar-Cluster Ion Beams on Si Surfaces" Materials Research Society Symposium Proceedings. 316. 1005-1010 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Z.Insepov: "Molecular Dynamics Simulation of the Effects of Energetic Cluster Ion Impact on Solid Surface" Materials Reserch Society Symposium Proceedings. 316. 999-1004 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Fukushima: "Low Temperature Epitaxial Growth of TiO_2 Rutile Films by ICB Deposition and Mechanical Properties in Helium Implanted Rutile Films" Materials Research Society Symposium Proceedings. 316. 905-910 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] P.R.Besser: "Mechanical Behavior of Single Crystal Al(111) and Bicrystal Al(110) Films on Silicon Substrates" Materials Research Society Symposium Proceedings. 343. 659-664 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] G.H.Takaoka: "Ionized Cluster Beam Techniques for Film Formation" Proceeding of Advanced Materials '93, IV/Laser and Ion Beam Modification of Materials. 17. 125-131 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Fukushima: "Low Temperature Growth of Epitaxial and Highly Oriented TiO_2 Rutile Films by ICB" Proceeding of Advanced Materials '93, IV/Laser and Ion Beam Modification of Materials. 17. 271-274 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Akedo: "Epitaxial Growth of Metal-Insulator-Metal Structures on Si(111) Substrates" Proceedings of Advanced Materials '93, IV/Laser and Ion Beam Modification of Materials. 17. 247-250 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] N.Sakuma: "Epitaxial Al Films Grown on Heavily Doped Si(100) Surfaces by ICB Methods for Fabricating ULSI Contacts" Proceedings of Advanced Materials '93, IV/Laser and Ion Beam Modification of Materials. 17. 255-258 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Yamawaki: "STM Observations of the Initial Growth Processes of Metal Thin Film" Proceedings of Advanced Materials '93, IV/Laser and Ion Beam Modification of Materials. 17. 263-266 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] D.Takeuchi: "Characteristics of Polyimide Prepared by Ion Beam Assisted Vapor Deposition" Proceedings of Advanced Materials '93, IV/Laser and Ion Beam Modification of Materials. 17. 251-254 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] M.Ishii: "Irradiation Effects of Gas-Cluster Ar Ion Beams on Solid Surfaces" Proceedings of Advanced Materials '93, IV/Laser and Ion Beam Modification of Materials. 17. 119-122 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: "Ionized Cluster Beam Technique ; A New Process for Deposition, Sputtering and Implantation" Abstracts of 7th International Symposium on Small Particles and Inorganic Clusters. 96 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] C.Ascheron: "Cluster Ion Bombardment-Induced Defect Production in Singlecrystalline Semiconductor Materials" Abstracts of 7th International Sumposium on Small Particles and Inorganic Clusters. 281 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.Matsuo: "Sputtering with Gas Cluster Ion Beam" Abstracts of 7th International Symposium on Small Particles and Inorganic Clusters. 282 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Z.Insepov: "Molegular Dynamics Simulation of Cluster Ion Beam Process" Abstracts of 7th International Symposium on Small Particles and Inorganic Clusters. 283 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: "Cluster Ion Beam Processing of Materials" Abstracts of International Conference on Ion Implantation Technology '94. (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: "Gas Cluster Ion Beam Equipment" Abstracts of International Conference on Ion Implantation Technology '94. (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: "Ionized Cluster Beam Technology : Present and Future" Proceedings of 13th International Conference on the Application of Accelerators in Research & Industry. (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Yamaguchi: "Sputtering Effects of Gas Cluster Ion Beams on Solid Surfaces" Proceedings of 13th International Conference on the Application of Accelerators in Research & Industry. (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: "Nano-Space Laboratory and Materials Development" Extended Abstracts of 3rd Asia-Pacific Workshop on Intelligent Materials & 4th Sumposium on Intelligent Materials. 112-114 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] G.H.Takaoka: "Irradiation Effects of Ar-Cluster ion Beams on Si Surfaces" Mat.Res.Soc.Symp.Proc.316. 1005-1010 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Z.Insepov: "Molecular Dynamics simulation of the Effects of Energetic Cluster Ion Impact on Solid Surface" Mat.Res.Soc.Symp.Proc.316. 999-1004 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Fukushima: "Low Temperature EpitaXial Growth of TiO_2 Rutile Films by ICB Deposition and Mechanical Properties in Helium Implanted Rutile Films" Mat.Res.Soc.Symp.Proc.316. 905-910 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] P.R.Besser: "Mechanical Behavior of Single Crystal Al (111) and Bicrystal Al (110) Films on Silicon Substrates" Mat.Res.Soc.Symp.Proc.343. 659-664 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] G.H.Takaoka: "Ionized Cluster Beam Techniques for Film Formation" Proc.Adv.Mat.'93, IV/Laser and Ion Beam Mod.Mat.17. 125-131 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Fukushima: "Low Temperature Growth of Epitaxial and Highly Oriented TiO_2 Rutile Films by ICB" Proc.Adv.Mat.'93, IV/Laser and Ion Beam Mod.Mat.17. 271-274 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] K.Akedo: "Epitaxial Growth of Metal-Insulator-Metal Structures on Si (111) Substrates" Proc.Adv.Mat.'93, IV/Laser and Ion Beam Mod.Mat.17. 247-250 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] N.Sakuma: "Epitaxial Al Films Grown on Heavily Doped Si (100) Surfaces by ICB Methods for Fabricating ULSI Contacts" Proc.Adv.Mat.'93, IV/Laser and Ion Beam Mod.Mat.17. 255-258 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Yamawaki: "STM Observations of the Initial Growth Processes of Metal Thin Film" Proc.Adv.Mat.'93, IV/Laser and Ion Beam Mod.Mat.17. 263-266 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] D.Takeuchi: "Characteristics of Polyimide Prepared by Ion Beam Assisted Vapor Deposition" Proc.Adv.Mat.'93, IV/Laser and Ion Beam Mod.Mat.17. 251-254 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] M.Ishii: "Irradiation Effects of Gas-Cluster Ar Ion Beams on Solid Surfaces" Proc.Adv.Mat.'93, IV/Laser and Ion Beam Mod.Mat.17. 119-122 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: ""Ionized Cluster Beam Technique : A New Process for Deposition, Sputtering and Implantation"" Abstracts of ISSPIC. 7. 96 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] C.Ascheron: ""Cluster Ion Bombardment-Induced Defect Production in Snglecrystalline Semiconductor Materials"" Abstracts of ISSPIC. 7. 281 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] J.Matsuo: ""Sputtering with Gas Cluster Ion Beam"" Abstracts of ISSPIC. 7. 282 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Z.Insepov: ""Molecular Dynamics Simulation of Cluster Ion Beam Process"" Abstracts of ISSPIC. 7. 283 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: ""Cluster Ion Beam Processing of Materials"" Abstracts of IIT'94. O-2.4. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: ""Gas Cluster Ion Beam Equipment"" Abstracts of IIT'94. P-2.25. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: ""Ionized Cluster Beam Technology : Present and Future"" Proc.13th Int.Conf.on Appli.of Accel.in Res.and Industry. (to be published). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] T.Yamaguchi: ""Sputtering Effects of Gas Cluster Ion Beams on Solid Surfaces"" Proc.13th Int.Conf.on Appli.of Accel.in Res.and Industry. (to be published). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: ""Nano-Space Laboratory and Materials Development"" Abstracts of 3rd Asia-Pacific Workshop & 4th Symp.on Intelligent Materials. 112-114 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] I.Yamada: "Irradiation Effects of Ar-Cluster Ion Beams on Si Surfaces" Materials Research Society Symposium Proceedings. 316. 1005-1010 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Molecular Dynamics Simulation of the Effects of Energetic Cluster Ion Impact on Solid Surface" Materials Research Society Symposium Proceedings. 316. 999-1004 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Low Temperature Epitaxial Growth of TiO_2 Rutile Films by ICB Deposition and Mechanical Properties in Helium Implanted" Materials Research Society Symposium Proceedings. 316. 905-910 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Mechanical Behavior of Single Crystal Al(III)and Bicrystal Al(llO)Films on Silicon Substrates" Materials Research Society Symposium Proceedings. 343. 659-664 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Ionized Cluster Beam Techniques for Film Formation" Proceeding of Advanced Materials'93,IV/Laser and Ion Beam Modification of Materials. 17. 125-131 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Low Temperature Growth of Epitaxial and Highly Oriented TiO_2 Rutile Films by ICB" Proceeding of Advanced Materials'93,IV/Laser and Ton Beam Modification of Materials. 17. 271-274 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Epitaxial Growth of Metal-Insulator-Metal Structures on Si(lll)Substrates" Proceeding of Advanced Materials'93,IV/Laser and Ion Beam Modification of Materials. 17. 247-250 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Epitaxial Al Films Grown on Heavily Doped Si(lOO)Surfaces by ICB Methods for Fabricating ULSI Contacts" Proceeding of Advanced Materials'93,IV/Laser and Ion Beam Modification of Materials. 17. 255-258 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "STM Observations of the Initial Growth Processes of Metal Thin Film" Proceeding of Advanced Materials'93,IV/Laser and Ion Beam Modification of Matorials. 17. 263-266 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Characteristics of Polyimide Prepared by Ion Beam Assisted Vapor Deposition" Proceeding of Advanced Materials'93,IV/Laser and Ion Beam Modification of Matorials. 17. 251-254 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada: "Irradiation Effects of Gas-Cluster Ar Ion Beams on Solid Surfaces" Proceeding of Advanced Materials'93,IV/Laser and Ion Beam Modification of Materials. 17. 119-122 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] I.Yamada,W.L.Brown,J.A.Northby and M.Sosnowski: "Surface Modification with Gas Cluster Ion Beams" Nuclear Instruments and Methods in Physics Research. B37. 223-226 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] I.Yamada,G.H.Takaoka,M.Current,Y.Yamashita: "Irradiation Effects of Gas-Cluster CO_2 Ion Beams on Si" Nuclear Instruments and Methods in Physics Research. B74. 341-346 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] I.Yamada and G.H.Takaoka: "Ionized Cluster Beams:Physics and Technology" Japanese Journal of Applied Physics. 32. 2121-2141 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Fukushima,G.H.Takaoka and I.Yamada: "Epitaxial Growth of TiO_2 Rutile Thin Films on Sapphire Substrates by a Reactive Ionized Cluster Beam Method" Japanese Journal of Applied Physics. 32. 3561-3565 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Z.Insepov and I.Yamada: "Molecular-Dynamics Simulation of Metal Surface Sputtering by Energetic Rare-Gas Cluster Impact" Proceedings of 3rd International Union of Materials Research Society International Conference. (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Ishii,G.Sugahara,M.Kumagai,G.H.Takaoka,J.Northby and I.Yamada: "Irradiation Effects of Gas-Cluster Ar Ion Beams on Solid Surfaces" Proceedings of 3rd International Union of Materials Research Society International Conference. (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] I.Yamada: "Irradiation Effects of Gas-Cluster CO_2 Ion Beams on Si" To be Published in Nuclear Instruments and Methods. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] J.A.Northby: "A Method and Apparatus for Surface Modification by Gas-Cluster Ion Impact" To be published in Nuclear Instruments and Methods. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] I.Yamada: "Surface Modification and Other Advanced Ion Beam Processing Projects Japan" Surface and Coatings Technology. 51. 514-521 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] I.Yamada: "Novel Paths for Nucleation and Growth of Thin Films by Ionized Cluster Beam (ICB)Techniques:Atomic-Scale Observation" Materials Research Society Symposim Proceedings. 235. 597-607 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] S.Wada: "Epitaxial Al(110)Films Grown on Heavily-Doped Si(100) by Cluster Beam Deposition" Materials Research Society Symposium Proceedings. 235. 621-626 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] G.H.Takaoka: "Surface Modification of Bio-Active Ceramic(Artificial Bone)by Ion Implantation" Materials Research Society Symposium Proceedings. 252. 23-28 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] I.Yamada: "Advanced Ion Beam Material Processing Projects in Japan" Materials Research Society Symposium Proceedings. 268. 261-272 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] G.H.Takaoka: "Surface and Interface Properties of Copper Phthalocyanine Multilayer Structure Prepared by ICB Method" Proceedings of the First Meeting on the Ion Engineering Society of Japan. 251-254 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Y.Yamashita: "Irradiation Effects of a Mass Analyzed Gas Cluster Ion Beam on Silicon Substrates" Proceedings of the First Meeting on the Ion Engineering Society of Japan. 247-250 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] I.Yamada: "Physics and Chemistry:From Clusters to Crystals" Kluwer Academic Publishers, (1992)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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