| Project/Area Number |
04555030
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
材料力学
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| Research Institution | RITSUMEIKAN UNIVERSITY |
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Principal Investigator |
OHNAMI Masateru Ritsumeikan University, Faculty of Sci.& Eng., Professor, 理工学部, 教授 (60066587)
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| Co-Investigator(Kenkyū-buntansha) |
YOSHIDA Toshihiro Hitachi Ltd., Storage System Works, Senior Engineer, ストレージシステム事業部, 副参事
KAWAI Sueo Hitachi, Ltd., Semiconductor Development Center, Manager, 半導体開発センタ, 部長
SAKANE Masao Ritsumeikan University, Faculty of Sci.& Eng., Associate Professor, 理工学部, 助教授 (20111130)
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| Project Period (FY) |
1992 – 1993
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| Project Status |
Completed (Fiscal Year 1993)
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| Budget Amount *help |
¥9,600,000 (Direct Cost: ¥9,600,000)
Fiscal Year 1993: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1992: ¥7,700,000 (Direct Cost: ¥7,700,000)
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| Keywords | Electric device / Thin film / Elastic modulus / Young's modulus / Bending test / Eigen frequency / マイクロデバイス / 組合せばり |
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| Research Abstract |
For measuring the Young's modulus of thin films, a high resolution three-points bending machine and a high resolution resonance measuring machine were developed. These machines could measure the Young's modulus with three order accuracy, which was confirmed by preliminary tests.
1. Young's modulus of Co-Ta-Zr thin film was measured by using the three-points bending machine. The thickness of thin films was ranged from 10 micron meter to 1 micron meter. The Young's modulus of the films thicker than 3.5 micron meter was 150 GPa but that of the films thinner than 3.5 micron meter is increased with decreasing thickness. Young's modulus of 1 micron meter film in thickness is 250 GPa which is about 1.7 times of 4.5 micron meter film in thickness. The increase in Young's modulus with decreasing thickness was discussed by the energy balance of elastic strain energy and surface energy.
2. Young's modulus of Cr thin film was measured by resonance method. Young's modulus of Cr thin films is increased with decreasing film thickness as well as Co-Ta-Zr films.
4. Form the above evidence, it is concluded that the Young's modulus of thin films increases with decreasing film thickness at a critical thickness.
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