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Research on Nano-meter order Assembly System

Research Project

Project/Area Number 04555054
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械力学・制御工学
Research Institutionthe University of Tokyo

Principal Investigator

HATAMURA Yotaro  the University of Tokyo, Faculty of Engineering, Professor, 工学部, 教授 (40010863)

Co-Investigator(Kenkyū-buntansha) MITSUISHI Mamoru  the University of Tokyo, Faculty of Engineering, Associate Professor, 工学部, 助教授 (90183110)
SATO Tomomasa  the University of Tokyo, Research Center for Advanced Science and Technology, Pr, 先端科学技術研究センター, 教授 (50235371)
Project Period (FY) 1992 – 1993
Project Status Completed (Fiscal Year 1993)
Budget Amount *help
¥21,200,000 (Direct Cost: ¥21,200,000)
Fiscal Year 1993: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 1992: ¥17,400,000 (Direct Cost: ¥17,400,000)
Keywordsmicro manipulation / micro task executon robot / micro-machine assembly / micro task / manipulaor / human interface / micro teleoperation / handling system / ナノマニピュレータ / 立体電子顕微鏡 / 超微細組立作業 / 超微細作業システム / ナノマニピュレーション / 組立作業ロボット / 知能ロボット / ナノテクノロジ
Research Abstract

1.Realization of concentrated motion manipulator : Taking account of micro object handling tasks, we make clear the necessary functions of a manipulator to execute micro object handling. A new design concept of "concentrated motion manipulator" suitable for small object handling is proposed and a new manipulation system besed on the concept is designed and realized. The manipulator has 7 D.F.F.'s with nano-meter order positional accuracy. The main feature of the manipulation system is that motion of the manipulator is concentrated to the center of the field of view of a microscope to ensure task execution with visual monitoring.
2.Realization of stereo-scopic SEM (Scanning Electron Microscope) : A stereo SEM is realized to visualize 3D-image of the nano-meter scale world. In the realized SEM, a stereo image (left eye image and right eye image) as well as multi-resolutonal images (local high magnification image and global wide field of view image) can be obtained by controlling the elect … More ron beam in video rate.
3.Prevention of fatal damage by means of operation understanding function by robot : In micro task execution, the operator frequently breaks the object by mistake, becouse the object is much more smaller and weaker than the object in our macro world. To cope with this problem, we realized the fatal damage prevention function based on the robot understanding of operator behavior. This function is realized by the following steps : a)recognition ofan operator's intension, b)prediction of the task status, c)warning to the operator and guidance to escape from the fatal damage in case of dangerous prediction.
4.Realistic display of nano-meter world task execution : Force sensor attached to the tip of the manipulator hand and work table is utilized to generated the acoustic sound to let the operator know what is going on in the task execution world. This display enables the operator to recognize the status of the task execution which is quite different from that of our macro world.
5.Assembly experiment of nano-meter accuracy : Developed system components stated above (concentrated motion manipulatoe, realistic display of nano-meter world task execution, computer aided fatal damage prevention) are finally integrated to realize nano-mater accuracy task execution system. Such micro task execution of assembly of micro machines as well as the repair of micro patterns are successfully performed to probe the correctness of the developed components. Other than such micro machine assembly task of a micro air-turbine(502 micron diameter), a micro-Torii(100 micron hight), micro five storied temple tower(230 micron hight), curving of micro kokeshi(200 micron diameter Japanese doll) and folding of micro airplane (from 1 mm square aluminum foil) are also completed. Less

Report

(3 results)
  • 1993 Annual Research Report   Final Research Report Summary
  • 1992 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] Y.Hatamura: "Construction of 3-D Micro Structure by Multi-face FAB,Co-focus Rotational Robot and Various Mechanical Tools" Proc.IEEE Micro Electro Mechanical Systems. 94CH3404-1. 297-302 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Sato: "Micro Teleoperation Consentrating Visual and Force Information at Operator's Hand" Proc.of 3rd Int.Symp.on Experimental Robotics(ISER). Vol.3. 118-124 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.SATO: "Novel Manipulator for Micro Object Handling as Interface between Micro and Human World" Proc.of IEEE Int.Conf.on Intelligent Robots and Systems. Vol.3. 1674-1684 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Mitsuishi: "Development of Tele-Operated Micro-Handling/Machining System Based on Information Transformation" Proc.of IEEE Int.Conf.on Intelligent Robots and Systems. Vol.3. 1473-1478 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Morishita: "Development of Ultra Precise Manipulator System for Future Nanotechnology" Proc.of 1st IARP Workshop on Micro Robotics and Systems. Vol.1. 34-42 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.SATO: "Micro Handling Robot for Micro Machine Assembly--A Vision/Operation/Motion Cofocused Manipulation System" Proc.of 1st IARP Workshop on Micro Robotics and Systems. Vol.1. 138-148 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Y.Hatomura: "Construction of 3-D Micro Structure by Multi-face FAB, Co-focus Rotational Robot and Various Mechanical Tools" Proc.IEEE Micro Electro Mechanical Systems. 94CH3404-1. 297-302 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Sato: "Micro Teleoperation Consentrating Visual and Force Information at Operator's Hand" Proc.of 3rd Int.Symp.on Experimental Robotics(ISER). Vol.3. 118-124 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.SATO: "Novel Manipulator for Micro Object Handling as Interface between Micro and Human World" Proc.of IEEE Int.Conf.on Intelligent Robots and Systems. Vol.3. 1674-1684 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Mitsuishi: "Development of Tele-Operated Micro-Handling/Machining System Based on Information Transformation" Proc.of IEEE Int.Conf.on Intelligent Robots and Systems. Vol.3. 1473-1478 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] H.Morishita: "Development of Ultra Precise Manipulator System for Future Nanotechnology" Proc.of 1st IARP Workshop on Micro Robotics and Systems. Vol.1. 34-42 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.SATO: "Micro Handling Robot for Micro Machine Assembly -A Vision/Operation/Motion Cofocused Manipulation System" Proc.of 1st IARP Workshop on Micro Robotics and Systems. Vol.1. 138-148 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Y.Hatamura: "Construction of 3-D Micro Structure by Multi-face FAB,Co-focus Rotational Robot and Various Mechanical Tools" Proc.IEEE Micro Electro Mechanical Sysytems. 94CH3404-1. 297-302 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Sato: "Micro Teleoperation Consentrating Visual and Force Information at Operator's Hand" Proc.of 3rd Int.Symp.on Experimental Robotics(ISER). Vol.3. 118-124 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.SATO: "Novel Manipulator for Micro Object Handling as Interface between Micro and Human World" Proc.of IEEE Int.Conf.on Intelligent Robots and Sysytems. Vol.3. 1674-1684 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Mitsuishi: "Development of Tele-Operated Micro-Handling/Machining System Based on Information Transformation" Proc.of IEEE Int.Conf.on Intelligent Robots and Sysytems. Vol.3. 1473-1478 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] H.Morishita: "Development of Ultra Precise Manipulator System for Future Nanotechnology" Proc.of 1st IARP Workshop on Micro Robotics and Systems. Vol.1. 34-42 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.SATO: "Micro Handling Robot for Micro Machine Assembly--A Vision/Operation/Motion Cofocused Manipulation System" Proc.of 1st IARP Workshop on Micro Robotics and Systems. Vol.1. 138-148 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Hatamura,and T.Hanamoto: "Development of A 3-Directional Stress Cell and Measurement of Stress Distribution on a Backho Backet" J.of Terramechanics. 29-1. 117-124 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 畑村 洋太郎: "マイクロマニピュレーションと現実感" 日本機械学会誌. 95-883. 493-497 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] S.HIRAI,T.SATO,T.MATSUI: "Intelligent and Cooperative Control of Telerobot Tasks" IEEE Control Systems. 12-1. 51-56

    • Related Report
      1992 Annual Research Report
  • [Publications] M.Mitsuishi,S.Warisawa,Y.Hatamura,T.Nagao,and B.Kramer: "A User Friendly Manufacturing System for Hyper-Environment" Proc.IEEE Int.Conf.on Robotics and Automation. 25-31 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 坂根 茂幸,車 利治,小俣 透,佐藤 知正: "見え方の時系列変化を考慮した注視行動計画" 計測自動制御学会論文集. 28-9. 1111-1117 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 松下 俊夫,佐藤 知正,Tapio Heikkila: "ハンドアイシステムのための能動的な視覚計測の計画機能" 日本ロボット学会誌. 10-2. 235-243 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 畑村 洋太郎: "日刊工業新聞社" 続・実際の設計, 476 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] N.P.スー 著,畑村 洋太郎 監訳: "朝倉書店" 設計の原理, 374 (1992)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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