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Rapid Growth of Diamond Film by Combustion Plasma Coupled Inductively with Radio Frequency Power

Research Project

Project/Area Number 04555159
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 金属精錬・金属化学
Research InstitutionScience University of Tokyo

Principal Investigator

AKASHI Kazuo  Science University of Tokyo, Professor, 理工学部, 教授 (00013095)

Co-Investigator(Kenkyū-buntansha) ITO Shigeru  Science University of Tokyo, Associate Professor, 理工学部, 助教授 (10120164)
Project Period (FY) 1992 – 1993
Project Status Completed (Fiscal Year 1993)
Budget Amount *help
¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 1993: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1992: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsDiamond / Combustion Flame / Plasma / R.F.Induction / Nucleation Density / Deposition / Acetylene / 燃焼 / 高周波 / ラマン分光 / 非晶質炭素 / 堆積速度 / 膜成長
Research Abstract

It has been reported that diamond film can be deposited in the atmospheric ambient by a simple CVD technique using a combustion flame using acetyleneoxygen as starting materials. In our experiment, RF electric power was coupled with the combustion flame inductively to excite the flame as a plasma.
Mo, Cu, or Ti substrate was placed on a water-cooled copper stage under the combustion flame which was excited with RF popwer supplied through a copper workcoil. Only diamond particles was deposited on the polished mirror surface of Mo or Cu substrate, but the nucleation density and the growth rate were accelerated with RE power impression. High quality diamond film was rapidly formed on Mo substrate scratched with fine diamond particles at 400。C (at the rear side of the substrate) with 300W RF power (13.56MHz). High quality diamond film was also formed on Cu substrate at almost same condition, but at lower substrate temperatures. The quality of diamond film was deteriorated with higher frequency (27.12 MHz) or higher power impression. The growth rates of diamond particles and diamond film were accelerated by using Ti substrate carbonitrided in RF nitrogen-acetylene plasma. Accordinly, a combination of such pretreatment and RF impression to combustion flame plasma must be very effective for rapid growth of diamond on some kinds of substrates.

Report

(3 results)
  • 1993 Annual Research Report   Final Research Report Summary
  • 1992 Annual Research Report
  • Research Products

    (13 results)

All Other

All Publications (13 results)

  • [Publications] 穂積 篤,明石和夫: "高周波励起燃焼炎を利用するダイヤモンド膜の合成" DENKI KAGAKU. 60. 657-658 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 穂積 篤,明石和夫: "燃焼炎CVD法によるダイヤモンド膜の合成" 高温学会誌. 19. 229-237 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 佐藤貴康,根岸 学,明石和夫: "プラズマ浸炭窒化したチタン上でのダイヤモンド合成" 表面技術. 45. 106-107 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.Negishi,S.Narumi,T.Sato,K.Akashi: "Some effects of r.f. power impression and pretreatment of substrate on diamond CVD using a combustion flame plasma" ICRP-2/SPP-11,Japan Society of Applied Physics. 231-234 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Atsushi HOZUMI, Kazuo AKASHI: "The Synthesis of Diamond Film by Using an RF Coupled Combustion Flame Plasma" DENKI KAGAKU. 60. 657-658 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Atsushi HOZUMI, Kazuo AKASHI: "The Synthesis of Diamond Film by Using as Combustion Flame CVD" Journal of High Temperature society of Japan. 19. 229-237 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Takayasu SATO, Manabu NEGISHI, Kazuo AKASHI: "Diamond Synthesis on Plasma Carbonitrided Titanium Substrate" The Journal of Surface Finishing Society of Japan.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Manabu NEGISHI, Shinya NARUMI, Takayasu SATO, Kazuo AKASHI: "Some effects of R.F.Inpression and Pretreatment of Substrate on Diamond CVD using a Combustion Flame Plasma" ICRP-2/SPP-11, Japan Society of Applied Physics.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 穂積 篤,明石和夫: "高周波励起燃焼炎を利用するダイヤモンド膜の合成" DENKI KAGAKU. 60. 657-658 (1992)

    • Related Report
      1993 Annual Research Report
  • [Publications] 穂積 篤,明石和夫: "燃焼炎CVD法によるダイヤモンド膜の合成" 高温学会誌. 19. 229-237 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 佐藤貴康,根岸 学,明石和夫: "プラズマ浸炭窒化したチタン上でのダイヤモンド合成" 表面技術. 45. 106-107 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] M.Negishi,S.Narumi,T.sato,K.Akashi: "Some effects of r.f.power impression and pretreatment of substrate on diamond CVD using a combustion flame plamsa" ICRP-2/SPP-11,Japan Society of Applied Physics. 231-234 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 穂積 篤,明石 和夫: "高周波励起燃焼炎を利用するダイヤモンド膜の合成" 電気化学および工業物理化学. 60. 657-658 (1992)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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