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Preparation of Functionalized Semiconductor Thin Film by Laser-Induced Surface Reaction

Research Project

Project/Area Number 04555192
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 工業物理化学・複合材料
Research InstitutionThe University of Tokyo

Principal Investigator

HASHIMOTO Kazuhito  Faculty of Engineering, University of Tokyo : Associate Professor, 工学部, 助教授 (00172859)

Co-Investigator(Kenkyū-buntansha) YAMAMOTO Kyonosuke  Tsukuba Research Institute, Mitsubishi Paper Mills Limited : Chief Researcher, 筑波研究所, 主任研究員
HYODO Kenji  Tsukuba Research Institute, Mitsubishi Paper Mills Limited : Chief Researcher, 筑波研究所, 主任研究員
BABA Ryo  Faculty of Engineering, University of Tokyo : Assistant, 工学部, 助手 (70198951)
Project Period (FY) 1992 – 1993
Project Status Completed (Fiscal Year 1993)
Budget Amount *help
¥10,500,000 (Direct Cost: ¥10,500,000)
Fiscal Year 1993: ¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 1992: ¥7,700,000 (Direct Cost: ¥7,700,000)
Keywordsphoto CVD / II-VI semiconductor thin film / surface reaction / laser light / fine pattern / 超格子膜
Research Abstract

TiO_2 thin films were deposited by pulsed beam chemical vapor deposition from titanium tetraisopropoxide and H_2O vapors. Each reactant gas was introduced to a chamber alternately using commercial automobile electric fuel injectors as a beam souece. These thin films, deposited at various substrate temperatures, were characterized by optical absorption spectroscopy, X-ray diffraction and X-ray photoelectron spectroscopy. Their properties were compared with those of TiO_2 films deposited by electron beam evaporation.
Al doped and Al-In co-doped ZnS thin film electrodes were grown by electron-beam evaporation on ITO (indium-tin oxide) glass substrate, and their photoelectrochemical properties were investigated. These thin films were also characterized by optical absorption, X-ray diffraction (XRD) and X-ray photoelectron spectrum (XPS) measurements. The doping of the ZnS film with Al alone did not result in a satisfactory n-type semiconductor. For Al-In co-doped ZnS thin films prepared by the thermal diffusion of a thin In layr which was deposited previously on the ITO-glass substrate, however, the barrier resistance between ITO and ZnS was lowered, and a clear n-type semiconductor characteristic was observed. The efficiencies of both the photocurrent and photocorrosion of ZnS in an aqueous electrolyte were increased with higher Al concentration.

Report

(3 results)
  • 1993 Annual Research Report   Final Research Report Summary
  • 1992 Annual Research Report
  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] T.Amemiya: "Faradaic Charge Transfer with Double-Layer Charging and/or Adsorption-Related Chartging at Polymer-Modified Electrodes as Observed by Color Impedance Spectroscopy" J.Phys.Chem.97. 9736-9740 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Morigaki: "In-Situ Electrochemical Actinometry Using an Azo Monolayer Film" Ber.Bunsenges.Phys.Chem.97. 860-864 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] L.A.Nagahara: "Scannig Probe and Transmission Electron Microscopy Observations of Cobalt Naphthalocyanine Molecules Deposited onto a NaCl Substrate" J.Vac.Sci.Technol.A. 11. 781-785 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] L.A.Nagahara: "Effects of HF Solution in the Electroless Deposition Process on Silicon Surfaces" J.Vac.Sci.Technol.A. 11. 763-767 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] R.Baba: "Characterization of the Molecular Orientation in LB Films of Rhodamine B Derivatives by the Optical Second Harmonic Generation Coherent Interferometry" Denki Kagaku. 61. 1030-1031 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Morigaki: "Electrochemical Counting of Photon Number Using the Assembled Monolayer Film of Azo Compound" Sensors and Actuators B. 13-14. 226-229 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] O.Sato: "Self-Ordered Film of Hamicyanine Derivative Characterized by Phase-Sensitive Optical Second-Harmonic Generation" Jpn.J.Appl.Phys.32. 1201-1203 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-storing Materials.Part II.Copper-Modified Palladium Electrode" J.Electroanal.Chem.348. 459-464 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Amemiya: "Dynamics of Faradaic Processed in Polypyrrole/Poly-styrenesulfonate Composite Films in the Presence and Absence a of Redox Species in Aqueous Solutions" J.Phys.Chem.97. 4192-4195 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Amemiya: "Frequency-Resolved Faradaic Processes in Polypyrrole Films Observed by Electromodilation Techniques:Electrochemical Impedance and Color Impedance Spectroscopies" J.Phys.Chem.97. 4187-4191 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Z.F.Liu: "Direct Observation of the Secondary Structure of Unfolded Pseudomonas-Cytochrome C_<551> by Scanning Tunneling Microscopy" Surf.Sci.Lett.284. L411-L415 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-storing Materials.Part I.The Effect of Hydrogen Absorption on the Electrochemical Behavior on Palladium Electrodes" J.Electroanal.Chem.345. 445-456 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Amemiya: "Faradaic Charge Transfer with Double-Layr Charging and/or Adsorption-Related Chartging at Polymer-Modified Electrodes as Observed by Color Impedance Spectroscopy" J.Phys.Chem.97(38). 9736-9740 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Morigaki: "In-Situ Electrochemical Actinometry Using an Azo Monolayr Film" Ber.Bunsenges.Phys.Chem.97(7). 860-864

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] L.A.Nagahara: "Scanning Probe and Transmission Electron Microscopy Observations of Cobalt Naphthalocyanine Molecules Deposited onto a NaCl Substrate" J.Vac.Sci.Technol.A, 11(4). 781-785 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] L.A.Nagahara: "Effects of HF Solution in the Electroless Deposition Process on Silicon Surfaces" J.Vac.Sci.Technol.A, 11(4). 763-767 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] R.Baba: "Characterization of the Molecular Orientation in LB Films of Rhodamine B Derivatives by the Opical Second Harmonic Generation Coherent Interferometry" Denki Kagaku. 61(8). 1030-1031 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Morigaki: "Electrochemical Counting of Photon Number Using the Assembled Monolayr Film of Azo Compound" Sensors and Actuators. B, 13-14. 226-229 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] O.Sato: "Self-Ordered Film of Hamicyanine Dericative Characterized by Phase-Sensitive Optical Second-Harmonic Generation" Jpn.J.Appl.Phys.32(1), 3A. 1201-1203 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-storing Materials. Part II.Copper-Modified Palladium Electrode" J.Electroanal.Chem.348. 459-464 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Amemiya: "Dynamics of Faradaic Processed in Polypyrrole/Poly-stirenesulfonate Composite Films in the Presence and Absence of a Redox Species in Aqueous Solutions" J.Phys.Chem.97(16). 4192-4195 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Amemiya: "Frequency-Resolved Faradaic Processes in Polypyrrole Films Observed by Electromodilation Techniques : Electrochemical Impedance and Color Impedance Spectroscopies" J.Phys.Chem.97(16). 4187-4191 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Z.F.Liu: "Direct Observation of the Secondary Structure of Unfolded Pseudomonas-Cytochrome C_<551> by Scanning Tunneling Microscopy" Surf.Sci.Lett.284. L411-L415 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-storing Materials. Part I.The Effect of Hydrogen Absorptiion on the Electrochemical Behavior on Palladium Electrodes" J.Electroaanal.Chem.345. 445-456 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] T.Ameniya: "Faradic Charge Transter with Double-Layer Charging and /or Adsorption-Related Charging at Polymer-Modified Electrodes As Observed by Colar Impedance Spectroscopy" J.Phys.Chem.97. 9736-9740 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Morigaki: "In-Site Electrochemical Actinometry Using an Monolayer Film" Ber.Bensengs.Phys.Chem.97. 860-864 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] L.A.Nagahara: "Effects of HF Solution in the Electroless Deposition Process on Silicon Surfacs" J.Vac.Sci.Technol,A. 11. 763-767 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] R.Baba: "Characterization of the Molecular Orientation in LB Films of Rhodamine B Derivatives by the Optical Second Harmonic Generation Coherent Interferometry" 電気化学. 61. 1030-1031 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] L.A.Nagahara: "Scanning Probe and Transmission Electron Microscopy Observations of Cobalt Naphthalocyanine Molecules Deposited onto a NaCl Substrate" J.Vac.Sci.Technol.A. 11. 781-785 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Morigaki: "Electrochemical Counting of Photon Number Using the Assembled Monolayer Film of Azo Compound" Sensors and Actuators B. 13-14. 226-229 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] O.Sato: "Self-Ordered Film of Hemicyanine Derivative Characterized by Phase-Sensitive Optical Sccond-Harmonic Generation" Jpn.J.Appl.Phys.32. 1201-1203 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-Storing Materilas.Part II.Copper-Modified Palladium Electrode" J.Electroanal.Chem.348. 459-464 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Amemiya: "Dynamics of Faradic Procssed in Polypyrrole/Polystyrenesulfonate Composite Films in the Presence and Absence of Redox Species in Aqueou Solutions" J.Phys.Chem.97. 4192-4195 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Z.F.Liu.: "Direct Observation of the Secondary Structure of Unfolded Pseudomonas-Cytochrome C_<551> by Scanning Tunneling Microscopy" Surface Sci.Lett.284. L411-L415 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] T.Amemiya: "Frequency-Resolved Faradaic Processes in Polypyrrole Films Observed by Electromodulation Techniques:Electrochemical Impedance and Color Impedance Spectroscopies" J.Phys.Chem.97. 4187-4191 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-Storing Materials Part I.The Effect of Hydrogen Absorption on the Electrochemical Behavior on Palladium Electrodes" J.Electroanal.Chem.345. 445-456 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] J.N.Yao,B.H.Loo,: "Photochomic Response of Vacuum-Evaporated Nb_2O_5 Thin Films in Ethanol Vapor" Ber.Bunsenges.Phys.CheM.,. 96. 669-701 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] K.Patel: "Photoelectrochemical Investigations on Boron-Doped Chemically Vapour-Deposited Diamond Electrodes" J.Photochem Photobiol A:Chem.,. 65. 419-429 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] L.A.Nagahara,: "The Influence of Hydrofluoric acid Concentration on Electrodes Copper Deposition onto Sillicon" J.Electroanal.Chem. 333. 363-369 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Z.F.Li: "Difference Between the Electrochemical Reductivities of Trans and Cis Isomers of an Azo Compound in the Assembled Monolayer Film" J.Electroanal.Chem.324. 259-267 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] A.Fujishima: "Biochemical Application of Photoelectrochemistry photokillingof Malignat Cells with TiO_2 Powder" Electrochimlca Acta,. 18. 153-157 (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] H.Yanagi: "Molecubar Orientation of Vacuumdeposited Thin Films of Zincnaphthalocyanine" J.Appl.Phys.71. 5146-5153 (1993)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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