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DEVELOPMENTAL SCIENTIFIC RESEARCH ON X-RAY SPECTROSCOPIC SCATTERING TOPOGRAPHY

Research Project

Project/Area Number 04558016
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 結晶学
Research InstitutionKYUSHU INSTITUTE OF TECHNOLOGY

Principal Investigator

CHIKAURA Yoshinori  KYUSYU INSTITUTE OF TECHNOLOGY,FACULTY OF ENGINEERING,PROFESSOR, 工学部, 教授 (40016168)

Co-Investigator(Kenkyū-buntansha) SUZUKI Yoshifumi  KYUSYU INSTITUTE OF TECHNOLOGY,FACULTY OF ENGINEERING,ASSOCIATE PROFESSOR, 工学部, 助教授 (10206550)
Project Period (FY) 1992 – 1994
Project Status Completed (Fiscal Year 1994)
Budget Amount *help
¥15,700,000 (Direct Cost: ¥15,700,000)
Fiscal Year 1994: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1993: ¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 1992: ¥10,500,000 (Direct Cost: ¥10,500,000)
KeywordsX-RAY SCATTERING TOPOGRAPHY / X-RAY TOPOGRAPHY / X-RAY ORIENTATION TOPOGRAPHY / SYNCHROTRON RADIATION / X-RAY MICROBEAM / X-RAY SPECTROSCOPIC TOPOGRAPHY / マイクロビーム / スペクトロスコピックトポグラフィ / スペクトロスコピートポグラフィ / X線回折トポグラフィ / 放射光
Research Abstract

This research has two main aims ; development of X-ray scattering topography involving local spectroscopy and instrumentational research for improving the spatial resolution.
As to the first aspect, X-ray scattering topography using multichannel detectors as a position sensitive detector and a energy dispersive solid state detector is described. The system involves measuring the X-ray spectrum at each local place. The new topography system adds another dimension to X-ray scattering topography proposed by the present authors. It produces topographs constructed with certain physical quantities, such as crystal orientatin, as well as an ordinaly integrated intensity map. Included in the paper is the orientation topography for an Fe=3%Si alloy single crystal, structural observation of a human chololith and the non-destructive testing of a amorphous rubber tire. Emphasis is placed on the first proporsal of X-ray spectroscopic topography.
The second aspect of the research is instrumentations for improving spatial resolution. Although spatial resolution is the most essential factor determining the function of X-ray topography, it has not been improved in 30 years in spite of increasing requirement for highly-resolvable topography in materials science. X-ray scattering topography using a microbeam is a method capable of overcomimg this resolution problem. Becouse the maximum resolution of an apparatus using a seled-off tube is limited to 20 mum, we designed and constructed scattering topography equipment using a synchrotron radiation microbeam. In the experiment, the slit system forms the microbeam 7mum in diameter. We observed a cellulose distribution in bamboo as a testing material. When the scanning step was 2mum, we attained spatial resolution less than 5mum.

Report

(4 results)
  • 1994 Annual Research Report   Final Research Report Summary
  • 1993 Annual Research Report
  • 1992 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] 近浦吉則: "胆石の組織識別X線トポグラフ" 応用物理. 61. 843-844 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y. Suzuki, Y. Chikaura, H. Kii: "X-Ray Scattering Topographic Study of Lattice-mismatched Compound Semiconductor Heteroepitaxial Layers." J. Phys, D: Appl. Phys,. 26. 86-91 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y. Chikaura, Y. Suzuki: "X-Ray Reconstruction Topography for Observation of the Orientation Distribution in a Single Crystal," J. Appl. Cryst.26. 219-225 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y. Suzuki, Y. Chikaura, M. Imai: "Laue-Case Plane Wave Topography using Synchrotron Radiation to Reveal Microdefects in a thinned Silicon Crystal" Jpn. J. Appl. Phys.32. L958-961 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y. Chikaura, Y. Suzuki: "X-Ray Scattering Topography involving Local Spectroscopy," J. Phys. D: Appl. Phys.26. 2212-2218 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y. Chikaura, Y. Suzuki, H. Kii: "High Resolution X-Ray Scattering Topography using Synchrotron Radiation Microbeam," Jpn. J. Appl. Phys.33. L204-206 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] 近浦吉則,鈴木芳文: "半導体評価事典(2-3-4『散乱トポグラフ法』)分担" サイエンスフォーラム(株), 4 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Yosifumi Suzuki, Yoshinori Chikaur and Hideki Kii: "X-Ray Scattering Topographic Study of Lattice-mismatched Compound Semiconductor Heteroepitaxial Layrs" J.Phys.D : Appl.Phys.26. 86-91 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Yoshinori Chikaura and Yoshifumi Suzuki: "X-Ray Reconstruction Topography for Observation of the Orientation Distribution in a Single Crystal" J.Appl.Cryst.26. 219-225 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Yosifumi Suzuki, Yoshinori Chikaura, Masato Imai and Tetsuya Ishikawa: "Laue-Case Plane Wave Topography using Synchrotron Radiation to Reveal Microdefects in a thinned Silicon Crystal" Jpn.J.Appl.Phys. 32. L958-L961 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Yoshinori Chikaura, Yoshifumi Suzuki and Yoshitake Udagawa: "X-Ray Scattering Topography involving Local Spectroscopy" J.Phys.D : Appl.Phys. 26. 2212-2218 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Takeo Hondoh, Tetsuya Ishikawa, Yoshinori Chikaura, Osamu Nittono and Satosi Iida: "X-ray topography" SPring-8 Project Nol(Scientific Program 1993). 119-128 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Yoshinori Chikaura, Yosifumi Suzuki and Hideki Kii: "High Resolution X-Ray Scattering Topography using Synchrotron Radiation Microbeam, Jpn.J.Appl.Phys.33 (1994) L204-L206" Jpn.J.Appl.Phys.33. L204-L206 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1994 Final Research Report Summary
  • [Publications] Y.Chikaura,Y.Suzuki: "High Resolution X-Ray Scattening Topography using Synchrotron Radiation Microbeam" Jpn.J.Appl.Phys.33. L204-L206 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 近浦吉則ら: "理工学基礎課程 物理学実験" 東京教学社, 234 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 近浦吉則: "胆石の組織識別X線トポグラフ" 応用物理. 61. 843-844 (1992)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Suzuki Y.Chikaura: "X-Ray Scattering Topographic Study of Lattice Mis-matched Compound Semiconductor Hetjoepitaxial Layers" J.Phy.(D):Appl.Phys.26. A86-A91 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Chikaura: "X-Ray Recoustruction Topographyfor Obsevvation of the Orientation Distribution in a Single Crystal" J.Appl.Cryst.26. 219-225 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Suzuki Y.Chikaura: "Laue-Case Plane Wave Topographyusing Synchrotron Radiation to reveal Microdeseets in a Thinned Silicon Crystal" Jpn.J.Appl.Phys.32. L958-L961 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Chikaura Y.Suzuki: "X-Ray Scattering Topography involving Local Spectroscopy" J.Phys.(D):Appl.Phys.26. 2212-2218 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 鈴木芳文、近浦吉則ら: "原子物理学" 東京教学社, 151 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] Y.Ushigami,Y.Chikaura: "Dynamic Study of Secondary Recrys tallization of 3% Si-Fe by Synchrotron X-Radiatim Topography" J.Mater.Eng.13. 113-118 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] Y.Suzuki,Y.Chikaura: "X-Ray Scattering Topographic Study of Lattice=Misma tched Compound Semicmdeiotor Heteroepitaxol Layer" J.Phys(D). (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] Y.Chikaura,Y.Suzuki: "X-Ray Reconstruction Topography to Observe Orientation Distribution in a Single Crystal" J.Appl.Cryst.(1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 近浦 吉則,田中 洋介,鈴木 芳文: "理工学基礎課程の力学" 東京教学社, 148 (1992)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2019-02-28  

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