| Project/Area Number |
04650049
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
応用物理学一般(含航海学)
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| Research Institution | Osaka Electro-Communication University |
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Principal Investigator |
IKUTA Takashi Osaka Electro-Communication University Faculty of Engineering, Professor, 工学部, 教授 (20103343)
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| Co-Investigator(Kenkyū-buntansha) |
KISHIOKA Kiyoshi Osaka Electro-Communication University Faculty of Engineering, Professor, 工学部, 教授 (50109881)
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| Project Period (FY) |
1992 – 1993
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| Project Status |
Completed (Fiscal Year 1993)
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| Budget Amount *help |
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1993: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1992: ¥1,600,000 (Direct Cost: ¥1,600,000)
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| Keywords | Stepper / 3-D imaging characteristics / 3-D optical transfer characteristics / Active image processing / Active synthetic imaging / Tilted illumination / Annular apperture filter / Active projection optical system / 3次元光学伝達関数 |
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| Research Abstract |
Recently the reduction of the focal depth becomes important problems as increase the resolved power for the reducing projection exposure systems (stepper). The present study has aimed to establish active reducing projection optical system keeping both high resolved power and deep focal depth, by the use of an annular pupil filter with transparency distribution.
At the first stage (1992), 3D image characteristics evaluation experiments have been achieved under the use of annular pupil filter and coherent hollow cone illumination (coherent tilted illumination and its rotation around the optical axis). These experiments have shown that these optical systems basically keep the high resolution and the deep focal depth, although company with the increase of the background level and the reduction of the middle range optical transfer function. An active projection system using a rotatable annular pupil filter with transparency distribution under the tilted illumination synchronized to the rotation of the annular filter has been proposed to restore such degradation.
The development of the variable width annular pupil filter with center metal mesh absorber, which is equivalent to the annular pupil filter with transparency distribution, has been done at the next stage (1993). From the evaluation experiments of above active projection system, improvements to the resolution and the projection contrast have been clearly confirmed.
Although present approach is not directly connected to the practical projection exposure systems because of the insufficient projection intensity and contrast, it is expected that this technique can be applied to the future steppers.
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