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Microtribology of Super hard films

Research Project

Project/Area Number 04650072
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 機械材料工学
Research InstitutionNippon Institute of Technology

Principal Investigator

MIYAKE Shojiro  Nippon Institute of Technology Professor, 工学部, 教授 (70229813)

Co-Investigator(Kenkyū-buntansha) WATANABE Shuichi  Nippon Institute of Technology Assistant Professor, 工学部, 講師 (60220886)
Project Period (FY) 1992 – 1993
Project Status Completed (Fiscal Year 1993)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1993: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1992: ¥1,000,000 (Direct Cost: ¥1,000,000)
KeywordsMicrotribology / Diamond-like-carbon-film / Diamond film / Ion implantation / Fluorination / Scanning probe microscope / 立方晶窒化ホウ素膜 / プラズマ処理 / 原子間力顕微鏡
Research Abstract

To improve the microtribological properties, super hard films were deposited and investigated. The atomic-scale surface state is very important in microtribology. The require surface material is not usually a self-sacrificing type solid lubricant film but rather a wear-resistant and lubricating film. The surface compositions are thought to reduce atomic-scale wear and friction fluctions. A surface material composition model that feasibly achieves the micro-tribological zero wear is suggested here. Microwear properties of these films were investigated by scanning probe microscope (SPM).
The top surfaces of super hard films are modefied to improve the microtribological properties. Superior atomic-scale lubricities are obtained jby reducing the atomic interaction between the sliding surfaces. This requires a material with a low surface energy such as C-F or graphite. Superior wear resistance is obtained by improving the strength of films. Such improvements are made by using super hard materials such as silicon containing carbon film, diamond film or cubic boron nitride film.

Report

(3 results)
  • 1993 Annual Research Report   Final Research Report Summary
  • 1992 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] S.Miyake et al.: "Microtribological Improvement of Carbon Film by Silicon Inclusion and Fluorination" Wear. 168. 155-159 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake et al.: "Tribological improvement of thin carbon layers by ion beam enhanced depositon" Diamond Films and Technology. 167-176 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake: "Microtribology of Carbonaceous Films-Approach to the Atomic Scale Zero Wear-" 3rd IUMRS Intl.Conf.on Advanced Materials. VBb2.1(印刷中). (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake et al.: "Tribological Improvement of Thin Carbon Layers by Ion Beam Enhanced Depositon(IBED)" 2nd Intl.Conf.on the Appln.of Diamond Films and Related Materials. 649-654 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他5名: "窒素含有カーボン膜の形成とトライボロジー" トライボロジー会議'93春東京予稿集. 227-230 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他5名: "窒素含有カーボン膜の形成とマイクロスクラッチ硬度" 第7回ダイヤモンドシンポジウム. 58-59 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他2名: "フッ素化ダイヤモンド薄膜のトライボロジー" トライボロジー会議'93春東京予稿集. 223-226 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他2名: "イオン注入ダイヤモンド薄膜のマイクロトライボロジー特性" トライボロジー会議'93秋名古屋予稿集. 39-43 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他3名: "走査形プローブ顕微鏡によるマイカのマイクロ摩擦・摩耗評価" トライボロジー会議'93秋名古屋予稿集. 51-54 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他3名: "摩擦力顕微鏡による黒鉛、二硫化モリブデンの原子像観察" トライボロジー会議'93春東京予稿集. 59-62 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他3名: "走査形プローブ顕微鏡による黒鉛の原子像観察とフッ素化による特性の変化" トライボロジー会議'93秋名古屋予稿集. 383-386 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 三宅正二郎他2名: "マイカの原子摩耗とそのナノ加工への応用" トライボロジー会議'94東京. (発表予定). (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake et al.: "Microtribological Improvement of Carbon Film by Silicon Inclusion and Fluorination" Wear. 168. 155-159 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake: "Microtribology of Carbonaceous Films -Approach to the Atomic Scale Zero Wear-" 3rd IUMRS Int1. Conf. on Advanced Materials. VBb2.1 V-20.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake et al.: "Tribological improvement of thin carbon layrs by ion beam enhanced depositon(IBED)" Diamond Films and Technology. 3. 167-176 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake et al.: "Tribological improvement of thin carbon layrs by ion beam Enhanced Depositon(IBED)" 2nd Int1. Conf. on the App1n. of Diamond Films and Related Materials. 649-654 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] S.Miyake et al.: "Microtribological Improvement of Carbon Film by Silicon Inclusion and Fluorination" Wear. 168. 155-159 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] S.Miyake et al.: "Tribological improvement of thin carbon layers by ion beam enhanced depositon" Diamond Films and Technology. 3. 167-176 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] S.Miyake: "Microtribology of Carbonaceous Films-Approach to the Atomic Scale Zero Wear-" 3rd IUMRS Intl.Conf.on Advanced Materials,. VBb2.1(印刷中). (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] S.Miyake et al.: "Tribological Improvement of Thin Carbon Layers by Ion Beam Enhanced Depositon(IBED)" 2nd Intl.Conf.on the Appln.of Diamond Films and Related Materials. 649-654 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他5名: "窒素含有カーボン膜の形成とトライボロジー" トライボロジー会議'93春東京予稿集. 227-230 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他5名: "窒素含有カーボン膜の形成とマイクロスクラッチ硬度" 第7回ダイヤモンドシンポジウム. 58-59 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他2名: "フッ素化ダイヤモンド薄膜のトライボロジー" トライボロジー会議'93春東京予稿集. 223-226 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他2名: "イオン注入ダイヤモンド薄膜のマイクロトライボロジー特性" トライボロジー会議'93秋名古屋予稿集. 39-43 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他3名: "走査型プローブ顕微鏡によるマイカのマイクロ摩擦・摩耗評価" トライボロジー会議'93秋名古屋予稿集. 51-54 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他3名: "摩擦力顕微鏡による黒鉛、二硫化モリブデンの原子像観察" トライボロジー会議'93春東京予稿集. 59-62 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他3名: "走査型プローブ顕微鏡による黒鉛の原子像観察とフッ素化による特性の変化" トライボロジー会議'93秋名古屋予稿集. 383-386 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他2名: "マイカの原子摩耗とそのナノ加工への応用" トライボロジー会議'94東京. (発表予定). (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅正二郎他4名: "ダイヤモンド膜およびフッ素化ダイヤモンド膜表面のマイクロ摩擦特性" トライボロジー会議'94東京. (発表予定). (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 三宅 正二郎 他4名: "固体潤滑剤の摩擦力顕微鏡像観察" 日本トライボロジー学会トライボロジー会議'93論文集. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 三宅 正二郎 他5名: "窒素含有カーボン膜の形成とトライボロジー" 日本トライボロジー学会トライボロジー会議'93論文集. (1993)

    • Related Report
      1992 Annual Research Report
  • [Publications] 三宅 正二郎 他2名: "フッ素化によるダイヤモンド膜のトライボロジー特性改善効果" 日本トライボロジー学会トライボロジー会議'93論文集. (1993)

    • Related Report
      1992 Annual Research Report

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Published: 1992-04-01   Modified: 2016-04-21  

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